• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
• /
• pp.711-712
• /
• 2009

The fabrication of micro-scale irregular holes by using PMMA (Poly Methyl Methacrylate) beads in the front dielectric layer was proposed to improve luminous efficacy of an ac plasma display panel. Through the firing process of front dielectric layer, bowl shaped holes with a depth of $2.5{\mu}m$, a top diameter of $8-12{\mu}m$, and a bottom diameter of $4-7{\mu}m$ were fabricated. The proposed ac plasma display panel with the irregular micro-scale holes improved the luminous efficacy by 18 % due to the decrease in the minimum sustain voltage.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2012년도 추계총회 및 학술대회 논문집
• /
• pp.175-177
• /
• 2012

A corrosion resistance and hard nitrocarburized layer was distinctly formed on 310 austenitic stainless steel substrate by DC plasma nitrocarburizing. Basically, 310L austenitic stainless steel has high chromium and nickel content which is applicable for high temperature applications. In this experiment, plasma nitrocarburizing was performed in a D.C. pulsed plasma ion nitriding system at different temperatures in $H_2-N_2-CH_4$ gas mixtures. After the experiment structural phases, micro-hardness and corrosion resistance were investigated by the optical microscopy, X-ray diffraction, scanning electron microscopy, micro-hardness testing and Potentiodynamic polarization tests. The hardness of the samples was measured by using a Vickers micro hardness tester with the load of 100 g. XRD indicated a single expanded austenite phase was formed at all treatment temperatures. Such a nitrogen and carbon supersaturated layer is precipitation free and possesses a high hardness and good corrosion resistance.

• 한국전기전자재료학회논문지
• /
• 제26권5호
• /
• pp.401-409
• /
• 2013

Numerical analysis on RF (Radio-Frequency) thermal plasma treatment of micro-sized Ni metal was carried out to understand the synthesis mechanism of nano-sized Ni powder by RF thermal plasma. For this purpose, the behaviors of Ni metal particles injected into RF plasma torch were investigated according to their diameters ($1{\sim}100{\mu}m$), RF input power (6 ~ 12 kW) and the flow rates of carrier gases (2 and 5 slpm). From the numerical results, it is predicted firstly that the velocities of carrier gases need to be minimized because the strong injection of carrier gas can cool down the central column of RF thermal plasma significantly, which is used as a main path for RF thermal plasma treatment of micro-sized Ni metal. In addition, the residence time of the injected particles in the high temperature region of RF thermal plasma is found to be also reduced in proportion to the flow rate of the carrier gas In spite of these effects of carrier gas velocities, however, calculation results show that a Ni metal particle even with the diameter of $100{\mu}m$ can be completely evaporated at relatively low power level of 10 kW during its flight of RF thermal plasma torch (< 10 ms) due to the relatively low melting point and high thermal conductivity. Based on these observations, nano-sized Ni metal powders are expected to be produced efficiently by a simple treatment of micro-sized Ni metal using RF thermal plasmas.

• 대한약학회:학술대회논문집
• /
• 대한약학회 2003년도 Proceedings of the Convention of the Pharmaceutical Society of Korea Vol.1
• /
• pp.276.1-276.1
• /
• 2003

This study describes a simple and sensitive semi-micro HPLC method with UV detection and direct deproteinization. The plasma protein was precipitated using perchloric acid (60％) and the supernatant was directly injected onto the semi-micro HPLC system. The separation was achieved on a C18 (25 mm ${\times}$ 2.0 mm I.D) analytical column with a mobile phase of sodium acetate buffer (pH 3.5, 50 mmol) - acetonitrile (60:40, V/V). (omitted)

• 대한약학회:학술대회논문집
• /
• 대한약학회 2003년도 Proceedings of the Convention of the Pharmaceutical Society of Korea Vol.1
• /
• pp.284.2-284.2
• /
• 2003

Using a column-switching technique. highly sensitive and selective semi-micro high-performance liquid chromatographic (HPLC) method has been developed for the determination of baclofen in human plasma. Following precipitation of plasma sample containing baclofen with zinc sulfate-acetonitrile, samples were directly injected on to the system. (omitted)

• 전기학회논문지
• /
• 제57권12호
• /
• pp.2249-2254
• /
• 2008

A non-thermal micron size plasma needle is applicable for medical treatment because it includes radicals, charged particles, ultraviolet emission, and strong electric fields. The electric fields around the plasma needle device driven by a radio frequency wave are investigated in order to calculate the power delivered to the cell. A commercial multi-physics code, CFD-ACE, was utilized for the calculation of electric fields for the optimization of the needle structure. The electric field and energy absorption profiles are presented with the variation of the device structure and the distance between the needle and tissues. The living tissues effectively absorb the radio frequency power from the plasma needle device with the covered pyrex structure.

