• 한국가시화정보학회지
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• 제5권1호
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• pp.43-48
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• 2007

Micro-PIV(particle image velocimetry) has been widely used to measure the velocity of micro flow. Although this micro-PIV method can give accurate 2D instantaneous velocity information of mea-surement plane, it cannot resolve the out of plane component of velocity vectors. Lots of the micro fluidic devices generate three-dimensional flow and 3D measurement of velocity is useful to understand the physics of micro flow phenomena. In this study, we constructed stereoscopic micro-PIV(SMPIV) system and applied this method to the impinging micro jet flow. The results show that this method can produce accu-rate 3D reconstruction of micro jet flow.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.493-494
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• 2006

SU-8 can be implemented as a mask for micro Abrasive Jet Machining (micro-AJM) process [1]. In this paper, we will evaluate the quality of micro grooving result on glass substrate by micro-AJM process which using SU-8 as a mask. It was evaluated on width and edge profile of the micro grooving. The result was having distortion compare with the master film used to pattern the SU-8 mask. The value of distortion with other properties which came along with it, such as depth and surface roughness, can be optimized in order to fabricate micro-channel for micro-fluidic application.

• 한국생산제조학회지
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• 제18권6호
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• pp.636-641
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• 2009

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2007년도 추계학술대회
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• pp.109-113
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• 2007

Micro-PIV is a well-known method for measurement of two- dimensional, two-component velocity in the microfluidic devices. Lots of the micro fluidic devices generate three-dimensional flow and 3D measurement of velocity is helpful to understand the physics of micro flow phenomena. In this study, we developed new micro 3D measurement method by applying 2-frame PTV in stereoscopic micro system. In this study, we did the validation study of SMPTV by using the simulated flow model to verify the accuracy and the feasibility of measurement and compared with SMPIV method. The results showed that SMPTV provides better spatial resolution and measurement accuracy than SMPIV method.

• 한국전산유체공학회지
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• 제9권2호
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• pp.36-42
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• 2004

Low-speed gas flows in micro-channels are investigated using a kinetic theory analysis. The Boltzmann equation simplified by a collision model is solved by means of a finite difference approximation with the discrete ordinate method. Calculations are made for flows in simple micro-channels and a micro-fluidic system consisting of two micro-channels in series. The results are compared well with those from the DSMC method and an analytical solutions to the Wavier-Stokes equations. It is shown that the present method is a useful tool for the modeling of low-speed flows in micro-channels.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.274-279
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• 2002

In this paper, the development process of an unique and creative micro/nano-structure fabrication technique based on micro/nano-tribology are reviewed and discussed. The so-called Mechano-Chemical Process(MCP), which has been developed since 1995 by Tribology Research Laboratory at Yonsei University with the motivation to overcome the demerits of the conventional photolithographic techniques, is based on the fundamental understanding of the interaction between the tool tip and the workpiece surface. This process is a maskless process which offers tremendous flexibility in surface patterns that can be created on a workpiece surface without using any capital intensive equipment. It Is capable of fabricating the prototypes of micro/nano-components, micro- structured surface with various geometries, micro-molds for making polymer or metal parts, and micro-fluidic channels for lab-on-a- chip

• 한국공작기계학회논문집
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• 제16권6호
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• pp.168-174
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• 2007

A ceramic glass mold was developed for micro hot-embossing and replicated polymer parts are fabricated. The glass-ceramic micro mold could be fabricated with a laser process and a wet etching process and the fabrication time could be saved a lot. Various polymer micro structures can be obtained by hot-embossing. The process parameters such as ho-embossing temperatures or pressures were investigated and optimized. This process can be applied for fabrication of micro structures for flip-chips or micro fluidic channels for bio-engineering. The advantages and disadvantages of this process are discussed, too.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.745-746
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• 2007

• 한국재료학회:학술대회논문집
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• 한국재료학회 2005년도 춘계학술발표대회 및 제8회 신소재 심포지엄 논문개요집
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• pp.84-84
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• 2005

• 한국광학회:학술대회논문집
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• 한국광학회 2006년도 하계학술발표회 논문집
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• pp.37-38
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• 2006