• 제어로봇시스템학회논문지
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• 제13권7호
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2519-2523
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• 2003

Ultrasonic sensors are widely used in mobile robot applications to recognize external environments, because they are cheap, easy to use, and robust under varying lighting conditions. In most cases, a single ultrasonic sensor is used to measure the distance to an object based on time-of-flight (TOF) information, whereas multiple sensors are used to recognize the shape of an object, such as a corner, plane, or edge. However, the conventional sequential driving technique involves a long measurement time. This problem can be resolved by pulse coding ultrasonic signals, which allows multi-sensors to be fired simultaneously and adjacent objects to be distinguished. Accordingly, the current presents a new simultaneous coded driving system for an ultrasonic sensor array for object recognition in autonomous mobile robots. The proposed system is designed and implemented using a DSP and FPGA. A micro-controller board is made using a DSP, Polaroid 6500 ranging modules are modified for firing the coded signals, and a 5-channel coded signal generating board is made using a FPGA. To verify the proposed method, experiments were conducted in an environment with overlapping signals, and the flight distances for each sensor were obtained from the received overlapping signals using correlations and conversion to a bipolar PCM-NRZ signal.

• Journal of Mechanical Science and Technology
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• 제20권4호
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.238-239
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• 2009

The amorphous silicon microbolometer array has been developed by the MEMS design and fabrication technology. Before the bolometer array for the image sensor being designed, the structure of unit cell and $16\times16$ array of it was simulated, designed and fabricated. The properties of bolometer have been measured as such that the TCR -3%/K.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.582-587
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• 2004

Ultrasonic sensors are widely used in mobile robot applications to recognize external environments, because they are cheap, easy to use, and robust under varying lighting conditions. However, the recognition of objects using a ultrasonic sensor is not so easy due to its characteristics such as narrow beam width and no reflected signal from a inclined object. As one of the alternatives to resolve these problems, use of multiple sensors has been studied. A sequential driving system needs a long measurement time and does not take advantage of multiple sensors. Simultaneous and pulse coding driving system of ultrasonic sensor array cannot measure short distance as the length of the code becomes long. This problem can be resolved by multi-frequency driving of ultrasonic sensors, which allows multi-sensors to be fired simultaneously and adjacent objects to be distinguished. Accordingly, this paper presents a simultaneous and multi-frequency driving system for an ultrasonic sensor array for object recognition. The proposed system is designed and implemented using a DSP and FPGA. A micro-controller board is made using a DSP, Polaroid 6500 ranging modules are modified for firing the multi-frequency signals, and a 5-channel frequency modulated signal generating board is made using a FPGA. To verify the proposed method, experiments were conducted in an environment with overlapping signals, and the flight distances for each sensor were obtained from filtering of the received overlapping signals and calculation of the time-of-flights.

• 센서학회지
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• 제24권6호
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• 센서학회지
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• 제23권1호
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• pp.15-18
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• 2014

We present gas sensing performance based on $2{\times}2$ sensor array with four different elements ($TiO_2$, $SnO_2$, $WO_3$ and $In_2O_3$ thin films) fabricated by rf sputter. Each thin film was deposited onto the selected $SiO_2$/Si substrate with Pt interdigitated electrodes (IDEs) of $5{\mu}m$ spacing which were fabricated on a $SiO_2$/Si substrate using photolithography and dry etching. For 5 ppm $NO_2$ and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, $2{\times}2$ sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.

• 한국재료학회지
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• 제33권5호
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• pp.195-204
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• 2023

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NO_x), ammonia (NH₃), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO₂ for CO, In₂O₃ for NO_x, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.

• 마이크로전자및패키징학회지
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• 제21권3호
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• pp.19-24
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• 2014

This article reviews the recent progress in nanowell array biosensors that use the label-free detection protocol, and are detected in their natural forms. These nanowell array biosensors are fabricated by nanofabrication technologies that should be useful for developing highly sensitive and selective also reproducible biosensors. Moreover, electrochemical method was selected as analysis method that has high sensitivity compared with other analysis. Finally, highly sensitive nanobiosensor was achieved by combining nanofabrication technologies and classical electrochemical method. Many examples are mentioned about the sensing performance of nanowell array biosensors will be evaluated in terms of sensitivity and detection limit compared with other micro-sized electrode without nanowell array.

• 제어로봇시스템학회논문지
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• 제10권11호
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• pp.1028-1036
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• 2004

Ultrasonic sensors are widely used in mobile robot applications to recognize external environments by virtue that they are cheap, easy to use, and robust under varying lighting conditions. In most cases, a single ultrasonic sensor is used to measure the distance to an object based on time-of-flight (TOF) information, whereas multiple sensors are used to recognize the shape of an object, such as a comer, plane, or edge. However, the conventional sequential driving technique involves a long measurement time. This problem can be resolved by pulse coding of ultrasonic signals, which allows multi-sensors to be emitted simultaneously and adjacent objects to be distinguished. Accordingly, this paper presents a new simultaneous coded driving system for an ultrasonic sensor array for object recognition in autonomous mobile robots. The proposed system is designed and implemented. A micro-controller unit is implemented using a DSP, Polaroid 6500 ranging modules are modified for firing the coded signals, and a 5-channel coded signal generating board is made using a FPGA. To verify the proposed method, experiments were conducted in an environment with overlapping signals, and the flight distances fur each sensor were obtained from the received overlapping signals using correlations and conversion to a bipolar PCM-NRZ signal.