• 한국재료학회지
• /
• 제17권12호
• /
• pp.648-653
• /
• 2007

Plasma electrolytic oxidation (PEO) treatment was performed on cast Mg-6 wt%Al alloy solution-treated at 693K for 16h and aged at 498K. The surface roughness, thickness, micro-hardness, wear and corrosion properties of coatings on solution-treated and aged Mg-6 wt%Al alloy were investigated. The coatings on aged Mg-6 wt%Al alloy had thinner layer and lower micro-hardness and wear resistance than the solution-treated Mg-6 wt%Al alloy. As the aging time increased, the thickness of coatings decreased while the surface roughness was almost no changed. In addition, the micro-hardness and wear property of coatings decreased with increasing the aging time unlike the uncoated Mg-6 wt%Al alloy showing the peak micro-hardness and the best wear property after aging for 16 h. However, the coatings on Mg-6 wt%Al alloy peak-aged for 16h revealed the best corrosion resistance in 3.5% NaCl solution, which was explained based on the microstructural characteristics.

• 한국재료학회지
• /
• 제27권3호
• /
• pp.155-160
• /
• 2017

Doped-$LaCrO_3$ perovskites, because of their good electrical conductivity and thermal stability in oxidizing and/or reducing environments, are used in high temperature solid oxide fuel cells as a gas-tight and electrically conductive interconnection layer. In this study, perovskite $(La_{0.8}Ca_{0.2})(Cr_{0.9}Co_{0.1})O_3$ (LCCC) coatings manufactured by atmospheric plasma spraying followed by heat treatment at $1200^{\circ}C$ have been investigated in terms of microstructural defects, gas tightness and electrical conductivity. The plasma-sprayed LCCC coating formed an inhomogeneous layered structure after the successive deposition of fully-melted liquid droplets and/or partially-melted droplets. Micro-sized defects including unfilled pores, intersplat pores and micro-cracks in the plasma-sprayed LCCC coating were connected together and allowed substantial amounts gas to pass through the coating. Subsequent heat treatment at $1200^{\circ}C$ formed a homogeneous granule microstructure with a small number of isolated pores, providing a substantial improvement in the gas-tightness of the LCCC coating. The electrical conductivity of the LCCC coating was consequently enhanced due to the complete elimination of inter-splat pores and micro-cracks, and reached 53 S/cm at $900^{\circ}C$.

• 반도체디스플레이기술학회지
• /
• 제20권3호
• /
• pp.32-38
• /
• 2021

We developed an inductively coupled plasma (ICP) etcher for GaN etching using a parallel plasma electrode source with a multifunctional chuck matched to it in order for the low power consumption and low process cost in comparison with the conventional ICP system with a helical-type plasma electrode source. The optimization process condition using it for the micro light-emitting diode (µ-LED) chip fabrication was established, which is an ICP RF power of 300 W, a chuck power of 200 W, a BCl₃/Cl₂ gas ratio of 3:2. Under this condition, the mesa structure with the etch depth over 1 ㎛ and the etch angle over 75° and also with no etching residue was obtained for the µ-LED chip. The developed ICP showed the improved values on the process pressure, the etch selectivity, the etch depth uniformity, the etch angle profile and the substrate temperature uniformity in comparison with the commercial ICP. The µ-LED chip fabricated using the developed ICP showed the similar or improved characteristics in the L-I-V measurements compared with the one fabricated using the conventional ICP method

• 열처리공학회지
• /
• 제12권2호
• /
• pp.117-128
• /
• 1999

This study was carried out to investigate the surface characteristics of SCM440 steel nitrided with various nitrogen contents for 7 hours at $520^{\circ}C$ by using micro-pulse plasma nitriding apparatus of hot wall type. The effects of oxidation treatment was also investigated on plasma nitrided in 30% nitrogen and post oxidized SCM440 steel at $500^{\circ}C$ in $H_2O$ atmosphere. The ${\gamma}^{\prime}-Fe_4N$ and ${\varepsilon}-Fe_{2-3}N$ phases were detected in compound layer of the nitrided steel. As the content of nitrogen in plasma gas increased with 30, 50, 70% on the micro-pulse plasma nitriding for SCM440 steel, the thickness of compound, diffusion layer and the surface hardness were increased. From the wear test results, the best wear resistance was appeared in the condition of ductile ${\gamma}^{\prime}-Fe_4N$ phase formed specimen at 30% nitrogen, whereas that of the treated with 50% and 70% nitrogen decreased owing to the exfoliation of brittle ${\varepsilon}-Fe_{2-3}N$ phase in the compound layer. On the nitrided and subsequently oxidized SCM440 steel, the surface layer consisted of $Fe_3O_4$, ${\gamma}^{\prime}-Fe_4N$, and ${\varepsilon}-Fe_{2-3}N$ phases. In these treatments, the dissolution of nitrides affect hardness and hardening depth in compound and diffusion layers. For the nitrided in 30% nitrogen and post oxidized specimen at $500^{\circ}C$ for 1 hour, the wear resistance was lower than that of the only nitrided one in 30% nitrogen but higher than those of the nitrided ones in 50 and 70% nitrogen.