• Title/Summary/Keyword: Micro-cavity technology

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Holographic nanolithography technique for the fabrication of micro-cavity arrays (마이크로 공진기 어레이 제작을 위한 홀로그래픽 나노노광 기술)

  • Kim, Jeong-Hoi;Kim, Chang-Su;Han, Han-Wook
    • Proceedings of the IEEK Conference
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    • 2006.06a
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    • pp.641-642
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    • 2006
  • Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography techniques. Using two laser beams with different angles incident on the sample, micro-cavities with 2D internal nanostructures are patterned with a few micrometer periods.

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Substrate-integrated-waveguide cavity-backed circularly polarized antenna with enhanced bandwidth and gain

  • Shankaragouda M. Patil;Rajeshkumar Venkatesan
    • ETRI Journal
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    • v.46 no.3
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    • pp.404-412
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    • 2024
  • We propose a method for increasing the bandwidth of a substrate-integrated-waveguide (SIW) cavity-backed antenna with taper-based micro-strip SIW transition feeding. For radio transmission, a circular slot is etched on top of the SIW cavity. For optimal antenna design, the slot is etched slightly away from the cavity center to generate circularly polarized waves. Simulations show a wide axial ratio bandwidth of 7.860% between 11.02 GHz and 11.806 GHz. Experimental results confirm a similar wide axial ratio bandwidth of 4.9% between 10.8 GHz and 11.35 GHz. An SIW feed from an inductive window excites the radiating circular slot, resulting in a simulated wide impedance range of 1.548 GHz (10.338 GHz-11.886 GHz) and bandwidth of 13.93%. Experimental results show a wide impedance of 2.08 GHz (10.2 GHz-12.08 GHz) and bandwidth of 18.84%. The SIW cavity-backed antenna creates a unidirectional pattern, leading to gains of 6.61 dBi and 7.594 dBi in simulations and experiments, respectively. The proposed antenna was fabricated on a Rogers RT/Duroid 5880 substrate, and the reflection coefficient, radiation patterns, and gains were tested and compared using a computer simulator. The developed broadband antenna seems suitable for X-band applications.

The Fabrication of SOB SOI Structures with Buried Cavity for Bulk Micro Machining Applications

  • Kim, Jae-Min;Lee, Jong-Chun;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.739-742
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    • 2002
  • This paper described on the fabrication of microstructures by DRIE(deep reactive ion etching). SOI(Si-on-insulator) electric devices with buried cavities are fabricated by SDB technology and electrochemical etch-stop. The cavity was fabricated the upper handling wafer by Si anisotropic etch technique. SDB process was performed to seal the fabricated cavity under vacuum condition at -760 mmHg. In the SDB process, captured air and moisture inside of the cavities were removed by making channels towards outside. After annealing($1000^{\circ}C$, 60 min.), The SDB SOI structure was thinned by electrochemical etch-stop. Finally, it was fabricated microstructures by DRIE as well as an accurate thickness control and a good flatness.

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A study on the micro pattern replication properties of large area in injection molding (대면적 미세패턴 사출성형에서의 전사 특성 실험)

  • Kim, T.H.;Yoo, Y.E.;Je, T.J.;Kim, C.W.;Park, Y.W.;Choi, D.S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.05a
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    • pp.205-208
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    • 2007
  • We injection molded a thin plate with micro prism patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, injection rate or packing pressure. The size of the $90^{\circ}$ prism pattern is $50{\mu}m$ and the size of the plate is $400mm{\times}400mm$. The thickness is 1mm. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns of the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

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Fabrication of Mold-insert for Micro-lens Using Electroforming Process (Electroforming 공정을 이용한 마이크로 렌즈용 몰드 인서트의 제작)

  • 이남석;문수동;강신일
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2002.05a
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    • pp.94-97
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    • 2002
  • Micromolding methods are most suitable for mass production of plastic microlens and lens array with low cost. Among the procedures related with micromolding of microlens array, fabrication of mold insect which contains micro cavity of lens shape is the most important stage. In this study, nickel mold inserts for 45 $\mu\textrm{m}$ and 95 $\mu\textrm{m}$ diameters lens way were fabricated using electroforming process. The mother for metal mold inset was made using reflow method. A micro compression molding with polymer powders was used to test the qualities of the metal mold insets. Micro lens profile and surface roughness was measured by interferometric technique and AFM, respectively. The final molded lens replicated the mother well, and had good surface quality.

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Micro Structure Fabrication Using Injection Molding Method (인젝션 몰딩 기술을 이용한 마이크로 구조물 성형)

  • Je T. J.;Shin B. S.;Chung S. W.;Cho J. W.;Park S. S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2002.02a
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    • pp.253-259
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    • 2002
  • Micro cell structures with high aspect ratio were fabricated by injection molding method. The mold inserts had dimension $1.9cm\times8.3cm$ composed of a lot of micro posts and were fabricated by LIGA process. The size of the micro posts was $157{\mu}m\times157{\mu}m\times500{\mu}m$ and the gaps between two adjacent posts were $50{\mu}m$. Using Polymethylmethacrylate (PMMA) injection molding was performed. The key experimental variables were temperature, pressure, and time. By controlling these, good shaped mim cell structures with $50{\mu}m$ in wall thickness and $500{\mu}m$ in depth were obtained. In order to understand micro molding mechanism, shape changes of molded PMMA were studied with experimental variables. And the durability of mold insert was investigated, too. The results show that the most important factor in molding processes was the mold temperature that is closely related to the filling of the melt into the micro cavity. And the holding time before cooling showed a great effect on the quality of molded PMMA.

