• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1521-1527
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• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.368-371
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• 2008

An extensometer system to measure strain and displacement of cylindrical fatigue specimen in a autoclave of high temperature and high pressure environment has been developed by KEPRI. The extensometer reads the displacement caused by fatigue loads at the target length of the specimen installed inside the autoclave. The performance of the extensometer were tested at 15MPa, $315^{\circ}C$ of a operating pressurized water reactor. Two LVDT's of magnet type were connected to the extensometer and used for converting the fatigue displacement to electronic signal. The device is being used for developing environmental fatigue curve of CF8M cast austenitic stainless steel (CASS) in the test condition of low cycle and low strain. This paper introduces the background and results of the development.

• Proceedings of the KIPE Conference
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• 1998.10a
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• pp.321-324
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• 1998

A single phase induction motor (SPIM) rated in fractional horsepower is widely used in home and industrial equipment: washing machines, fans, refrigerators, etc. In this paper, authors present the experimental results of the SPIM under controlling of currents of main and auxiliary windings by using a one-chip micro stator(OMS). This new starting method is developed to replace the conventional starting device consisted with a mechanical switch and a capacitor. In mentioned method, the soft-starting of SPIM is simply implemented and higher efficiency is obtained in comparison with conventional condenser type SPIM.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.1059-1066
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• 2003

A power generation system are proposed to convert ambient mechanical vibration into electrical energy using cantilever-type piezoelectric materials. The vibration-based power device can be used for self-powered systems without batteries. This paper presents the theoretical analysis for the coupled equations of piezoelectric and structural motions and investigates the dynamic characteristics of the self-power system using transfer function method. The theoretical model is verified by the finite element analysis of the resonance frequency, the dynamic response of the structure and the sensor sensibility. Experimental results measured using a prototype system agrees with the theoretical predictions. The system is shown to produce 2.53㎼ in average. Finally, we perform the optimal design for system variables to maximize output power.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.156-156
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• 2004

정보화 및 휴대화 시대에 있어서 폭증하는 정보량을 보다 작은 용기에, 보다 많이 그리고 보다 저렴하게 저장하기 위해서는, 기존 저장기기의 한계를 극복할 수 있는 새로운 개념의 차세대 정보 저장기기가 요구되어 진다. 나노미터 사이즈의 주사탐침이 기록매체표면에 근접하여 정보를 기록/재생하는 PSD는 상기한 저장기기의 대용량화, 소형화, 그리고 저가격화를 충족시킬 수 있는 신개념의 저장기기로, 그 기술적 근간을 SPM(Scanning Probe Microscope)기술과 MEMS(Micro Electro Mechanical Systems) 제작기술에 두고 있다.(중략)

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.687-691
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• 2005

We demonstrated stability-enhanced liquid crystal (LC) displays using pixel-iosolated LC mode in which LC molecules are isolated in pixel by horizontal polymer layer and vertical polymer wall. The device shows good electro-optic properties with external pressure and bending due to the polymer structures. The polymer wall acts as supporting structure from mechanical pressure and maintains the cell gap from bending. Moreover, the polymer layer acts as adhesive for tight attachment of two substrates. We presented various methods to produce the polymer structures by using anisotropic phase separation from LC and polymer composites or patterned micro-structures.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.441-449
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• 2014

Thermoplastic fusion bonding is widely used to seal polymer microfluidic devices and optimal bonding protocol is required to obtain a successful bonding, strong bonding force without channel deformation. Besides, UV modification of the PMMA (poly-methyl methacrylate) is commonly used for chemical or biological application before the bonding process. However, study of thermal bonding for the UV modified PMMA was not reported yet. Unlike pristine PMMA, the optimal bonding parameters of the UV modified PMMA were $103^{\circ}C$, 71 kPa, and 35 minutes. A very low aspect ratio micro channel (AR=1:100, $20{\mu}m$ depth and $2000{\mu}m$ width) was successfully bonded (over 95%, n>100). Moreover, thermal bonding of multi stack PMMA chips was successfully demonstrated in this study. The results may applicable to fabricate a complex 3 dimensional microchannel networks.

• Proceedings of the KIEE Conference
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• 2000.07b
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• pp.760-762
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• 2000

Hybrid type LPM can be widely applied in the precise position controlled devic because precise linear motion can be directly obtained by the simple control circuit without backlash in the rotary-type stepping motor. Also, LPM can increase the Position resolution, which was limited by mechanical manufacturing limit and characteristic of magnetic material. using micro-step drive method to decrease the noise and vibration further. Especially, Double-side LPM may be replaced the solenoid as the valve driving device without difficulty and give full play to control the valve accurately. Hence, In this paper, magnetic circuit of double-side LPM was confirmed and static thrust force curve according to the relative displacement between stator and mover, was analyzed by the two dimensional finite element method. From this results, we can suppose the excitation current to be controlled optimally.

• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.184-188
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• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.60-60
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• 2010

최근 사람의 피부나 내부 장기처럼 수축과 팽창이 일어나는 부위 등에 이식 가능한 소자 개발에 대한 연구가 많이 보고되었다. 현재 이런 stretchable electronics에 대한 연구는 channel material로서 실리콘이나 유기물, 그리고, 광학 리소그래피가 가능한 micro-electronics 에 국한되어 있다. 우리는 CVD 로 성장된 수십 나노미터의 직경을 갖는 $SnO_2$ 나노선을 슬라이딩 전이하여 실리콘 웨이퍼 상에서 소자화하고 이를 스트레칭이 가능한 PDMS 기판에 전이하여 stretchable nanowire device를 구현하였다. 해당 소자는 윗면과 아랫면 모두 폴리머로 덮여 있고 측정을 위한 전극이 따로 구성되어 있어 소자 특성의 열화가 최소화되게 제작되었으며, 수축과 팽창 시 받는 스트레인 또한 최소화하는 mechanical neutral structure를 갖게 제작되었다. 또한, 소자와 소자 혹은 소자와 전극간의 연결을 S자 형태로 구성하여 기판으로 사용된 PDMS를 수십 % 스트레칭하여도 소자의 전기적 특성이 유지되는 것을 확인하였다. 이처럼 스트레칭이 가능한 나노선 소자는 구김이나 잡아 늘여지게 되는 다양한 표면위에 간단하게는 논리회로뿐만 아니라 나노선의 장점을 이용한 다양한 센서 및 기능 소자로서 응용이 가능할 것으로 예상된다.