• Journal of the Korean Society for Precision Engineering
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• v.30 no.3
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• pp.284-291
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• 2013

Micro cutting of titanium alloy by polycrystalline diamond (PCD) tools was studied. Micro electro discharge machining (MEDM) was used to fabricate customized micro shaping tools from PCD blank. The tool was used to machine micro grooves on Ti alloy and the effects of depth of cut and machining length on tool wear, burr and surface roughness were studied. The shaping tool has cutting edge of a few ${\mu}m$. The crater size of the tool surface was increased with increasing capacitance of EDM machining conditions, which was used to control the surface roughness of the machined micro grooves.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.7
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• pp.133-140
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• 2002

Ultrasonic Machining (USM) is widely used in cutting of non-conductive, brittle workpiece materials such as engineering ceramics. However, USM has a limitation in its application to micro machining because problems are occurred in attaching micro tools to the machine and maintaining high precision. Therefore Micro Ultrasonic Machining (MUSM) with WEDM is proposed in this research. The experiments are produced as the change of shaft diameter and abrasive size.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.10
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• pp.23-30
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• 2002

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.177-184
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• 2001

C3M(chemical mechanical micro machining) is applied for diminishing the size of burr and fabricating the massless patterning for aluminium wafer(thickness of 1${\mu}m$). It is difficult to perform the micro size machining with the radically increased shear stress. While the miniaturization and function-orientation of parts has been needed in the many field such as electronics, optics and medicine. etc., it is not enough to satisfy the industry needs in the machining technology. In this paper feasibility test of diminishing burr and fabricating maskless pattern was experimented and analyzed. In the experiment oxide layer was farmed on the aluminium with chemical reaction by ${HNO_3}$(10wt%), then the surface was grooved with tungsten carbide tool for the different condition such as the load and fred rate. The result was compared with the conventional machining to show the improvement of C3M with SEM for burr diminish and XPS for atomic existence, AFM for more precise image.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.10
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• pp.108-115
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• 2009

Although nanosecond pulsed laser drilling and milling are rapid and non-wear processes in micromachining, the quality cannot meet the precision standard due to the recast layer and heat affected zone. On the other hand, electrical discharge machining (EDM) is a well-known high precision machining process in micro scale; however, the low material removal rate (MRR) and tool wear remain as drawbacks. In this paper, hybrid process of laser beam machining (LBM) using nanosecond pulsed laser and micro EDM was studied for micro drilling and milling. While the quality of the micro structure fabricated by this hybrid process remains as high as direct EDM, the machining time and tool wear can be reduced. In addition, variable depth of layer was introduced as an effective method improving efficiency of hybrid milling.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.77-82
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• 2021

This numerical study focuses on the analysis of fume particle dispersion characteristics over the surface of target workpiece in laser micro-hole machining process. The effects of oblique stagnation flow over fume generating machining point are examined by carrying out a series of three-dimensional random particle simulations along with probabilistic particle generation model and particle drag correlation of low Reynolds number. Present computational model of fume particle dispersion is found to be capable of assessing and quantifying the fume particle contamination in precision hole machining which may influenced by different types of air flow patterns and their flow intensity. The particle size dependence on dispersion distance of fume particles from laser machining point is significant and the effects of increasing flow oblique angle are shown quite differently when slot blowing or slot suction flows are applied in micro-hole machining.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.75-78
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• 2007

Recently, the need for micro mold or micro mechanical parts has been rapidly increased. As feature size decreases, conventional machining processes show their limitation. Micro electrical discharging machining (EDM) and electrochemical machining (ECM) have many advantages in micro machining. They can be used to make structures of micro scale, or even nano scale size. In this paper, the application of micro EDM and ECM has been investigated.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.907-910
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• 1997

With increasing the needs for micro and precision parts, micro machining technology has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. But there are many problems to be solved requiring a high-level technology. So this research presents the new method to fabricate a small part through applying chemical mechanical micro machining (C3M) for the Al wafer. Al(thickness I ,u m) was sputtered on the Si substrate. Al is widely used as a lightweight material. However form defect such as burr has a bad effect on products. To improve machinability of ductile material, oxide layer was formed on the surface of AI wafcr before grooving by chemical reaction with HN03(10wt%). And then workpieces were machined to compare conventional micro-machining process with newly suggested method at different machining condition such as load and feed rate. To evaluate whether or not the machinability was improved by the effect of chemical condition, such as the size, the width of grooves 'and burr generation were measured. Finally, it is confirmed that C3M is one of the feasible tools for micro machining with the aid of effect of the chemical reaction.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1244-1247
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• 2005

The material removal mechanism of Electrical Discharge Machining (EDM) process has been studied for several decades. However, understanding of the material removal mechanism is still a difficult problem because the mechanism involves complicated physical phenomena including plasma. Especially, for a micro-EDM process, due to the influence of the debris that is generated during the machining process, quantitative modeling of EDM becomes more complex. To understand better the effects of the debris in the micro-EDM process experimentally, a new approach has been introduced in this study. Using a specially designed workpiece holder, the debris generated during the EDM with various process conditions has been collected. Then, using a simulated environment using micro-sized metal powders, the influence of the debris during the single EDM discharge has been observed. The effects of EDM process parameters on the debris size and product quality are discussed.