• 마이크로전자및패키징학회지
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• 제23권2호
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• pp.1-10
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• 2016

This paper reports the trends of researches and technologies of electronic packaging using graphene. Electronic packaging is to provide the signal and electrical current among electronic components, to remove the heat in electronic systems or components, to protect and support the electronic components from external environment. As the required functions and performances of electronic systems or components increase, the electronic packaging has been intensively attracted attention. Therefore, technologies such as miniaturization, high density, Pb-free material, high reliability, heat dissipation and so on, are required in electronic packaging. Recently, graphene, which is a single two-dimensional layer of carbon atoms, has been extensively investigated because of its superior mechanical, electrical and thermal properties. Until now, many studies have been reported the applications using graphene such as flexible display, electrode, super capacitor, composite materials and so on. In this paper, we will introduce and discuss various studies on recent technologies of electronic packaging using graphene for solving the required issues.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2006년도 춘계학술대회 논문집
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• pp.239-242
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• 2006

LCD-BLU (Liquid Crystal Display - Back Light Unit) is one of kernel parts of LCD unit and it consists of several optical sheets(such as prism, diffuser and protector sheets), LGP (Light Guiding Plate), light source (CCFL or LED) and mold frame. The LGP of LCD-BLU is usually manufactured by forming numerous dots with $50{\sim}200$ um in diameter on it by etching process. But the surface of the etched dots of LGP is very rough due to the characteristics of the etching process during the mold fabrication, so that its light loss is high along with the dispersion of light into the surface. Accordingly, there is a limit in raising the luminance of LCD-BLU. In order to overcome the limit of current etched dot patterned LGP, optical pattern design with 50um micro-lens was applied in the present study. The micro-lens pattern fabricated by modified LiGA with thermal reflow process was applied to the optical design of LGP. The attention was paid to the effects of different aspect ratio (i.e. $0.2{\sim}0.5$) of optical pattern conditions to the brightness distribution of BLU with micro-lens patterned LGP. Finally, high aspect ratio micro-lens patterned LGP showed superior results to the one made by low aspect ratio in average luminance.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.2004-2006
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• 1996

A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

• 인터넷정보학회논문지
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• 제12권5호
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• pp.127-136
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• 2011

본 논문의 목적은 마이크로 블로그를 사용함에 있어서 자발적인 자기 노출에 영향을 주는 요인을 살펴보는데 있다. 마이크로 블로그 사용이 폭발적으로 증가하고 있는 상황에서, 자신의 정보를 자발적으로 노출하는 사람들에 대한 연구는 아직도 부족한 실정이다. 이러한 측면에서 본 연구는 마이크로 블로그 상에서 자발적인 자기 노출의 과정을 계획된 행위이론에 근거하여 조사하였다. 이를 위해 본 연구는 자기노출에 대한 태도, 주관적 규범, 인지된 행위 통제 등의 변수를 자기 노출 행위의 선행변수로 설정하였다. 또 프라이버시 염려, 인지된 즐거움, 사회적 참여를 위한 정보 동기, 관계적 동기의 자기 노출 태도에 대한 영향 정도를 조사하였다. 본 연구의 결과는 다음과 같다. 우선 자기노출에 대한 태도, 주관적 규범, 인지된 행위 통제 등의 변수는 자기노출 행위에 대해 통계적으로 유의한 관계를 갖는 것으로 나타났다. 하지만 인지된 즐거움을 제외하곤 프라이버시 염려, 정보 동기 및 관계적 동기 등은 통계적으로 유의한 관계를 갖고 있지 않은 것으로 나타났다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1033-1036
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• 2002

