• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.3
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• pp.224-230
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• 2009

FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1594-1599
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• 2008

Haptic rendering is a process that provides force feedback during interactions between a user and an object. This paper presents a haptic rendering technique for a telemanipulation system of deformable objects using image processing and physically based modeling techniques. The interaction forces between an instrument driven by a haptic device and a deformable object are inferred in real time based on a continuum mechanics model of the object, which consists of a boundary element model and ${\alpha}$ priori knowledge of the object's mechanical properties. Macro- and micro-scale experimental systems, equipped with a telemanipulation system and a commercial haptic display, were developed and tested using silicone (macro-scale) and zebrafish embryos (micro-scale). The experimental results showed the effectiveness of the algorithm in different scales: two experimental systems applied the same algorithm provided haptic feedback regardless of the system scale.

• Journal of Aerospace System Engineering
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• v.10 no.1
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• pp.86-94
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• 2016

In this paper, position control of focal plane compensation device using piezoelectric actuator is conducted. The forcal plane compensation device installed on earth observation satellite camera compensates micro-vibration from reaction wheels. In this study, four experimental models of the open-loop compensation device are derived using MATLAB system identification toolbox in the input range of 0~50Hz. Subsequently, the PID controller for each model is designed and the performance test of each controller is conducted through MATLAB/Simulink. According to frequency response analysis of the closed-loop compensation device system, the PID controller designed for 38~50Hz input range has enough tracking performance for the whole 0~50Hz input range. The maximum output error is about $1{\mu}m$ for the input range. The simulation results has been verified by the experimental method.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.59-63
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• 2017

We present a multi-sample array device based on a pneumatic system. Solenoid valves were used to control a micro valve in a pneumatic system. The use of a compressor together with a vacuum pump ensured that one outlet could supply both compression and vacuum pressure. The multi-sample array device was fabricated using conventional photolithography and PDMS casting. The device was composed of a multiplexer, sample array, and rinsing. The multiplexer could control four sample solutions injecting into the sample array chamber. Sample solution not arrayed was removed by DI-water from the rinsing inlet. To prevent trapping of microbubbles in the channel during injection of sample solution into the device, surfactant was added in PDMS solution to serve as a hydrophilic surface treatment. As a result, the device could be used as a sample array for 64 cases, using four samples and three columns of three chambers.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.7
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• pp.90-99
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• 1996

In the area of assembly process of micro-chips and electronic parts on the printed circuit board, surface mounting device(SMD) is used as a fundamental tool. Generally speaking, the motion of the SMD is based on the ball screw system operated by any type of actuators. The ball screw system is a mechanical transformed which converts the mechanical rotational motion to the translational one. Also, this system could be considered as an efficient motion device against mechanical backlash and friction. Therefore a dynamic modeling and state sensitivity analysis of the ball screw system in SMD have to be done in the initial design stage. In this paper, a simple mathematical dynamic model for this system and the sensit- ivity analysis are mentioned. Especially, the bond graph approach is used for graphical modeling of the dynamic system before analysis stage. And the direct differentiation method is used for the state sensit- ivity analysis of the system. Finally, some trends for the state variables with respect to the design variables could be suggested for the better design and faster operating based on the results of dynamic and state sensitivity.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.5
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• pp.550-555
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• 2007

The effective fracture toughness testing of materials intended for application in Micro Electro Mechanical Systems (MEMS) devices is required in order to improve understanding of how micro sized material used in device may be expected to perform upon the micro scale. ${\gamma}$-TiAl based materials are being considered for application in MEMS devices at elevated temperatures. Especially, in Alloy 4, both ${\alpha}_2$ and ${\gamma}$ lamellae were altered markedly in 3,000 h, $700^{\circ}C$ exposure. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. Parallel decomposition of coarse ${\alpha}_2$ into bunches of very fine (${\alpha}_2+{\gamma}$) lamellae. The materials were examined 2 types Alloy 4 on heat exposed specimen($700^{\circ}C$, 3,000 h) and no heat exposed one. Micro sized cantilever beams were prepared mechanical polishing on both side at $25{\sim}30{\mu}m$ and electro final stage polishing to observe lamellar orientation of same colony with EBSD (Electron Backscatter Diffraction Pattern). Through lamellar orientation as inter-lamellae or trans-lamellae, Cantilever beam was fabricated with Focused Ion Beam(FIB). The directional behavior of the lamellar structure was important property in single material, because of the effects of the different processing method and variations in properties according to lamellar orientation. In MEMS application, it is first necessary to have a reliable understanding of the manufacturing methods to be used to produce micro structure.

• International Journal of Quality Innovation
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• v.7 no.1
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• pp.98-111
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• 2006

The paper presents the design of an optical profilometer, a device used for the reconstruction of the micro-geometry of mechanical parts in applications where high precision is needed. The design is based on Robust Design, a major' methodology for quality improvement of engineering systems. Several design solutions, namely different hardware and software setups of the device, are compared in order to select a configuration realising a desired trade-off between performance and cost. The peculiarity of the design strategy is the use of a computer model of the measurement process where the physical part of the process is simulated. This allows for an extensive exploration of the design space, thus opening the way to product innovation.

• Journal of the Korean Society of Visualization
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• v.15 no.3
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• pp.14-19
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• 2017

Increase of blood viscosity significantly changes the flow resistance and wall shear stress which are related with cardiovascular diseases. For measurement of blood viscosity, microfluidic method has proposed by monitoring pressure between sample and reference flows in the downstream of a microchannel with two inlets. However, it is difficult to apply this method to unknown flow conditions. To measure blood viscosity under unknown flow conditions, a microfluidic method based on micro particle image velocimetry(PIV) is proposed in this study. Flow rate in the microchannel was estimated by assuming velocity profiles represent mean value along channel depth. To demonstrate the measurement accuracy of flow rate, the flow rates measured at the upstream and downstream of a T-shaped microchannel were compared with injection flow rate. The present results indicate that blood viscosity could be reasonably estimated according to shear rate by measuring the interfacial width and flow rate of blood flow. This method would be useful for understanding the effects of hemorheological features on the cardiovascular diseases.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.251-255
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• 2003

This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fine alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.12
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• pp.1159-1165
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• 2013

Powder blasting, which is an efficient micromachining method for glass, silicon, and ceramics, has a critical disadvantage in that the surface finish is poor owing to the brittle fracture of materials. Low-pressure waterjet machining can be applied to smoothen the rough surface inside the blasted structure. In this study, the surface roughness and sectional dimension of micro-channels are observed during the repetitive application of a waterjet to blasted micro-channels. The asperities and subsurface cracks created by blasting are removed by waterjet machining. Along with the surface roughness, it is found that the sectional dimension increases and the edges of the finished micro-channel become slightly round. Finally, a microfluidic chip is machined by the blasting-waterjet process and a transparent microfluidic channel is obtained efficiently.