• Journal of the Optical Society of Korea
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• v.14 no.2
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• pp.163-169
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• 2010

Novel wafer-level fabrication of a glass ball-lens is realized for optoelectronic applications. A Pyrex wafer is bonded to a silicon wafer and cross-cut into a square-tile pattern, followed by wet-etching of the underlying silicon. Cubes of Pyrex on the undercut silicon are then turned into ball shapes by thermal reflow, and separated from the wafer by further etching of the silicon support. Radial variation and surface roughness are measured to be less than ${\pm}3\;{\mu}m$ and ${\pm}1\;nm$, respectively, for ball diameter of about $500\;{\mu}m$. A surface defect on the ball that is due to the silicon support is shown to be healed by using a silicon-optical-bench. Optical power-relay of the ball lens showed the maximum efficiency of 65% between two single-mode fibers on the silicon-optical-bench.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.73-73
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• 2003

최근 LCD(liquid crystal display)분야에서 고해상도와 빠른 응답속도를 가지는 다결정 실리콘 박막트랜지스터에 대한 연구를 하고 있다. 그러나, poly-Si은 poly-Sil-xGex에 비해 intrinsic carrier mobility가 낮고 고온의 결정화 공정을 필요로 한다. 따라서, Poly-Si을 대체할 재료로 poly-SiGe에 대한 연구가 활발히 진행되고 있다. 본 연구에서는 전계에 의해 결정화가 가속되고 한쪽 방향으로 결정화를 제어하여 채널내 전자나 정공의 이동도를 향상시 킬 수 있는 새로운 결정화 방법인 전계 유도 방향성 결정화법을 이용하여 Ge 함량에 따른 a-Sil-xGex(0$\leq$x$\leq$0.5)의 결정화 특성을 연구하였다. 대기압 화학 기상 증착법으로 5000$\AA$의 산화막(SiO$_2$)이 증착된 유리 기판상에 플라즈마 화학 기상 증착법을 이용하여 800$\AA$의 비정질 실리콘을 증착한 후 RF magnetron sputtering법을 이용하여 Ge 함량에 따른 Sil-xGex 박막을 1000$\AA$ 증착하였다. Photolithograph방법을 이용하여 금속이 선택적으로 증착될 수 있는 특정 Pattern을 가진 mask를 형성한 후 금속을 DC magnetron sputtering법을 이용하여 상온에서 50$\AA$.을 증착하였다. 이후 시편에 전계를 인가하기 위해 시편의 양단에 전극을 형성한 후 DC Power Supply를 통해 전압을 제어하는 방식으로 전계를 인가하였다. 결정화 속도는 광학현미경을 이용하여 분석하였으며 결정화된 영역의 결정화 정도는 micro-Raman spectroscopy로 분석하였다.

• Proceedings of the KIEE Conference
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• 2003.11b
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• pp.51-54
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• 2003

지금까지 통상적으로 사용하고 있는 Plasma Lighting System(이하 PLS)의 마그네트론 구동용 고전압, 고전류 전원장치는 성층 철심 HVT를 이용한 방식을 적용하고 있다. 이 방식은 상용 주파수를 사용하므로, 승압트랜스포머나 배 전압용의 커패시터를 대형으로 하기 때문에 고중량, 저효율 및 출력의 한계성과 광출력에서 플리커현상 둥의 단점을 지닌다. 이의 해결책으로 최근 인버터 방식의 전원장치를 PLS에 적용 하고자 하는 연구가 활발하게 진행되고 있다. 설계한 PLS 마그네트론 구동을 위한 고전압, 고전류 전원장치는 기존의 스위칭 기술을 이용 낮은 스위칭 손실의 고속 스위칭을 통한 시스템의 소형, 경량화 및 고전력밀도를 가지도록 하였고 $\mu$-com을 이용하여 Micro-wave의 누설에 따른 사고를 방지하기 위하여 광 검출과 마그네트론 온도 검출 등의 시스템 보호 기능을 가지고 있으며, 고전압 출력을 고저 항으로 분압하고 PWM 제어기에 피드백하여 매우 안정된 출력 전압이 얻어지도록 하였다. 또한 출력 전류를 제한 할 수 있게 하여 광량 조절이 가능하도록 하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.5
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• pp.344-349
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• 2020

Modern thin film deposition processes require high deposition rates, low costs, and high-quality films. Atmospheric pressure plasma-enhanced chemical vapor deposition (AP-PECVD) meets these requirements. AP-PECVD causes little damage on thin film deposition surfaces compared to conventional PECVD. Moreover, a higher deposition rate is expected due to the surface heating effect of atomic hydrogens in AP-PECVD. In this study, polycrystalline silicon thin film was deposited at a low temperature of 100℃ and then AP-PECVD experiments were performed with various plasma powers and hydrogen gas flow rates. A deposition rate of 15.2 nm/s was obtained at the VHF power of 400 W. In addition, a metal foam showerhead was employed for uniform gas supply, which provided a significant improvement in the thickness uniformity.

