• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1414-1415
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• 2006

Air-gap type film bulk acoustic wave resonator device using ZnO for piezoelectric layer and sacrifice layer, deposited by RF magnetron sputter with various conditions, fabricated in this study. Also, membrane$(SiO_2)$ and top and bottom electrode(both Al) of piezoelectric layer deposited by RF magnetron sputter. Using micro electro mechanical systems(MEMS) technique, sacrifice layer removed and then air-gap formed. The results of each process checked by XRD, AFM, SEM to obtain good quality device.

• The KSFM Journal of Fluid Machinery
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• v.18 no.3
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• pp.60-65
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• 2015

This paper deals with performance characteristics and efficiencies of Pelton turbine can be applied as one of ERDs (Energy Recovery Devices) of PRO (Pressure Retarded Osmosis) system for desalination. The objective of this study is experimentally estimating the performance of micro-scale Pelton turbine for PRO pilot plant. Especially the performance characteristics with variations of jet nozzle diameter of Pelton turbine are discussed in detail. In order to do this, lab scale test rig of Pelton turbine was made for performance test, which includes water tank, Pelton wheel with buckets, jet nozzle and torque brake and so on. The parameter effects related on Pelton turbine's efficiency were investigated and discussed on the influence of the variations of load and speed ratio.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.10
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• pp.88-94
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• 2021

Machining operations require the removal of chips to keep the water-soluble cutting oil clean and fresh throughout the operation time. Water-soluble cutting oil for metal processing is diluted using a 3-8% solution in water which is generally replaced every three to six months. This study aims to develop multiple purification devices to efficiently remove fine contaminating particles from water-soluble cutting oil. The 2D concept designs were created using AutoCAD. The designs were drawn using the 3D modelling feature of CATIA. Flow analysis was performed in a bubble purifier using Ansys computational fluid dynamics (CFD). This analysis has aided in improving the design and structure of the device to create the final prototype. Experiments were conducted to check the prototype's performance. Comparisons of the effects of each process variable on the experiment was carried out using ANOVA.

• Journal of Radiation Protection and Research
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• v.30 no.2
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• pp.69-75
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• 2005

Gas avalanche microdetectors, such as micro-strip gas chamber (MSGC), micro-gap chamber (MGC), micro-dot chamber (MDOT), etc., are operated under high voltage to induce large electron avalanche signal around micro-size anodes. Therefore, the anodes are highly exposed to electrical damage, for example, sparking because of the interaction between high electric field strength and charge multiplication around the anodes. Gas electron multiplier (GEM) is a charge preamplifying device in which charge multiplication can be confined, so that it makes that the charge multiplication region can be separate from the readout micro-anodes in 9as avalanche microdetectors possible. Primary electron collection efficiency is an important measure for the GEM performance. We have defined that the primary electron collection efficiency is the fractional number of electron trajectories reaching to the collection plane from the drift plane through the GEM holes. The electron trajectories were estimated based on 3-dimensional (3D) finite element method (FEM). In this paper, we present the primary electron collection efficiency with respect to various GEM operation parameters. This simulation work will be very useful for the better design of the GEM.

• Tribology and Lubricants
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• v.39 no.5
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• pp.197-202
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• 2023

Recently, research on experimental and analytical techniques utilizing microfluidic devices has been pursued. For example, lab-on-a-chip devices that integrate micro-devices onto a single chip for processing small sample quantities have gained significant attention. However, during sample preparation, unnecessary gases can be introduced into the internal channels, thus, impeding device flow and compromising specific function efficiency, including that of analysis and separation. Several methods have been proposed to mitigate this issue, however, many involve cumbersome procedures or suffer from complexities owing to intricate structures. Recently, some approaches have been introduced that utilize hydrophobic device structures to remove gases within channels. In such cases, the permeability of gases passing through the structure becomes a crucial performance factor. In this study, a method involving the deposition and sintering of diluted Ag-ink onto a silicon wafer surface is presented. This is followed by unstructured nano-pattern creation using a Metal Assisted Chemical Etching (MACE) process, which yields a nanostructured surface with unstructured pillar shapes. Subsequently, gas permeability in the spaces formed by these surface structures is investigated. This is achieved by experiments conducted to incorporate a pressure chamber and measure gas permeability. Trends are subsequently analyzed by comparing the results with existing theories. Finally, it can be confirmed that the significance of this study primarily lies in its capability to effectively evaluate gas permeability through unstructured pillar-like nanostructures, thus, providing quantitative values for the appropriate driving pressure and expected gas removal time in practical device operation.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.265-271
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• 2005

In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

• Korean Journal of Computational Design and Engineering
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• v.17 no.3
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• pp.156-163
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• 2012

Real-time three-dimensional shape measurement is becoming increasingly important in various fields, including medical sciences, high-technology industry, and microscale measurements. However, there are not so many 3D profile tools specially designed for specifically narrow space, for example, to scan the tooth shape of a human jaw. In this paper, a real-time 3D intraoral scanner is proposed for the measurement of tooth profile in the mouth cavity. The proposed system comprises a laser diode beam, a micro charge-coupled device, a graticule, a piezoelectric transducer, a set of optical lenses, and a polhemus device sensor. The phase-shifting technique is used along with an accurate calibration method for the measurement of the tooth profile. Experimental and theoretical inspection of the phase-to-coordinate relation is presented. In addition, a nonlinear system model is developed for collimating illumination that gives the more accurate mathematical representation of the system, thus improves the shape measurement accuracy. Experiment results are presented to verify the feasibility and performance of the developed system. The experimental results indicate that overall measurement error accuracy can be controlled within 0.4 mm with a variability of ${\pm}0.01$.

• Biomaterials and Biomechanics in Bioengineering
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• v.2 no.2
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• pp.71-84
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• 2015

A low-profile flow sensor has been designed, fabricated, and characterized to demonstrate the feasibility for monitoring hemodynamics in cerebral aneurysm. The prototype device is composed of three micro-membranes ($500-{\mu}m$-thick polyurethane film with $6-{\mu}m$-thick layers of nitinol above and below). A novel super-hydrophilic surface treatment offers excellent hemocompatibility for the thin nitinol electrode. A computational study of the deformable mechanics optimizes the design of the flow sensor and the analysis of computational fluid dynamics estimates the flow and pressure profiles within the simulated aneurysm sac. Experimental studies demonstrate the feasibility of the device to monitor intra-aneurysmal hemodynamics in a blood vessel. The mechanical compression test shows the linear relationship between the applied force and the measured capacitance change. Analytical calculation of the resonant frequency shift due to the compression force agrees well with the experimental results. The results have the potential to address important unmet needs in wireless monitoring of intra-aneurysm hemodynamic quiescence.

• Korean Journal of Materials Research
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• v.24 no.10
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• pp.532-537
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• 2014

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

• The Journal of the Acoustical Society of Korea
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• v.34 no.2
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• pp.108-116
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• 2015

An acoustic vector sensor is a device that is capable of measuring the direction of wave propagation and the acoustic pressure. In this paper, the modeling of micro-cantilever sensor for the vector sensor are proposed by consideration of acoustic phenomenon in water. Two models based on unimorph structure are proposed in this paper and corresponding transfer function which describes the relation between input pressure wave and output voltage depending on incidence angle and frequency of pressure wave is derived based on lumped model. It has been shown that very thin and flexible micro-cantilever can be used to measure directly the particle velocity component in water.