• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.8
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• pp.419-422
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• 2001

This paper presents the principle and fabrication of a novel micro mass spectrometer and emission test of hot electron for ionization. A micro mass spectrometer consists of a micro ion source and a micro ion separator. The micro ion source consists of a hot filament and grid electrodes. Electrons emitted from a hot filament are to ionize some sample molecules. The ions are accelerated to an ion detector by an electric field. Mass can be analyzed by using the time of fight depending on the mass-to-charge ratio. The current of hot electron emission from the hot filament is measured for various input voltages.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.5
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• pp.1004-1009
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• 2009

Recently, mass spectrometers are widely used for in-situ chemical analysis. It has rapid response and high sensitivity. In this paper, we present the fabrication and test of a cold cathode emitter for micro mass spectrometer using CNTs(Carbon nano tubes). The CNTs have good mechanical, electrical and chemical characteristics. So they have a long life time and strong robustness. The micro mass spectrometer is composed of the glass substrate and the silicon substrate. The glass substrate is constructed by electrodes for TOF(Time-of-flight) which analyze an ion with mass to charge ratio as ion separator. The silicon substrate is highly doped wafer which is patterned for gate electrode and then 100 11m dry etching to grow the CNTs as the electron emitter. The CNTs are grown by HFCVD(Hot filament chemical vapor deposition) with sputtering the catalyst. We successfully attained to grow the CNTs and to test the characteristics.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1528-1529
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• 2007

In this paper, we present the fabrication of a thermoelectron emitter for a micro mass spectrometer. The micro mass spectrometer consists of a silicon substrate with a thermoelecton emitter and glass substrate with an acceleration electrode and a repeller electrode. The hot-filament is fabricated by electroplating. We designed two shapes of thermoelectron emitter and compared the emission current.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.7
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• pp.1001-1006
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• 2012

This paper presents a carbon nanotube (CNT) triode-structure field emitter as an ion source in a micro time-of-flight mass spectrometer(TOF-MS). In the ion source by field emission, the electrons emitted from cathodes under an electric field accelerated to the anode and ionize gas molecules by impact before arriving the anode. The generated positive ions are to be accelerated to the ion collector. Whereas most of ions are drawn to the cathodes in diode field emitters, a grid in the triode field emitter prevents the ions from being drawn to the cathodes. The triode field emitter is fabricated by micromachining. The cathode is composed of six CNT cylinders. The total size of the fabricated device is $8.0{\times}7.3{\times}1.9mm^3$. The anode and the grid current of the fabricated CNT field emitter were measured for various anode and grid voltages. When the anode and the grid voltages are 1000 V and 990 V, respectively, the emission current passing through the ionization region is 8.6 ${\mu}A$, which is a sufficient emission current for ionization and mass spectrometry.

• Journal of Electrical Engineering and Technology
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• v.3 no.1
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• pp.121-124
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• 2008

This paper presents the fabrication and field emission of carbon nanotube field emitters for a micro mass spectrometer. The carbon nanotube is an adequate material as a field emitter since it has good characteristics. We have successfully fabricated a diode field emitter and a triode field emitter. Each field emitter has been constructed using several micromachining processes and a thermal CVD process. In the case of the diode field emitter, to increase the electric field, the carbon nanotubes are selectively grown on the patterned nickel catalyst layer. The electron current of the diode field emitter is 73.2 ${\mu}A$ when the anode voltage is 1100V. That of the triode field emitter is 3.4 pA when the anode voltage is 1000V.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.10
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• pp.679-686
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• 2010

