• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.458-464
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• 1998

This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

• Journal of Power Electronics
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• 제5권4호
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• pp.247-256
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• 2005

In order to harvest power in an efficient manner from a micro piezoelectric (PZT) device for charging the battery of a remote system, a new AC/DC resonant pulse power converter is proposed. The proposed power converter has two stages in the power conversion process. The first stage includes N-type MOSFET full bridge rectifier. The second stage includes a boost converter having an N-type MOSFET and a P-type MOSFET. MOSFETs work in the $1^{st}$ or $3^{rd}$ quadrant region. A small inductor for the boost converter is assigned in order to make the size of the power converter as small as possible, which makes the on-interval of the MOSFET switch of the boost converter ultimately short. Due to this short on-interval, the parasitic junction capacitances of MOSFETs affect the performance of the power converter system. In this paper, the performance of the new converter is analytically and experimentally evaluated with consideration of the parasitic capacitance of switching devices.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 춘계학술대회 논문집
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• pp.40-62
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.

• 대한기계학회논문집B
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• 제32권3호
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• pp.231-234
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• 2008

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.251-255
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• 2003

This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fine alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

• 한국정밀공학회지
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• 제12권2호
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• pp.48-58
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.

• 소성∙가공
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• 제11권7호
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• pp.569-574
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• 2002

Recently, thick PZT films are required for the cases of micro piezoelectric devices with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Microstructures, and electrical properties of films were investigated by XRD, FESEM, impedance analyzer, and P-E hysteresis. PZT films with 2.7$mu extrm{m}$ to 4.4${\mu}{\textrm}{m}$ thickness were fabricated. Dielectric constant, loss, remnant polarization and coercive field of them were 880~1650 at 1kHz, 2~3% at 1kHz, 26~32 $\mu$C/$ extrm{cm}^2$, and 33~60kV/cm, respectively. Also a transverse piezoelectric coefficient $(e_{31,f})$ measurement system was fabricated and tested for thick film samples.

• 대한기계학회논문집A
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• 제27권10호
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• pp.1772-1777
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• 2003

This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fme alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1246-1247
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• 2008

With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. Therefore, in other to made piezoelectric energy harvesting device, PMN-PZT thick film was formed by the screen printing method on the Ag/Pd coated alumina substrate. The layer was 8 layers and slurry where a-terpineol, ethycellulose, ferro B-75001 as Vehicle, PMN-PZT powder used are fabricated by ball mill. The output power quality was be also investigated by changing the load resistance, weight and frequency. The made piezoelectric energy harvesting device was resulted from the conditions of 33$k{\Omega}$, 0.25g, 197Hz respectively. The thick film was prepared at the condition of 2.75Vrms, and its power was 230${\mu} W$ and its thickness was 56${mu}m$. The piezoelectric energy harvesting device output voltage was increased, when the load weight, load resistance was increasing and resonance frequency was diminishing. The other side, resonance frequency was diminished, when the weight was increasing. And output power was continuously it changed by load resistance, output voltage, weight and resonance frequency.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.494-497
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• 2003

A rotating device driven by an Inchworm motor was designed and fabricated to be used as an angie standard system. 1. PZT was adopted as a driving source, while the movement of PZT was guided by the leaf spring employing the elastic transformation of metals. 2. The device could rotate in a 360-degree arc. continuously Performance test of the device showed about 0.02 sec. of the minimum revolution angle and 1/15 rpm of the maimum revolution speed. 3. To improve its performance requires further studies on realizing a shifting device with faster response time, on increasing the output current (capacity) of the power amplifier used to drive PZT, on the dynamic motion of clamping. and on determining the optimum clamping condition