• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 2006.09b
• /
• pp.773-774
• /
• 2006

Gas surface treatment is considered to be effective for titanium because of its high reactivity. In this study, we investigated the gas nitriding mechanism in titanium sintered parts produced by metal powder injection molding (MIM) process. The microstructure and nitrogen content of sintered MIM parts were greatly affected by nitriding conditions. Nitriding process strongly depended on the specimen size, for example, the size of micro metal injection molding (${\mu}-MIM$) product is so small and the specific surface is so large that the mechanical and functional properties can be modified by nitriding.

• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 2006.09a
• /
• pp.43-44
• /
• 2006

The production method of micro sacrificial plastic mold insert metal injection molding, namely ${\mu}-SPiMIM$ process has been proposed to solve specific problems involving the miniaturization of MIM. Two types of sacrificial plastic molds (SP-mold) with fine structures were used: 1) PMMA resist, 2) PMMA mold injected into Ni-electroform, which is a typical LIGA (${\underline{L}}ithographie-{\underline{G}}alvanoformung-{\underline{A}}bformung$) process. Stainless steel 316L feedstock was injection-molded into the SP-molds with multi-pillar structures. This study focused on the effects of metal particle size and processing conditions on the shrinkage, transcription and surface roughness of sintered parts.

• Proceedings of the KIEE Conference
• /
• 2006.07c
• /
• pp.1587-1588
• /
• 2006

Tn this paper, PCB (Printed Circuit Board) embedded $BaTiO_3$ MIM capacitors were designed, fabricated, and characterized for low cost organic SOP applications by using 3-D EM simulator and low temperature processes. Size of electrodes and thickness of high dielectric films are optimized for improving the performance characteristics of the proposed embedded MIM capacitors at high frequency regime. The selected thicknesses of the $BaTiO_3$ film are $12{\mu}m$, $16{\mu}m$, and $20{\mu}m$. The fabricated MIM capacitor with dielectric constant of 30 and thickness of $12{\mu}m$ has capacitance density of $21.5p\;F/mm^2$ at 100MHz, maximum quality factor of 37.4 at 300 MHz, a quality factor of 30.9 at 1GHz, self resonant frequency of 5.4 GHz, respectively. The measured capacitances and quality factors are well matched with 3-D EM simulated ones. These embedded capacitors are promising for SOP based advanced electronic systems with various functionality, low cost, small size and volume.

• Journal of Sensor Science and Technology
• /
• v.16 no.2
• /
• pp.97-103
• /
• 2007

Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2001.05a
• /
• pp.209-212
• /
• 2001

It is known that the mim forming processes show somewhat different phenomena compared with the conventional metal forming processes, namely, the size effect, enhanced friction effect and etc. Such typical phenomena, however, are not predicted by the conventional finite element analysis, which has been an efficient numerical tool to predict the metal forming processes. It is due to the fact that the constitutive relations used does not describe the microstructural characteristics of the materials. In the present investigation, the finite element formulation using the rate-dependent rigid plastic crystal plasticity model of the face-centered cubic materials is conducted to predict the micro mechanical behaviors during the mim forming processes. The finite element analysis, however, provides mesh-dependent solutions for the intragranular deformations. Therefore, the couple stress energy is additionally introduced into the variational principle and formulated within the framework of the rigid plastic finite element method to obtain mesh-independent solutions. Micro deformations of single crystal and bicrystal with various orientations are calculated to show the potential of the developed formulation.

