• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.24 no.5 s.176
• /
• pp.1166-1174
• /
• 2000

In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. Although the combination produces small magnetic force, it is suitable for realizing micro motion repeatedly without the accumulation of error because there is no hysteresis caused by ferromagnetic materials, no eddy current loss, no flux saturation. First, the approximate modeling of stiffness and damping effects between the magnetic elements is made and verified experimentally. Then, we have formulated the dynamic equation of one d.o.f magnetic levitation positioner using linear perturbation method and discussed the necessity of optimization for the chief design parameters to maximize the stability performance.

• Journal of the Semiconductor & Display Technology
• /
• v.21 no.2
• /
• pp.1-6
• /
• 2022

This computational investigation of micro-sized particle dispersion concerns the fume particle contamination over target surface in high-precision laser line machining process of semiconductor and display device materials. Employing the random sampling based on probabilistic fume particle generation distributions, the effects of sphericity for nonspherical fume particles are analyzed for the fume particle dispersion and contamination near the laser machining line. The drag coefficient correlation for nonspherical particles in a low Reynolds number regime is selected and utilized for particle trajectory simulations after drag model validation. When compared to the corresponding results by the assumption of spherical fume particles, the sphericity of nonspherical fume particles show much less dispersion and contamination characteristics and it also significantly affects the particle removal rate in a suction air flow patterns.

• Tribology and Lubricants
• /
• v.38 no.4
• /
• pp.121-127
• /
• 2022

This study presents the development of an integrated oil purification system consisting of moisture removal, oil flushing, and oil filtering devices. In this system, the oil flushing device is combined with a micro-bubble generator. Oil purification is necessary for ensuring the high performance of the lubricant through the efficient removal of contaminants and thus enables good maintenance of mechanical systems. The developed purification system removes moisture, varnish, and solid particles. Moreover, during oil purification, the oil flushing device separates foreign materials and contaminants remaining in the lubricating oil piping or mechanical systems. The microbubble generator, which is combined with the oil flushing device, can separate harmful contaminants, such as sludge, wear particles, and rust, from piping or lubrication systems through the cavitation effect. Moisture is removed using a double high-vacuum chamber, while sludge and varnish are removed via electro-absorption using a high-voltage generator. Additionally, the total maintenance cost of the system is reduced through the use of domestically fabricated cartridge filters composed of glass fiber and cellulose. The heater, which maintains the temperature of the lubricant at 60℃, can process 41,000 L of lubricant simultaneously. Multiple tests confirmed that the proposed integrated purification system exhibits good performance in oil flushing and removal of water and varnish.

• 제어로봇시스템학회:학술대회논문집
• /
• 2005.06a
• /
• pp.834-837
• /
• 2005

In this paper, we describe the method of non-invasive blood pressure measurement using pulse wave transit time(PWTT). PWTT is a new parameter involved with a vascular that can indicate the change of BP. PWTT is measured by continuous monitoring of ECG and pulse wave. No additional sensors or modules are required. In many cases, the change of PWTT correlates with the change of BP. We measure pulse wave using the photo plethysmograph(PPG) sensor in an earlobe and we measure ECG using the ECG monitoring device our made in the chest. The measurement device for detecting pulse wave consists of infrared LED for transmitted light illumination, pin photodiode as light detector, amplifier and filter. We composed 0.5Hz high pass, 60Hz notch and 10Hz low pass filter. ECG measurement device consists of multiplexer, amplifier, filter, micro-controller and RF module. After amplification and filtering, ECG signal and pulse wave is fed through micro-controller. We performed the initial work towards the development of ambulatory BP monitoring system using PWTT. An earlobe is suitable place to measure PPG signal without the restraint in daily work. From the results, we can know that the dependence of PWTT on BP is almost linear and it is possible to monitoring an individual BP continuously after the individual calibration.

• 한국전산유체공학회:학술대회논문집
• /
• 2008.03b
• /
• pp.581-584
• /
• 2008

A generation of a particle beam is the key technique in a flow cytometry that measures the fluorescence and light scattering of individual cell and other particulate or molecular analytes in biomedical research. Recent methods performing this function require a laborious and time-consuming assembly. In the present work, we propose a novel device for the generation of an axisymmetrical focusing beam of microparticles (3-D focusing) in a single capillary without sheath flows. This work uses the concept that the particles migrate toward the centerline of the channel when they lag behind the parabolic velocity profile. Particle focusing of spherical particles was successfully made with a beam diameter of about 10 ${\mu}$m. Proposed device provides crucial solutions for simple and innovative 3-D particle focusing method for the applications to the MEMS-based micro-flow cytometry. We believe that this device can be utilized in a wide variety of applications, such as biomedical/ biochemical engineering.

• Journal of the Korean Society for Precision Engineering
• /
• v.30 no.3
• /
• pp.340-348
• /
• 2013

In Projection Stereolithography Apparatus (PSLA), Digital Micromirror Device (DMD) and Liquid Crystal Display (LCD) are used as a beam pattern generator. The DMD shows high resolution, but it is mostly applied in micro stereolithography due to high cost and fabricable area. In LCD, the size of pattern beam is freely controlled due to various panel sizes. The LCD, however, has some limitations such as short life time by the high power light source, non-uniform light intensity of pattern beam and low transmittance of UV-light. To solve these problems in LCD-based PSLA, a Scanbeam-SLA with LCD of 19 inches and visible LED-array is developed. In this system, the light module works like a scanner for uniform illumination. The system configuration, working principle and fabrication examples are addressed in this study.

• Journal of Mechanical Science and Technology
• /
• v.20 no.3
• /
• pp.297-309
• /
• 2006

This paper deals with a novel structure for single-cell characterization which makes use of bimorph micro thermal actuators combined with electrical sensor device and integrated microfluidic channel. The goal for this device is to capture and characterize individual biocell. Quantitative and qualitative characteristics of bimorph thermal actuator were analyzed with finite element analysis methods. Furthermore, optimization for the dimension of cantilevers and integrated parallel probe systems with microfluidic channels is able to be realized through the virtual simulation for actuation and the practical fabrication of prototype of probes. The experimental value of probe deflection was in accordance with the simulated one.

• The KSFM Journal of Fluid Machinery
• /
• v.18 no.6
• /
• pp.27-30
• /
• 2015

In this study, we attempted to harvest energy using water droplet based on Reverse Electro Wetting On Dielectric (REWOD) phenomenon between water droplet and dielectric surface without external bias. REWOD device can be fabricated via simple coating process, which is highly economic and easy. We believe that our system is well-suited for IoT(Internet of Things) embedded electronics that require low but consistent electricity. Moreover, our device can be integrated with window to generate electricity upon raindrops.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.7
• /
• pp.22-29
• /
• 2004

As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• Journal of the Korean Society for Precision Engineering
• /
• v.12 no.7
• /
• pp.26-31
• /
• 1995

A new actuating mechanism suitable for a micro positioning device is developed using piezo-electric elements. The actuator can make a step movement of 0.5 .mu. m up to 3.5 .mu. m. The step size can be adjusted on demand. By repeating this step action, long distance movement is achieved. Precise positioning can be obtained by combining the coarse motion with the maximum step size and fine motion. Two types of fine motion have been proposed for a driving method. Firstly, feedback control bases on PID is applied. The experimental results for the two method are presented.