A proprietary device is adopted to break out the membrane of cell in the rigid polyurethane foam. As it is known, the membrane of cell is hardly tearing-off thoroughly in a mechanical way due to both its elastic characteristic and micro sized pores. In this study, a novel experimental approach is introduced to burst out all gases inside the cells of the rigid polyurethane foam by abrasively grinding micro-cells completely into fine powder. The biggest advantage of this approach is to be capable of releasing all gases out from the cell even in the micro pores. As clearly reflected from the repeatability, the accuracy of the result is highly improved and high confidence in the data sets as well. For the measurements of not only gas composition but partial pressure for each gas simultaneously as well, a precision gas mass spectrometer is used in-line directly to the abrasive grinding device. To control the starting point of the polyurethane foam, all samples were prepared on site in the laboratory. Manufactured time is one of the most critical factors in characterization of cell gas composition because it is known that one of gas composition, especially, carbon dioxide, is diffused out dramatically in a short period of time as soon as it is foamed.

• Transactions of Materials Processing
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• v.18 no.4
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• pp.310-316
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• 2009

Micro lens array(MLA) is widely used in information technology(IT) industry fields for various applications such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method having the processes of micro etching, electroplating, micro machining and laser local heating. Laser thermal relaxation method is introduced in marking of microdots on the surface of densified glass. In this paper, we have proposed a new direct fabrication process using UV laser local thermal-expansion(UV-LLTE) and investigated the optimal processing conditions of MLA on the surface of negative photo-resist material. We have also studied the 3D shape of the micro lens obtained by UV laser irradiation and the optimal process conditions. And then, we made chrome mold by electroplating. After that, we made MLA using chrome mold by hot embossing processing. Finally, we have measured the opto-physical properties of micro lens and then have also tested the possibility of MLA applications.

• Laser Solutions
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• v.11 no.2
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• pp.26-32
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• 2008

Micro lens array (MLA) is widely used in information technology (IT) industry fields, for examples such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method, micro etching, electroplating, micromachining and laser local heating. Laser local thermal-expansion (LLTE) technology demonstrates the formation of microdots on the surface of polymer substrate, in this paper. We have also investigated the new direct fabrication method of placing the MLA on the surface of a SU-8 photoresist layer. We have obtained the 3D shape of the micro lens processed by UV laser irradiation and have experimentally verified the optimal process conditions.

• Bulletin of the Korean Chemical Society
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• v.25 no.12
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• pp.1833-1839
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• 2004

Recently mass spectrometry and separation methods such as liquid chromatography have become major tools in the field of proteomics. In this report, we describe in detail our efforts to develop ultra-high pressure capillary reverse-phase liquid chromatography (cRPLC) and its online coupling to a mass spectrometer by a nanoelectrospray (nanoESI) interface. The RPLC system is constructed in house to deliver LC solvents at the pressure up to 20,000 psig, which is four times higher than conventional RPLC systems. The high operation pressure allows the efficient use of packed micro-capillary columns (50, 75 and 150 ${\mu}$m i.d., up to 1.5 m long). We will discuss the effect of column diameter on the sensitivity of cRPLC/MS/MS experiments and the utility of the developed technique for proteome analysis by its application in the analysis of proteome samples having different levels of complexity.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1367-1372
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• 2009

A proprietary device is adopted to break out the membrane of cell in the rigid polyurethane foam. As it is known, the membrane of cell is hardly tearing-off thoroughly in a mechanical way due to both its elastic characteristic and micro sized pores. In this study, a novel experimental approach is introduced to burst out all gases inside the cells of the rigid polyurethane foam by abrasively grinding micro-cells completely into fine powder. The biggest advantage of this approach is to be capable of releasing all gases out from the cell even in the micro pores. As clearly reflected from the repeatability, the accuracy of the result is highly improved and high confidence in the data sets as well. For the measurements of not only gas composition but partial pressure for each gas simultaneously as well, a precision gas mass spectrometer is used in-line directly to the abrasive grinding device. To control the starting point of the polyurethane foam, all samples were prepared on site in the laboratory. Manufactured time is one of the most critical factors in characterization of cell gas composition because it is known that one of gas composition, especially, carbon dioxide, is diffused out dramatically in a short period of time as soon as it is foamed.