• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.195-201
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• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.6
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• pp.551-557
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• 2009

A development of smart materials is becoming a prominent issue on present industries. A smart material, included in functions, is needed for micro fabrication. A shape memory alloy(SMA) in a smart material is best known material. Ni-Ti alloy, composed of nikel and titanium is one of the best shape memory alloy(SMA). Nitinol SMA is used for a lot of high tech industry such as aero space, medical device, micro actuator, sensor system. However, Ni-Ti SMA is difficult to process to make a shape and fabrications as traditional machining process. Because nitinol SMA, that is contained nikel content more than titanium content, has similar physical characteristics of titanium. In this paper, the characteristics of ECM grooving process for nitinol SMA are investigated by experiments. The experiments in this study are progressed for power, gap distance and machining time. The characteristics are found each part. Fine shape in work piece can be found on conditions; current 6A, duty factor 50%, gap distance 15%, gap distance $15{\mu}m$, machining time 10min.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.419-425
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• 2010

To machine the micro hole, laser machining system is widely used, however, the system cannot fabricate the micro hole with high aspect ratio and good surface finish. To break the obstacles, the high frequency vibration mechanism with PZT (Piezoelectric Transducers) is proposed in this paper. The mechanism will vibrate the laser beam in vertical direction so that the aspect ratio and surface finish may be higher than the conventional. The mechanism vibrates the eyepiece of laser optics. In addition to the benefits, the mechanism enables us to have high precision and flexibility. It decreases burr and debris during machining. And it is able to machine various materials of workpiece. This research include high frequency and large travel range of the proposed mechanism. The PZT motion of mechanism and analysis on the sensitivity of design parameters are extracted from a finite element method (FEM) simulation. In the analysis, the target vibration mode without parasitic motion is designated to have the target frequency and high amplitude.

• Proceedings of the KOSOMBE Conference
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• v.1996 no.11
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• pp.22-24
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• 1996

Small size DC motor control method for portable drug delivery system has been developed to be used for the actuator of insulins pump. The control method gives the controllabilities both in high speed(40-50 revolution per second(rps)) DC motor drive and also in low speed(0.5-1rps). In low speed mode DC motor is controlled to act like stepping motor and in high speed to optimize power consumption. To control both mode modified bang bang control is suggested. Using this method small size DC motor(spec.) speed is controlled from 0.2 rps to 50 rps. Experimental setup is developed using micro-processor(PIC16C73, Micro Chips co., USA), motor turns checking circuitry, small size DC motor for pager(SM1012, Samhong co., Korea) and gear box. Results from experiment meet need for vailable load condition which is require for portable drug delivery system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.393-398
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• 2004

The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension fer near-field probe array are designed and analyzed.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.6
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• pp.10-16
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• 2013

Ultra-fine planing and micro punching are separately used for improving surface roughness and machining dot patterns, respectively, of metal molds. If these separate machining processes are applied for machining of identical molds, there could be an aligning mismatch between the machine tool and the mold. A hybrid machining system combining ultra-fine planing and micro punching was newly developed in this study in order to solve this mismatch; hybrid process technology was also developed for machining dot patterns on a mirror surface of a metal mold. The hybrid machining system has X, Y, and Z axes, and a cam axis for ultra-fine planing. The cam axis and attachable and removable solenoid actuators for micro punching can make large and small sizes of dot patterns, respectively. Ultra-fine planing was applied in the first place to improve the surface roughness of a metal mold; the measured surface roughness was about 20nm. Then, micro punching was applied to machine dot patterns on the same mold. It was possible to control the diameter of the dot patterns by changing the input voltage of the solenoid actuator. Before machining, severe inhomogeneous plastic deformation around the machined dot patterns was also removed by annealing heat treatment. Therefore, it was verified that metal molds with dots patterns for optical products can be machined using a hybrid machining system and the hybrid process technology developed in this study.

• The Journal of Korea Robotics Society
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• v.3 no.3
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• pp.203-211
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• 2008

This work proposes structure of spring backbone micro endoscope. For effective surgery in narrow and limited space, many manipulators are developing that different to existed structure. This device can move like elephant nose or snake unlike the existing robots. For this motion, a mechanism that uses spring backbone and wires has been developed. The new type endoscope that has Z axis motion for spring structure, therefore it has 3 degree of freedom, two rotations and one linear motion. And new kinematics for backbone structure is proposed using simple geographic analysis. The Jacobian and stiffness modeling are also derived. Exact actuator sizing is determined using stiffness model. Finally, the proposed kinematics are verified by simulation and experiments.

• Proceedings of the KIEE Conference
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• 2003.10b
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• pp.95-97
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• 2003

소형화, 정밀화 되어 가는 산업 추세에 의해 정밀 위치 제어용 엑츄에이터가 요구 되어지고 있다. 이로 인해 생산 및 유지비용이 적은 소형화된 마이크로 위치제어용 엑츄에이터를 개발하였다. 이 엑츄에이터의 설계를 위해서는 해석 기법이 요구되어진다. 그래서 엑츄에이터의 해석 방법을 정식화 하였고, 이를 이용한 해석을 통해 설계를 하였으며 제작을 하였다. 해석방법은 3차원 유한 요소법을 이용하였고, 이를 이용해 소형 마이크로 위치제어용 엑츄에이터의 특성을 해석하였으며, 그 결과는 제작된 엑츄에이터의 실험을 통해 검증되었다. 이 엑츄에이터는 적층 된 압전 세라믹과 두개의 전자석으로 구성되어 있으며, 적층된 압전 세라믹에 의한 변위와 두개의 전자석의 동기화된 동작에 의해 작동이 된다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.6 no.4
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• pp.34-38
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• 1997

This paper presents a joining method by using the silicon wafer in order to apply to joint to the 3-dimensional structures of semiconductor device, high-speed , high integration, micro machine, silicon integrated sensor, and actuator. In this study, the high atomic beam, stabilized by oxidation film and organic materials at the material surface, is investigated, and the purified is obtained by removing the oxidation film and pollution layer at the materials. And the unstable surface is obtained, which can be easily joined. In order to use the low temperatures for the joint method, the main subjects are obtained as follows: 1) In the case of the silicon wafer and the silicon wafer and the silicon wafer of alumina sputter film, the specimens can be jointed at 2$0^{\circ}C$, and the joining strength is 5Mpa. 2) The specimens can not always be joined at the room temperatures in the case of the silicon wafer and the silicon wafer of alumina sputter film.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.69-72
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• 2007

Cellulose is a beneficial material that has low cost, lightweight, high compatibility and biodegradability. Recently electroactive paper (EAPap) on cellulose base was discovered as a smart material and actuator through ion migration and piezoelectric effect. Furthermore cellulose has a potentiality to apply the display material, because of its high reflectivity, flexibility and high transmittance. The various shapes and height patterns of the Cellulose acetate (CA) solution, such as circle and honeycomb patterns, were fabricated and observed by field emission scanning electron microscope (FESEM, S4300 Hitachi). The resulting pattern showed uniform size in the large area without defect. After stretching the CA film with saponification process in the sodium methoxide in methanol solution, Most of the compositions become one directional ordered nanofibers below 50nm.