Wafer bonding methods such as fusion and anodic bonding suffer from high temperature treatment, long processing time, and possible damage to the micro-scale sensor or actuators. In the localized bonding process, beating was conducted locally while the whole wafer is maintained at a relatively low temperature. But previous research of localized heating has some problems, such as non-uniform soldering due to non-uniform heating and micro crack formation on the glass capsule by thermal stress effect. To address this non-uniformity problem, a new heater configuration is being proposed. By keeping several points on the heater strip at calculated and constant potential, more uniform heating, hence more reliable wafer bonding could be achieved. The proposed scheme has been successfully demonstrated, and the result shows that it will be very useful in hermetic packaging. Less than 0.2 ㎫ contact Pressure were used for bonding with 150 ㎃ current input for 50${\mu}{\textrm}{m}$ width, 2${\mu}{\textrm}{m}$ height and 8mm $\times$ 8mm, 5mm$\times$5mm, 3mm $\times$ 3mm sized phosphorus-doped poly-silicon micro heater. The temperature can be raised at the bonding region to 80$0^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional micro heaters. For gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for gross leak check. The pass ratio of bonded dies was 70%, for conventional localized heating, and 85% for newly developed FP scheme. The bonding strength was more than 30㎫ for FP scheme packaging, which shows that FP scheme can be a good candidate for micro scale hermetic packaging.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.466-466
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• 2011

There have been several methods to fabricate carbon nanotube (CNT) emitters, which include as-grown, spraying, screen-printing, electrophoresis and bonding methods. Unfortunately, these techniques generally suffer from two main problems. One is a weak mechanical adhesion between CNTs and the cathode. The as-grown, spraying and electrophoresis methods show a weak mechanical adhesion between CNTs and the cathodes, which induces CNT emitters pulled out under a high electric field. The other is a severe degradation of the CNT tip due to organic binders used in the fabrication process. The screen-printing method which is widely used to fabricate CNT emitters generally shows a critical degradation of CNT emitters caused by the organic binder. Such kinds of problems induce a short lifetime of the CNT field emitters which may limit their practical applications. Therefore, a robust CNT emitter which has the strong mechanical adhesion and no degradation is still a great challenge. Here, we introduce a simple and effective technique for fabrication of CNT field emitter, namely filtration-taping-transfer method. The CNT emitters fabricated by the filtration-taping-transfer method show the low turn-on electric fields, the high emission current, good uniformity and good stability. The enhanced emission performance of the CNT emitters is mainly attributed to high emission sites on the emitter area, and to good ohmic contact and strong mechanical adhesion between the emitters and cathodes. The CNT emitters using a simple and effective fabrication method can be applied for various field emission applications such as field emission displays, lamps, e-beam sources, and x-ray sources. The detail fabrication process will be covered at the poster.

• 상하수도학회지
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• 제24권5호
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• pp.629-639
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• 2010

To evaluate the performance of high rate coagulation system(HRCS) for CSOs treatment, fundamental function of lab scale HRCS has been tested by using the Jar tester and lab scale HRCS. The optimum pH dose by Streaming Current value was found in the range of 5.3~6.0 in Fe(III), and in the range of 5.8~6.6 in Al(III) and the optimum chemical dose were 0.44mM of $Al_2(SO_4)_3$ and 0.93mM of $FeCl_3$. The removal efficiencies at optimum $Al_2(SO_4)_3$ dose were 75%($TCOD_{Cr}$), 97%(TP), 95%(SS) and 96%(turbidity), respectively. And the removal efficiency of particles with less than $5{\mu}m$ of diameter was 70% and that of particles with higher than $5{\mu}m$ of diameter was 90%. The optimum alum dose in lab scale HRCS was 150mg/L, and the treatment efficiency was the best with addition of 1.0mg/L polymer. The effect of Micro sand addition was not clear, because the depth of the sediment tank in lab scale HRCS was not long enough. But the HRT of this lab scale HRCS was able to be shorten less then 7 minutes by adding the micro sand. The surface loading rates with respect to using different chemicals were 0.43m/h with alum only, 5.78m/h with alum and polymer and 6.22m/h with alum, polymer and micro sand. As a result, HRCS using coagulant, polymer and micro sand developed in this study was evaluated to be very effective for CSOs treatment.