• Journal of Electrical Engineering and Technology
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• v.12 no.6
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• pp.2256-2261
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• 2017

Carbon nanotube (CNT) and alumina ($Al_2O_3$) are synthesized into hybrid composites, and an advanced electrical discharge machining (EDM) system is developed for the machining of hard and conductive materials. CNT nanoparticles are mixed with $Al_2O_3$ powder and the $Al_2O_3$/CNT slurry is sintered by spark plasma. The hardness and the electrical conductivity of the $Al_2O_3$/CNT hybrid composite were investigated. The electrical discharge is controlled by a capacitive ballast circuit. The capacitive ballast circuit is applied to the tungsten carbide and the $Al_2O_3$/CNT hybrid composite. The voltage-current waveforms and scanning electron microscope (SEM) images were measured to analyze the characteristics of the boring process. The developed EDM process can manufacture the ceramic based hybrid composites, thereby expecting the variety of applications.

• Journal of Korea Multimedia Society
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• v.19 no.12
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• pp.2014-2023
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• 2016

Web presence is one of the key issues for extensive deployment of Internet-of-Things (IoT). An obstacle to overcome for Web presence is relatively low computing power of IoT devices. In this paper, we present implementation of an IoT platform based on Constrained Application Protocol (CoAP) which is a web transfer protocol proposed by Internet Engineering Task Force (IETF) for the low performance IoT devices such as Wireless Sensor Network (WSN) nodes and micro-controllers. To qualify the performance of CoAP-based IoT system for such an application as smart grid, we designed a test platform consisting of Raspberry Pi2, Kmote WSN node and a desktop PC. Using open source softwares, CoAP was implemented on top of the platform. Leveraging the GET command defined at CoAP specification, performance of the system was measured in terms of round-trip time (RTT) from web application to the Kmote sensor node. To investigate abnormal cases among the test results, hop-by-hop delays were measured to analyze resulting data. The average response time of CoAP-based communication except the abnormal data was reduced by 23% smaller than the previous research result.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.11
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• pp.7-16
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• 2010

In this study, wire was used as the filler material for the laser repair welding, and the phenomenon in which the supplied filler material was melted and beaded down into the specimen was examined with varying laser powers and welding speeds. The optimal processing condition was found to be the laser power of 1,300 W, the welding speed and feed wire supply speed of 0.5 ml/in and the defocused distances of +2mm. At this time, the heat input(E) was $65{\sim}75\;J/mm^2$, and no internal defect occurred. When repair welding was carried out as the optimal processing for the part that had an external defect with the radius of 2mm, the filler metal was melted, resulting in the volume smaller than the defect part and thus causing the part unfilled. Therefore, it was found to be necessary to carry out repair welding two to three times by multiple passes rather than does it only once by single pass.

• Transactions on Electrical and Electronic Materials
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• v.15 no.2
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• pp.81-86
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• 2014

The process parameter in optimized KOH alkali activation of soft carbon series coke material in high purity was set with DOE experiments design. The activated carbon was produced by performing the activation process based on the set process parameters. The specific surface area was measured and pore size was analyzed by $N_2$ absorption method for the produced activated carbon. The surface functional group was analyzed by Boehm method and metal impurities were analyzed by XRF method. The specific surface area was increased over 2,000 $m^2/g$ as the mixing ratio of activation agent increased. The micro pores in $5{\sim}15{\AA}$ and surface functional group under 0.4 meq/g were obtained. The contents of the metal impurity in activated carbon which is the factor for reducing the electrochemical characteristics was reduced less than 100 ppm through the cleansing process optimization. The electrochemical characteristics of activated carbon in 38.5 F/g and 26.6 F/cc were checked through the impedance measuring with cyclic voltammetry scan rate in 50~300 mV/s and frequency in 10 mHz ~100 kHz. The activated carbon was made in the optimized activation process conditions of activation time in 40 minutes, mixing ratio of activation agent in 4.5 : 1.0 and heat treatment temperature over $650^{\circ}C$.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

• Journal of Energy Engineering
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• v.21 no.4
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• pp.398-401
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• 2012

In this Study, efficiencies of the scroll expander under development for organic Rankine cycle using engine waste heat of vehicle have been analyzed and compared with the commercial scroll expander. While operating organic Rankine cycle for analysing expander efficiencies, power of expander, inlet temperature of expander, inlet pressure of expander and the flow rate of the working fluid(refrigerant R134a) have been measured. Overall efficiency of the expander has been shown the very low level compared with the overall efficiency of the commercial expander. Especially, because the low volumetric efficiency has much effect on overall efficiency, the working fluid leakage trouble of expander has to be solved surely for improvement of the expander overall efficiency.