• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.295-298
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• 2005

This paper is concerned with the precision material property measurement of a micro metal thin foil that is used in MEMS technology. Since these MEMS components require great precision and accuracy, evaluation of reliability such as the lift cycle endurance test, impact test, and residual stress test is necessary for these components. However, in practice, real reliability tests are not easy to perform due to consideration of various factors. Rather than actual testing, it would be much easier to evaluate the reliability of components by the analytical approach. Although the analytical method is utilized by software tools, it is obviously necessary to acquire fundamental properties of materials through real test methods. In this paper, the oriented mechanical properties of aluminum thin foil are measured by nano scale material property measurement system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1059-1062
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• 2003

Micro-tensile testing system has been developed and micro-tensile tests for copper foil have been carried out. The system consisted of a micro tensile loading system and a micro-ESPI system for measuring strain. The loading system has a maximum loading capacity of 50N and a stroke resolution of 4.5nm. Stress-strain curves for the electro-deposited copper foil with the thickness of 18$\mu\textrm{m}$ were obtained, and tensile properties, including elastic modulus, yielding strength and tensile strength, were determined. The tensile properties obtained under three different conditions of testing speed showed a dependency on the speed.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.837-841
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• 2008

Propulsion of gene coated micro-particles is desired for non-intrusive drug delivery inside biological tissue. This has been achieved by the development of a device that uses high power laser pulses. The present paper looks at the mechanisms of micro-particle acceleration. Initially, a high power laser pulse is focused onto the front side of a thin aluminium foil leading to its ablation. The ablation front drives a compression wave inside the foil, thus leading to the formation of a shock wave, which will later reflect from the rear side of the foil, due to acoustic impedance mismatch. The reflected wave will induce an opposite motion of the foil, characterized by a very high speed, of the order of several millimeters per microsecond. Micro-particles, which are deposited on the rear side of the foil, thus get accelerated and ejected as micro-projectiles and are able to penetrate several hundreds of micrometers inside tissue-like material. These processes have been observed experimentally by using high-speed shadowgraphy and considered analytically.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.1916-1919
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• 2007

We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave propagates through the foil. The shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is applying shock wave and deformation of the thin foil from the ablation to accelerating micro-particles to a very high speed.

• 한국연소학회:학술대회논문집
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• 2007.05a
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• pp.27-30
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• 2007

We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave is generated from a localized spot of high intensity energy source. The resulting reactive shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is generating reactive shock wave and high strain rate deforming of thin metal foil for accelerating micro-particles to a very high speed on the orders of several thousand meter per second. Somce innovative applications of this device will be discussed.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.68-71
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• 2008

Transdermal and topical drug delivery with minimal tissue damage has been an area of vigorous research for a number of years. Our research team has initiated the development of an effective method for delivering drug particles across the skin (transdermal) for systemic circulation, and to localized (topical) areas. The device consists of a micro particle acceleration system based on laser ablation that can be integrated with endoscopic surgical techniques. A layer of micro particles is deposited on the surface of a thin metal foil. The rear side of the foil is irradiated with a laser beam, which generates a shockwave that travels through the foil. When the shockwave reaches the end of the foil, it is reflected as an expansion wave and causes instantaneous deformation of the foil in the opposite direction. Due to this sudden deformation, the microparticles are ejected from the foil at very high speeds, and therefore have sufficient momentum to penetrate soft body tissues. We have demonstrated this by successfully delivering cobalt particles $3\;{\mu}m$ in diameter into gelatin models that represent soft tissue with remarkable penetration depth.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.566-569
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• 2008

Recently, the biolistic process is emerging as an effective needle-free drug delivery technique to transfer adequate concentrations of pharmacologic agents to soft living tissues with minimum side effects. We have started developing an effective method for delivering drug coated particles using laser ablation. A thin metal foil with deposited micro-particles on one side is irradiated with laser beam on the opposite side so that a shock wave is generated. This shock wave travels through the foil and is reflected, which causes and instantaneous deformation of the foil. Due to such a sudden deformation, the micro-particles are ejected at a very high speed. Here we present the experimental results of direct and confined laser ablation, which correspond to the initial stage of the whole experiment.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.353-357
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• 2007

We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave propagates through the foil. The shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is applying shock wave and deformation of the thin foil from the ablation to accelerating micro-particles to a very high speed.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.379-382
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• 2007

The MEMS (Micro Electro Mechanical Systems) process is used in a micro/nano pattern manufacturing method. This method is based on the lithography technology. But the MEMS process has some problems such as complicated process, long processing time and high production costs. Many researchers are doing research in substitute manufacturing method to work out a solution to these problems. In this paper, we apply a dieless incremental forming technology to a substitute method of MEMS process. This dieless forming technology is using in the commercial scale sheet forming such as a prototype of automobile sheet parts. 5-axes CNC (Computerized Numeric Control) method are applied in this system to get a micro-scale dieless forming results. These 5-axes system are composed of precision AC servo motor stages (4-axes) and PZT actuator (1-axis). A PZT actuator is used in a precision actuating axis because it can be operated in the nano scale stroke resolution. This micro dieless incremental forming system has the advantage of minimization in manipulating distance and working space. As equipment and tools become smaller in size, minute inertia force and high natural frequency can be obtained. Therefore, high precision forming performance can be obtained. This allows the factory to quickly provide the customer with goods because the manufacturing system and process are reduced. To construct this micro manufacturing system, many technologies are necessary such as high stiffness frame, high precision actuating part, structural analysis, high precision tools and system control. To achieve the optimal forming quality, the micro dieless forming system is designed and made with high stiffness characteristic.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.487-488
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• 2006