• Title/Summary/Keyword: Micro-fabrication Technology

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Fabrication of Glass Microstructure Using Laser-Induced Backside Wet Etching (레이저 습식 후면 식각공정을 이용한 미세 유리 구조물 제작)

  • Kim, Bo Sung;Park, Min Soo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.38 no.9
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    • pp.967-972
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    • 2014
  • The good light permeability and hardness of glass allow it to be used in various fields. Non-conventional machining methods have been used for glass machining because of its brittle properties. As one non-contact machining method, a laser has advantages that include a high machining speed and the fact that no tool making is required. However, glass has light permeability. Thus, the use of a laser to machine glass has limitations. A nanosecond pulse laser can be used at low power for laser-induced backside wet etching, which is an indirect method. In previous studies, a short-wave laser that had good light absorption but a high price was used. In this study, a near-infrared laser was used to test the possibility of glass micro-machining. In particular, when deeper machining was conducted on a glass structure, more problems could result. To solve these problems, microstructure manufacturing was conducted using ultrasonic vibration.

Fabrication of High Strength Transparent Bulletproof Materials by Ion Exchanged Borosilicate Glass (보로실리케이트 유리의 이온교환에 의한 고강도 투명방탄소재의 제조)

  • Kim, Young-Hwan;Shim, Gyu-In;Lim, Jae-Min;Choi, Se-Young
    • Journal of the Korea Institute of Military Science and Technology
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    • v.13 no.6
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    • pp.1121-1126
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    • 2010
  • Borosilicate glass (81% $SiO_2$-2% $Al_2O_3$-13% $B_2O_3$-4% $Na_2O_3$) was prepared, and the glass was ion exchanged in $KNO_3$ powder containing different temperature and time. The $K^+-Na^+$ ion exchange takes place at the glass surface and creates compressed stress, which raise the mechanical strength of the glass. The depth profile of $Na^+$ and $K^+$ was observed by electron probe micro analyzer. With the increasing heat-treatment time from 0min to 20min, the depth profile was increased from 17.1um to 29.4um, but mechanical properties were decreased. It was also found out that excessive heat treatment brings stress relaxation. The Vickers hardness, Fracture Toughness and bending strength of ion exchanged samples at $570^{\circ}C$ for 10min were $821.8H_v$, $1.3404MPa{\cdot}m^{1/2}$, and 953MPa, which is about 120%, 180%, and 450% higher than parent borosilicate glass, respectively. Transmittance was analyzed by UV-VIS-NIR spectrophotometer. Transmittance of ion exchanged borosilicate glass was decreased slightly at visible-range. It can be expected that transparent bulletproof materials in more light-weight and thinner by ion exchanged borosilicate glass.

A Microcatuator for High-Density Hard Disk Drive Using Skewed Electrode Arrays (경사 전극 배열을 이용한 고밀도 하드 디스크의 마이크로 구동부 제작)

  • Choi, Seok-Moon;Park, Sung-Jun
    • Journal of Institute of Convergence Technology
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    • v.1 no.2
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    • pp.6-15
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    • 2011
  • This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

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Fabrication of Methanol Sensors Using Conductive Polypyrrole Nanofibers with a Core-Shell Structure (코아-셀 구조를 가지는 전도성 폴리피롤 나노섬유를 이용한 메탄올 센서 제작)

  • Jun, Tae-Sun;Lee, Sungho;Kim, Yong Shin
    • Journal of Sensor Science and Technology
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    • v.23 no.6
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    • pp.383-387
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    • 2014
  • Electrically conductive polypyrrole-polyvinylpyrrolidone (PPy-PVP) nanofiber mats with a core-shell structure have been successfully fabricated by a two-step process: the formation of FeCl3-containing PVP nanofiber mat by electrospinning, and the vapor-phase polymerization (VPP) of pyrrole monomer on the mat in a sealed chamber at room temperature. Surface morphology and chemical composition of the PPy-PVP mat were characterized by SEM, EDX and FTIR analyses. The as-prepared nonwoven mat was composed of PPy-PVP nanofibers with an average diameter of 300 nm. The sheet conductivity of the nanofiber mat was measured to be approximately 0.01 S/cm by a four-point probe. We have also investigated gas-sensing properties of PPy-PVP nanofiber mat upon exposure to methanol vapor. The PPy-PVP nanofiber sensors were observed to have excellent methanol-sensing performance. The nanofiber-based core-shell nanostructure could give an opportunity to fabricate a highly sensitive and fast response sensor due to its high surfaceto-volume ratio.

Real-Time Prediction of Electrode Wear for the Small Hole Pass-Through by EDM-drill (방전 드릴을 이용한 미세 홀 관통 공정의 전극 소모량 실시간 예측)

  • Choi, Yong-Chan;Huh, Eun-Young;Kim, Jong-Min;Lee, Cheol-Soo
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.2
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    • pp.268-274
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    • 2013
  • Electric discharge machining drill (EDM-drill) is an efficient process for the fabrication of micro-diameter deep metal hole. As there is non-physical contact between tool (electrode) and workpiece, EDM-drill is widely used to machine the hard machining materials such as high strength steel, cemented carbide, titanium alloys. The electro-thermal energy forces the electrode to wear out together with the workpiece to be machined. The electrode wear occurs inside of a machining hole. and It causes hard to monitor the machining state, which leads the productivity and the quality to decrease. Thus, this study presents a methodology to estimated the electrode wear amount while two coefficients (scale factor and shape factor) of the logarithmic regression model are evaluated from the experiment result. To increase the accuracy of estimation model, the linear transformation method is adopted using the differences of initial electrode wear differences. The estimation model is verified through experiment. The experimental result shows that within minute error, the estimation model is able to predict accurately.