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Observation of Strong Coupling between Cavity Photon and Exciton in GaN Micro-rod

  • Gong, Su-Hyun;Ko, Suk-Min;Cho, Yong-Hoon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.297.2-297.2
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    • 2014
  • Strong exciton-photon coupling in microcavities have generated an intense research effort since quasiparticles called exciton polaritons are produced and shows interesting phenomena. Most of studies have been done with GaAs based microcavities at cryogenic temperature. Recently, GaN material which has large exciton binding energy and oscillator strength has much attention because strong coupling between photon and exciton could be realized at room temperature. However, fabrication of high quality microcavity using GaN is challengeable due to the large mismatch between the lattice and the thermal expansion coefficient in GaN based distributed Bragg mirror. Here, we observed strong coupling regime of exciton-photon in GaN micro-rods which were grown by metalorganic vapour phase epitaxy (MOCVD) on Si substrate. Owing to the hexagonal cross-section of micro-rod, whispering gallery modes of photon are naturally formed and could be coupled with exciton in GaN. Using angle-resolved micro-photoluminescence measurement, exciton polariton dispersion curves were directly observed from GaN micro-rod. We expect room temperature exciton polariton condensation could be realized in high quality GaN micro-rod.

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Effects of Loess, Rhodobacter, and Bacillus Mixture on the Trees Cavity Treatment (수목 공동치료를 위한 황토, Rhodobacter, Bacillus 조합의 효과)

  • Jeong, Sun-Hee;Song, Hwan-Joon;Jeong, Chang-Hwa;Huh, Moo-Ryong
    • Journal of agriculture & life science
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    • v.45 no.4
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    • pp.59-63
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    • 2011
  • The symptoms such as weaken shape, partial and full death in nurse- and old- trees have been mostly caused by the occurrence of cavity. In general, the adaption of poly-urethane has been practised routinely in the way of treatment in cavity. However, the use of poly-urethane was not an effective, but it was related to pollution materials. Here, the experiment was conducted to identify the effects of the treatments of loess or micro-organisms for the alternatives of poly-urethane. The cavities which occurred in Zelkova serrata, Prunus yedoensis and Quercus myrsinaefolia were treated by poly-urethane, loess, mixtured loess and micro-organism (Rhadobacter), and mixtured loess and micro-organism (Rhodobacter + bacillus). As the results of this experiment, it was shown that the treatment of mixtured loess and micro-organism (Rhodobacter + bacillus) induced to develop greater callus formation in the cavity up to 97% in Zelkova serrata, up to 87% in Prunus yedoensis, and by 73% in Quercus myrsinaefolia than the treatment of poly-urethane. But the only loess and mixtured loess and micro-organism (Rhadobacter) was a similar or lower callus formation ratio than poly-urethane.

Development of Synthetic-Jet based micro air pump for BOP system of mobile fuel cell (모바일 연료전지 BOP를 위한 Synthetic-Jet 기반 마이크로 에어펌프 개발)

  • Kim, K.S.;Choi, J.P.;Koo, B.S.;Jang, J.H.;Seo, Y.H.;Kim, B.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2008.05a
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    • pp.247-251
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    • 2008
  • This paper presents a micro air pump actuated by PZT actuator (synthetic jet actuator) for air supply for micro fuel cells. The synthetic jet actuators are usually created by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, in/outlet channel and PZT diaphragms. To design the micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. A prototype of the micro air pump, with a size of $mm{\times}mm{\times}mm$, was fabricated by PDMS replication process and was conducted performance test. To control the PZT actuator, we used the SP4423 micro chips that can be amplified input voltage to reduce the controller size and the power consumption. With a voltage of 3V at 100Hz, the air pump's pumping pressure is 600pa and its power consumption is only 0.1mW.

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Microstrip Patch Antenna with a Metal Cavity Using Conducting Vias (다수의 도체 비어로 형성된 캐비티가 있는 마이크로스트립 패치 안테나)

  • Byun, Woo-Jin;Kim, Bong-Soo;Eun, Ki-Chan;Kim, Kwang-Sun;Song, Myung-Sun
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2005.11a
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    • pp.371-374
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    • 2005
  • This paper presents the design and fabrication of a cost effective and broad band 8$\times$8 stacked patch array antenna which are backed by a metal cavity operating at 400Hz based on 4 layers LTCC technology. Gain of antenna can be enhanced by using a metal cavity, which can be easily implemented by using LTCC substrates and vias. The broadband performance can be obtained by varying the dimension of patch and the number of layers. Furthermore, to keep the feeding network as smal1 as possible and reduce radiation from feeding network a mirrored patch orientation and embedded micro strip line are adopted, The fabricated antenna is $40\times45\times0.4$ $mm^3$in size. It shows gain 20.4dBi, beam width 10.7deg and impedance bandwidth of l0dE return loss 3.35GHz (40.9$\sim$44.25 GHz), which is about 8% of a center frequency.

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