Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A study on amorphous silicon thin film for bolometer sensor

볼로미터 센서를 위한 비정질 실리콘 박막

  • 강태영 (경원대학교 대학원 전자전기공학과) ;
  • 양대준 ((주)오카스 기업부설연구소) ;
  • 김상모 (경원대학교 대학원 전자전기공학과) ;
  • 임성수 ((주)오카스 기업부설연구소) ;
  • 이홍기 ((주)오카스 기업부설연구소) ;
  • 김경환 (경원대학교 대학원 전자전기공학과)
  • Published : 2009.06.18
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Abstract

The amorphous silicon microbolometer array has been developed by the MEMS design and fabrication technology. Before the bolometer array for the image sensor being designed, the structure of unit cell and $16\times16$ array of it was simulated, designed and fabricated. The properties of bolometer have been measured as such that the TCR -3%/K.

Keywords