The Fabrication and Trial Performance of Injector Driver for CRDI (CRDI용 인젝터 드라이버 제작과 성능시험)

  • Kim, Sang-Am;Wang, Woo-Gyeong;Kim, On
    • Journal of Power System Engineering
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    • v.17 no.2
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    • pp.38-45
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    • 2013
  • In this study, for carrying out the spray and combustion experiment using a Common Rail Direct Injection(CRDI) system, the controller was fabricated to drive a high speed camera, a injector and a laser beam sequentially at a low cost. CB280 module of one-chip micro processer was used for the controller. In order to confirm responsibility and utility of the controller, the current drive performance, the spray behavior and the injection rate were tested and analyzed under various experimental conditions. As this research results, we found that the fabricated controller was able to control the devices for the spray experiment precisely with the input value in program and it had the dynamic load responsibility and repetition. Also, we found that the injection rates of our experimental results were higher than those of others at the same injection pressure and the controller connected with the laser system and the data acquisition system had validity for carrying out the spray visualization experiment.

Design and fabrication of wafer scale microlens array for image sensor using UV-imprinting (UV 임프린팅을 이용한 이미지 센서용 웨이퍼 스케일 마이크로렌즈 어레이 설계 및 제작)

  • Kim, Ho-Kwan;Kim, Seok-Min;Lim, Ji-Seok;Kang, Shin-Ill
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.100-103
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    • 2007
  • A microlens array has been required to improve light conversion efficiency in image sensors. A microlens array can be usually fabricated by photoresist reflow, hot-embossing, micro injection molding, and UV-imprinting. Among these processes, a UV-imprinting, which is operated at room temperature with relatively low applied pressure, can be a desirable process to integrate microlens array on image sensors, because this process provides the components with low thermal expansion, enhanced stability, and low birefringence, furthermore, it is more suitable for mass production of high quality microlens array. In this study, to analyze the optical properties of the wafer scale microlens array integrated image sensor, another wafer scale simulated image sensor chip array was designed and fabricated. An aspherical square microlens was designed and integrated on a simulated image sensor chip array using a UV-imprinting process. Finally, the optical performances were measured and analyzed.

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An analysis of the Wi-Ni Carbide Alloy Diffusion Bonding technique in its application for DME Engine Fuel Pump

  • Chun, Dong-Joon
    • International Journal of Advanced Culture Technology
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    • v.8 no.2
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    • pp.246-251
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    • 2020
  • Dimethyl Ether(DME) engine use a highly efficient alternative fuel having a great quantity of oxygen and has a advantage no polluting PM gas. The existing DME fuel cam material is a highly expensive carbide alloy, and it is difficult to take a price advantage. Therefore the study of replacing body area with inexpensive steel material excluding piston shoe and contact area which demands high characteristics is needed. The development of WC-Ni base carbide alloy optimal bonding composition technique was accomplished in this study. To check out the influence of bonding temperature and time, bonding characteristics of sintering temperature was experimented. The hardness of specimen and bonding rate were measured using ultrasound equipment. The bonding state of each condition was excellent, and the thickness of mid-layer, temperature and maintaining time were measured. The mid-layer thickness according to bonding temperature and maintaining time were observed with optical microscope. We analyzed the micro-structural analysis, formation of bonding specimen, wafer fabrication and fuel cam abrasion test. Throughout this study, we confirmed that the fuel cam for DME engine which demands high durability against velocity and pressure is excellent.

The Surry Characteristic Using Monitoring System in MEMS CMP (MEMS CMP에서 모니터링 시스템을 이용한 슬러리 특성)

  • Park, Sung-Min;Jeong, Suk-Hoon;Park, Boum-Young;Lee, Sang-Gik;Jeong, Won-Duk;Jang, One-Moon;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.573-574
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    • 2006
  • The planarization technology of Chemical-mechanical polishing(CMP), used for the manufacturing of multi-layer various material interconnects for Large-scale Integrated Circuits (LSI), is also readily adaptable as an enabling technology in MicroElectroMechanical System (MEMS) fabrication, particularly polysilicon surface micromachining. However, general LSI device CMP has partly distinction aspects, the pattern scale and material sorts in comparison with MEMS CMP. This study performed preliminary CMP tests to identify slurry characteristic used in general IC device. The experiment result is possible to verify slurry characteristic in MEMS structure material.

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Punching of Micro-Hole Array (미세 홀 어레이 펀칭 가공)

  • Son Y. K.;Oh S. I.;Rhim S. H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.09a
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    • pp.193-197
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    • 2005
  • This paper presents a method by which multiple holes of ultra small size can be punched simultaneously. Silicon wafers were used to fabricate punching die. Workpiece used in the present investigation were the rolled pure copper of $3{\mu}m$ in thickness and CP titanium of $1.5{\mu}m$ in thickness. The metal foils were punched with the dies and arrays of circular and rectangular holes were made. The diameter of holes ranges from $2-10{\mu}m$. The process set-up is similar to that of the flexible rubber pad forming or Guerin process. Arrays of holes were punched successfully in one step forming. The punched holes were examined in terms of their dimensions, surface qualities, and potential defect. The effects of the die hole dimension on ultra small size hole formation of the thin foil were discussed. The optimum process condition such as proper die shape and diameter-thickness ratio (d/t) were also discussed. The results in this paper show that the present method can be successfully applied to the fabrication of ultra small size hole array in a one step operation.

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