Measurement of Tensile Properties of Copper foil using ESPI technique

ESPI 기법을 이용한 동 박막의 인장 특성 측정

  • 권동일 (전남대 대학원 기계공학과) ;
  • 허용학 (한국표준과학연구원 산업측정표준) ;
  • 김동진 (한국표준과학연구원 산업측정표준) ;
  • 박준협 (동명정보대학교 로보트시스템공학) ;
  • 기창두 (전남대 기계공학과)
  • Published : 2003.06.01

Abstract

Micro-tensile testing system has been developed and micro-tensile tests for copper foil have been carried out. The system consisted of a micro tensile loading system and a micro-ESPI system for measuring strain. The loading system has a maximum loading capacity of 50N and a stroke resolution of 4.5nm. Stress-strain curves for the electro-deposited copper foil with the thickness of 18$\mu\textrm{m}$ were obtained, and tensile properties, including elastic modulus, yielding strength and tensile strength, were determined. The tensile properties obtained under three different conditions of testing speed showed a dependency on the speed.