• Title/Summary/Keyword: Micro Line

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Fabrication of metal line on plastic substrate by hot embossing and CMP process (핫 엠보싱 공정과 CMP 공정을 이용한 플라스틱 기판에 메탈 라인 형성)

  • Cha, Nam-Goo;Kang, Young-Jae;Park, Chang-Hwa;Rim, Hyung-Woo;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.655-656
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    • 2005
  • In the future, plastic based system will play a crucial role in modem life, for examples, transparent display or disposable electronics and so on. In this paper, we introduced a new method to fabricate the metal line on the plastic substrate. Metal lines were fabricated by hot embossing and CMP process on PMMA (polymethylmethacrylate) substrates. A Si mold was made by wet etching process and a PMMA wafer was cut off from I mm thick PMMA sheet. A 100 nm thick Al was deposited on PMMA wafers. The Al deposited PMMA wafer and the Si mold carefully sandwiched which was directly imprinted by hot embossing. After imprinting process, a residual Al layer was removed by CMP process. Finally, we found the entire process may be very useful to fabricate the metal line on plastic substrates.

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Micro-patterning for Biomimetic Functionalization of Surface

  • Jeon, Deok-Jin;Lee, Jun-Yeong;Yeo, Jong-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.272-273
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    • 2013
  • Some living thingsuse micro- or nano- structures for living in nature. Scientists and engineers made efforts to mimic them, and they succeeded in making new types of applications. They used 'Namib desert beetle' to self-filling device by moisture harvesting and 'lotus leaf' to self-cleaning device by water repelling. 'Namib desert beetle' and lotus leaf have micro-patterns on their surface, which consists of hydrophobic or hydrophilic materials [1]. Moreover, micro-patterns on the surface make self-filling or self-cleaning property enhanced because of the surface roughness. Surface roughness enhances wettability [2]. Micro-pattern is a significant factor to make the surface be functional, so we want to make new types of functional surface by micro-patterning. In this work,we make several functional micro-patterns (radial, line, and dot arrays) using maskless lithography and analyze the characteristics of each micro-pattern. In order to analyze and understand surface characteristics, micro-patterns with varying sizes are investigated. All experiments are proceeded on mr-DWL5 photo resists coated on silicon wafers in same condition. All the experiments have demonstrated good performances about hydrophobic or hydrophilic property corresponding to their material and structural combinations. In radial micro-pattern, although the surface is flat, water drops on hydrophilic radial pattern can be convergent to a middle point and water drops on hydrophobic radial pattern can be divergent from the middle point. In line array micro-pattern, water drops can roll off along only one direction in parallel with the line arrays. Such phenomena might be mainly caused by the local change of surface roughness. From these results, controlling the movement and direction of water drops is made feasible without introducing a slope, which can potentially be used for new types of applications.

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Laser Micro-machining technology for Fabrication of the Micro Thin-Film Inductors (초소형 박막 인덕터 제작을 위한 레이저 미세가공 기술 개발)

  • Ahn, Seong-Joon;Ahn, Seung-Joon;Kim, Dae-Wook;Kim, Ho-Seob;Kim, Cheol-Gi
    • Journal of the Korean Magnetics Society
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    • v.13 no.3
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    • pp.115-120
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    • 2003
  • We have developed laser micro-machining technology for fabrication of the micro thin-film inductors. After the thin layers of FM/M/FM films were coated to the silicon substrate by using the conventional sputtering method, the new laser machining was applied to the patterning process that used to be carried out by the semiconductor lithography procedure. A CW Nd:YAG laser operating in TEM$\sub$00/ mode was actively Q-switched to obtain the very short pulse of 200 ns. The laser micro-machining process with pulse energy and repetition rate have been optimized as 5 mJ/pulse and 5 kHz, respectively, to obtain the line resolution as fine as 20 $\mu\textrm{m}$.

Three Dimensional Shape Measurement of a Micro Fresnel Lens with In-line Phase-shifting Digital Holographic Microscopy

  • Kang, Jeon-Woong;Hong, Chung-Ki
    • Journal of the Optical Society of Korea
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    • v.10 no.4
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    • pp.178-183
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    • 2006
  • An in-line phase-shifting digital holographic microscopy system was constructed by inserting a conventional microscope in the object arm of a Mach-Zehnder interferometer. It was used to measure the three dimensional shape of a micro Fresnel lens. It was also shown that both the lateral and the axial resolutions of the in-line phase-shifting system using a self-calibration algorithm were superior to those of the best off-axis system.