• Journal of the Microelectronics and Packaging Society
• /
• v.15 no.1
• /
• pp.39-44
• /
• 2008

In this paper, fully embedded 2.4GHz WLAN band pass filter (BPF) was investigated into a multi-layered organic packaging substrate using high Q spiral stacked inductors and high Dk MIM capacitors for low cost RF System on Package (SOP) applications. The proposed 2.4GHz WLAN BPF was designed by modifying chebyshev second order filter circuit topology. It was comprised of two parallel LC resonators for obtaining two transmission zeros. It was designed by using 2D circuit and 3D EM simulators for finding out optimal geometries and verifying their applicability. It exhibited an insertion loss of max -1.7dB and return loss of min -l7dB. The two transmission zeros were observed at 1.85 and 6.7GHz, respectively. In the low frequency band of $1.8GHz{\sim}1.9GHz$, the stop band suppression of min -23dB was achieved. In the high frequency band of $4.1GHz{\sim}5.4GHz$, the stop band suppression of min -l8dB was obtained. It was the first embedded and the smallest one of the filters formed into the organic packaging substrate. It has a size of $2.2{\times}1.8{\times}0.77mm^3$.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2001.10a
• /
• pp.200-203
• /
• 2001

Micromolding methods such as micro-injection molding and micro-compression molding are most suitable for mass production of plastic micro-optics with low cost. In this study, plastic micro-optical components, such as refractive microlenses and diffractive optical elements(DOEs) with various grating patterns, were fabricated using micro-compression molding process. The mold inserts were made by ultrapricision mechanical machining and silicon etching. A micro compression molding system was designed and developed. Polymer powders were used as molded materials. Various defects found during molding were analyzed and the process was optimized experimentally by controlling the governing process parameters such as histories of mold temperature and compression pressure. Mim lenses of hemispherical shape with $250{\mu}m$ diameter were fabricated. The blazed and 4 stepped DOEs with $24{\mu}m$ pitch and $5{\mu}m$ depth were also fabricated. Optical and geometrical properties of plastic molded parts were tested by interferometric technique.

• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 2006.09a
• /
• pp.36-37
• /
• 2006

This study aims to investigate the usage of nano-scale particles in a micro metal injection molding ($\mu$-MIM) process. Nanoscale particle is effective to improve transcription and surface roughness in small structure. Moreover, the effects of hybrid micro/nano particles, Cu/Cu and SUS/Cu were investigated. Small dumbbell specimens were produced using various feedstocks prepared by changing binder content and fraction of nano-scale Cu particle (0.3 and $0.13{\mu}m$ in particle size). The effects of adding the fraction of nano-scale Cu powder on the melt viscosity of the feedstock, microstructure, density and tensile strength of sintered parts were discussed.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2002.02a
• /
• pp.253-259
• /
• 2002

Micro cell structures with high aspect ratio were fabricated by injection molding method. The mold inserts had dimension $1.9cm\times8.3cm$ composed of a lot of micro posts and were fabricated by LIGA process. The size of the micro posts was $157{\mu}m\times157{\mu}m\times500{\mu}m$ and the gaps between two adjacent posts were $50{\mu}m$. Using Polymethylmethacrylate (PMMA) injection molding was performed. The key experimental variables were temperature, pressure, and time. By controlling these, good shaped mim cell structures with $50{\mu}m$ in wall thickness and $500{\mu}m$ in depth were obtained. In order to understand micro molding mechanism, shape changes of molded PMMA were studied with experimental variables. And the durability of mold insert was investigated, too. The results show that the most important factor in molding processes was the mold temperature that is closely related to the filling of the melt into the micro cavity. And the holding time before cooling showed a great effect on the quality of molded PMMA.

• Journal of Ocean Engineering and Technology
• /
• v.2 no.2
• /
• pp.104-111
• /
• 1988

This paper deals with the micro-surface-cracks behavior on the unnotched smooth specimens of Type 304 stainless steel at $593^{\circ}C$ in air under creep and creep-fatigue conditions that have 10 mim and 1 min load holding times respectively. The behaviors of the micro-surface-cracks have been visualized by means of surface replica method and optical micro-photography. The quantitative characteristics of initiation, growth and coalescence of micro-surface-cracks have been investigated by observing and measuring the crack growth behaviors. some of the important results are as follows: Main crack initiates at grain boundary in the early stage(10 to 20%)of its life time and grows through coalescence and finally leads to fracture. The distribution of micro-surface-crack length, 2a, can be plotted against the composite Weibull distribution. The growth rate of the main crack can be plotted against the stress intensity factor, crack tip opering displacement and J integral.