• 한국생산제조학회지
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• 제19권5호
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• pp.710-715
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• 2010

This study developed an automatic tool change system of the SMA-based tool clamping device for applications of micro-machine tools. This paper first describes clamping and unclamping procedures of the automatic tool change system and its basic configuration. Second, it presents fabrication techniques of components, such as a heating/cooling system and a tool loader. Finally, it describes automatic tool change test conducted with a prototype in which the fabrication techniques of components were employed. As the results of the test, times needed for clamping and unclamping operations were estimated to 18(s) and 8(s) respectively. The experimental results confirm that the proposed automatic tool change system can be sucessfully applied to micro-machine tools.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.1-14
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• 1999

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.152-152
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• 2009

We investigate micro-tip properties as Ni-Co plating and CMP processes for MEMS probe card and units. The micro-tip are fabricated by using Ni-Co plating machine, lapping machine, and chemo-mechanical polisher. In order to get high conductive and reliable micro-tip, we control Co contents and thickness by CMP speed. We have found that about 20-25% of Co contents are required and have to lapping speed of 30 rpm. Also, we investigate photolithography and Ni-Co plating processes conditions for the one-step and the three-step micro-tips.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.77-83
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• 2007

The study on damaged layer is necessary for machinability improvement in micro machining. The damaged layer in metal cutting is derived from plastic deformation and transformation of metal structure. The damaged layer affects micro mold life and micro machine parts. In this study, the damaged layer of micro machined surface of copper is evaluated according to various machining condition. The damaged layer structure and metallurgical characteristics are measured by optical microscope, and evaluated by cutting forces and surface roughness. The scale of this damaged layer depends on cutting process parameters and machining environments. By experimental results, depth of damaged layer was increased with increasing of cutting depth, also the damaged layer is less occurred in down-milling compared to up-milling during micro endmilling operation.

• 한국정밀공학회지
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• 제20권9호
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• pp.109-117
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• 2003

With development of high advanced technologies and skills, micro machining techniques also are being more functional and smaller. Some of the recently developed micro machining technologies are micro drilling, micro EDM, WEDG, LBM, micro milling, micro UVM etc. In these micro machining techniques, Micro -EDM is generally used for machining micro holes, pockets, and micro structures in difficult-cut-materials. For machining micro structures, first of all, tool electrode should be fabricated by WEDG process. In micro-EDM, parameters such as peak current, pulse width, duration time are very important to fabricate the tool electrode and micro structures. Developed experimental equipments are composed of RLC circuit with PWM. In this paper, using developed micro EDM machine, the characteristics of micro electro discharge machining are investigated at micro holes, slot, and pocket machining etc. Also the trends of tool wear are investigated in case of hole and slot machining.

• 대한조선학회논문집
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• 제39권3호
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• pp.1-7
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• 2002

검증된 프로그램을 통하여 수축 팽창 운동에 대한 해석을 수행하였으며, 해석 결과 레이놀즈수가 작아지게($R_n{\fallingdotseq}1$) 되면 점성력을 이용한 추진이 효과적일 것으로 나타났고, 계산 결과를 꼭지점법과 비교하였다. 본 연구를 통하여 극도로 점성이 큰 지역에서 통상의 추진기로 추진이 불가능한 곳에서도 추진할 수 있는 새로운 추진 시스템을 제안하였으며, 이 시스템은 micro-hydro-machine의 추진 장치로 활용될 수 있으리라 기대된다.

• Tribology and Lubricants
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• 제24권1호
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• pp.27-33
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• 2008

A micro-impression creep machine was designed and developed, adopting a small punch in diameter of 150 um, displacement gage with an accuracy of sub-${\mu}m$ scale, and load-cell with an accuracy of mN scale in order to investigate creep behavior of small solder ball in diameter of less than 1 mm. Creep behavior of lead-free solder ball(Sn-3.0Ag-0.5Cu) in diameter of $760\;{\mu}m$ was investigated in the stress range of $8{\sim}60\;MPa$ and at $303\;K{\sim}393\;K$. The applied load became decreased slightly and continuously in the creep rate of $10^{-4}/s$ range during the current experiments. Also, the machine frame was so sensitive to the environmental temperature that nm scaled displacement recording was unstable according to the change in environmental temperature.

• 한국정밀공학회지
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• 제25권7호
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• pp.39-46
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• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1261-1264
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• 2005

Recently, as researches and developments for milli-structure and micro machine are actively progressing, manufacturing technologies and skills for tiny small machine parts are getting more important. So, we have been trying to cut using high revolution air bearing spindle and micro-endmill, and studying for magnitude of cutting force, cutting force wave form and surface roughness. We figured out that in 60,000rpm is so slow that cutting is not perfact. Chatter occured to $2\mu{m}/rev\;at\;80,000rpm\;and\;4.4\mu{m}/rev$ at 100,000rpm. We confirmed that spindle run out increased surface roughness at high revolution.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.561-564
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• 2003

The machining technology for the removal of micro-burr has been demanded because electrode parts of electron gun have minute holes. In this study, Magnetic Assisted Polishing(MAP) is applied to remove the micro-burr instead of the contentional polishing process such as the etching and barrel. Optimal polishing conditions are selected from many experiments using the tool of the flat end slit type. On the basis of experimental results, the deburring machine for the Magnetic Assisted Polishing of electrode part is developed and its performance is evaluated.