• 한국표면공학회지
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• 제45권3호
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• pp.130-135
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• 2012

Hydrogen charging was electrochemically conducted at high strength DP steels and TRIP steel with varying charging time. The penetration depths and the mechanical properties with charging conditions were investigated through the distribution of micro-hardness and the microstructural observation of the subsurface zone. The micro-Vickers hardness was measured to evaluate the hydrogen embrittlement of subsurface zone in addition to the microscope investigation. It was shown that the hydrogen amounts decreased in DP steels and TRIP steel with increasing hydrogen charging time. As shown by micro-Vickers hardness test and small punch test results, micro-Vickers hardness and SP energy for DP steels and TRIP steel decreased with increasing hydrogen charging time, for constant value of charging current density. SEM investigation results for the hydrogen contained samples showed that the major fracture behavior was brittle fracture which results in dimples on fractured surface and the size of dimples were decreased with increasing hydrogen charging time. These results indicate that hydrogen embrittlement is the major cause for the fracture of high strength steels and also micro-Vickers hardness test and small punch test is a valuable test method for hydrogen embrittlement of high strength sheet steels.

• Journal of Magnetics
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• 제10권3호
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• pp.122-127
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• 2005

New classes of LC resonators for micro magnetic sensor device were proposed and fabricated. The first type LC resonator (Type I) consists of a small piece of microwire and two cylindrical electrodes at the end of the microwire without direct contact to its ferromagnetic core. In type I resonator the ferromagnetic core of the microwire and cylindrical electrodes act as an inductor and two capacitors respectively to form a LC circuit. The second type LC resonator (Type II) consists of a solenoidal micro-inductor with a bundle of soft magnetic microwires as a core. The solenoidal micro-inductors fabricated by MEMS technique were $500\sim1,000\;\mu{m}$ in length with $10\sim20$ turns. A capacitor is connected in parallel to the micro-inductor to form a LC circuit. A tiny glass coated $CO_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire was fabricated by a glass-coated melt spinning technique. A supergiant magneto-impedance effect was found in a type I resonator as much as 400,000% by precise tuning frequency at around 518.51 MHz. In type II resonator the changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. The phase angle between current and voltage was also strongly dependent on the magnetic field. The drastic increments of magnetoimpedance at near the resonance frequency were observed in both types of LC resonators. Accordingly, the sudden change of the phase angle, as large as $180^{\circ}C$, evidenced the occurrence of the resonance at a given external magnetic field.

• 전기화학회지
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• 제3권2호
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• pp.115-120
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• 2000

양극 물질로 산화바나듐 박막, 고체전해질로는 LiPON 박막 그리고 음극 물질로는 리튬 금속 박막을 선택하여 $Li/LiPON/V_2O_5/Pt$ 구조의 전고상 박막 전지를 제작하였고 전지 특성을 평가하였다. 산화바나듐 박막은 여러 산소 분압에서 직류 반응성 스퍼터링으로 증착하여 전기화학적 특성을 분석한 결과 $20\%\;O_2/Ar$비에서 가장 우수한 가역 특성을 나타내었다. 직류 반응성 스퍼터링에 의해 산화바나듐 박막을 제작한 후 진공을 그대로 유지한 상태에서 r.f. 반응성 스퍼터링에 의해 LiPON 고체전해질 박막을 증착하였다. 그 후 dry room내에서 진공 열증착법에 의해 리튬 금속 박막을 증착하여 전고상의 박막 전지를 제작하였다. $Li/LiPON/V_2O_5$ 박막 전지를 전압 범위와 전류 밀도를 변화시켜 충방전 시험을 행한 결과 $7{\mu}A/cm^2$의 전류 밀도와 3.6-2.7 V의 전압범위에서 가장 우수한 가역 특성을 나타내었다. $Li/LiPON/V_2O_5$박막 전지로 초시계를 구동 시켰으며 이는 in-situ공정에 의해 제작된 박막 전지가 소자 에너지원으로의 응용 가능성을 보여 주었다.