A Study on Basic Technology for the Experimental Making of Miniaturized Electrical Power Distribution Line (소형화된 배전선로의 실험적 제작을 위한 기초 연구)

  • Oh, Se-Pil;Choi, Seong-Cheol;Kim, Young-Min;Kang, Ha-Na;Ko, Yun-Seok
    • The Journal of the Korea institute of electronic communication sciences
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    • v.12 no.6
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    • pp.1107-1114
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    • 2017
  • In this paper, a miniaturized distribution line was experimentally made. The smart grid distribution system was modeled by analyzing the distribution system, and a miniaturized micro three phase distribution system recloser was designed. The micro recloser was designed as a sensor part, a main part and a relay part, and the main part was designed to cut off the fault current by determining the fault from the input current based on the DSP. Finally, based on the results of the modeling, the micro three phase power distribution line and the micro three phase recloser were experimentally fabricated, and the basic making technology of the miniaturized micro smart grid was obtained through the making process.

Effect of Nozzle Scanning in Micro Grooving of Glass by Powder Blasting (Powder Blasting 에 의한 유리의 미세 홈 가공시 노즐 주사횟수의 영향)

  • Kim, Kwang-Hyun;Choi, Jong-Sun;Park, Dong-Sam
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.7
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    • pp.1280-1287
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    • 2002
  • The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass, silicon and ceramics, capable of producing micro structures larger than $100{\mu}$ m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film. Therefore, well-controlled masking process is the most important factor for micro machining of glass with accuracy.

Design and Implementation of Wireless Intelligent Controller for Micro-Inverter in Solar Power Systems (태양광 발전시스템에서 사용하는 마이크로인버터용 무선지능형제어기 설계 및 구현)

  • Han, Seongtaek
    • Journal of Korea Society of Digital Industry and Information Management
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    • v.15 no.4
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    • pp.9-17
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    • 2019
  • Sun power generation systems which use large capacity centralized inverters have loss of power generation due to cloud and building shadows, pollution, cell deterioration, etc. To minimize loss of power generation, decentralized solar power systems using multiple micro-inverters are being proposed as an alternative. A distributed solar power system consisting of a system-connected system uses power line communication to collect data from the micro-inverters. Power line communication has the advantage of using power lines without separate lines for data transmission, but in distributed solar power generation systems that use a large number of micro-inverters, the bit error rate is less reliable due to the phenomenon caused by limited transmission power, high load interference and noise, variable signal attenuation, and impedance characteristics. So we proposed wireless intelligent controller for micro-inverter that is used to build distributed solar power systems. and we design and implement that. Further, the proposed wireless intelligent controller for micro-inverter was used to establish a small-volume solar power plant to check its function and operation.

Field Performance Evaluation of Micro-surfacing Method and Polymer Slurry Seal Method Used in National Highway (일반국도에 적용한 마이크로서페이싱공법과 폴리머슬러리실공법에 대한 현장 공용성 평가)

  • Son, Hyeon Jang;Kim, Yong Joo;Baek, Jong Eun;Lim, Jae Kyu;Kim, Boo Il
    • International Journal of Highway Engineering
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    • v.17 no.1
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    • pp.17-24
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    • 2015
  • PURPOSES : Recently, crack, rutting, and stripping problems from the surface of asphalt pavements in National highway are observed and they affect the drivers to feel uncomfortable on the road. Surface treatments are recommended to use in distressed pavements due to cost-effective, and improvement of surface performance. The purpose of this study is to evaluate the performance of micro-surfacing and polymer slurry seal treatments for distressed asphalt pavements. METHODS : Surface conditions and friction resistance are evaluated for asphalt pavements treated with micro-surfacing and polymer slurry seal mixes in National highway 30 line and 34 line. Visual observation is conducted and surface performance is measured by PES (Performance Evaluation Surveyor) in terms of crack ratio, rutting and IRI(International Roughness Index). BPN(British Pendulum Number) is measured by BPT(British Pendulum Tester) to evaluate the friction resistance in the field. RESULTS : The surface evaluation results are presented for asphalt pavement treated with micro-surfacing and polymer slurry seal treatments in National highway 30 line and 34 line. Based on the visual observation, micro-surfacing and polymer slurry seal treatments show better improvements in terms of cracks and stripping. Based on the surface conditions measured by PES vehicle, the surface performance of micro-surfacing treatments improves from 53.3% to 54.2% and the surface performance of polymer slurry seal treatments improves from 21.6% to 59.7%. However, the friction resistance of both micro-surfacing and polymer slurry seal treatments decreases from 2.5% to 6.7%. Further, it should be verified to produce the surface exposed with aggregates during the construction process of both treatment methods in the field. CONCLUSIONS : Based on the performance evaluation results in the filed, the surface performance of asphalt pavement treated with micro-surfacing and polymer slurry seal treatments improves from 21.6% to 59.7%. While, the friction resistance of asphalt pavement treated with micro-surfacing and polymer slurry seal treatments does not improve. It can be concluded that current micro-surfacing and polymer slurry seal treatments would improve surface performance but would not improve the friction resistance.