Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2006.06a
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- Pages.641-642
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- 2006
Holographic nanolithography technique for the fabrication of micro-cavity arrays
마이크로 공진기 어레이 제작을 위한 홀로그래픽 나노노광 기술
- Kim, Jeong-Hoi (Department of Electronics and Electrical Engineering Pohang University of Science and Technology) ;
- Kim, Chang-Su (Department of Electronics and Electrical Engineering Pohang University of Science and Technology) ;
- Han, Han-Wook (Department of Electronics and Electrical Engineering Pohang University of Science and Technology)
- Published : 2006.06.21
Abstract
Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography techniques. Using two laser beams with different angles incident on the sample, micro-cavities with 2D internal nanostructures are patterned with a few micrometer periods.
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