• Title/Summary/Keyword: Micro Etching

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Micro-shear bond strength of resin-bonding systems to cervical enamel.

  • Shimada, Y.;Kikushima, D.;Iwamoto, N.;Shimura, R.;Ide, T.;Nakaoki, Y.;Tagami, J.
    • Proceedings of the KACD Conference
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    • 2001.11a
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    • pp.560.1-560
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    • 2001
  • To evaluate the micro-shear bond strength of current adhesive systems to cervical and mid-coronal enamel. Materials and Two commercially available resin adhesives were investigated; a self-etching primer system(Clearfil SE Bond, Kyraray) and a one-bottle adhesive system(Single Bond, 3M) intended for use with the total-etch wet-bonding technique were employed. Two regions of enamel, cervical and mid-coronal regions, were chosen from the buccal surface of extracted molars and were then bonded with each adhesive system and submitted to the micro-shear bond test.(중략)

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Fabrication of 1-${\mu}m$ channel length OTFTs by microcontact printing

  • Shin, Hong-Sik;Baek, Kyu-Ha;Yun, Ho-Jin;Ham, Yong-Hyun;Park, Kun-Sik;Lee, Ga-Won;Lee, Hi-Deok;Wang, Jin-Suk;Lee, Ki-Jun;Do, Lee-Mi
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1118-1121
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    • 2009
  • We have fabricated inverted staggered pentacene Thin Film Transistor (TFT) with 1-${\mu}m$ channel length by micro contact printing (${\mu}$-CP) method. Patterning of micro-scale source/drain electrodes without etching was successfully achieved using silver nano particle ink, Polydimethylsiloxane (PDMS) stamp and FC-150 flip chip aligner-bonder. Sheet resistance of the printed Ag nano particle films were effectively reduced by two step annealing at $180^{\circ}C$.

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Development of Micro-machined Heat Flux Sensor by using MEMS technology (MEMS를 이용한 미세 열유속센서의 개발)

  • Yang, Hoon-Cheul;Song, Chul-Hwa;Kim, Moo-Hwan
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.1364-1369
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    • 2004
  • New method for the design, fabrication, and calibration of micro-machined heat flux sensor has been developed. Two types of micro-machined heat flux sensor having different thicknesses of the thermal-resistance layer are fabricated using the MEMS technique. Photo-resist patterning using a chrome mask, bulk-etching and copper-nickel sputtering using a shadow mask are applied to make heat flux sensors, which are calibrated in the convection-type heat flux calibration facility. The sensitivity of the device varies with thermal-resistance layer, and hence can be used to measure the heat flux in heat-transfer phenomena.

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A Controllable Micro Damper Using Magneto-Rheological Fluids (자기유변유체를 이용한 마이크로 가변형 댐퍼)

  • Kim, Ki-Duck;Sim, Won-Chul;Jeon, Do-Young;Choi, Bum-Kyoo
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.8
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    • pp.41-45
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    • 2000
  • This paper provides a new concept of the controllable micro damper using MR(Magneto Rheological)fluids. The damper is composed of four layers which are fabricated by wet etching. The Process of the fabrication is explained and the change of damping property is experimentally shown. Since the damping force is controllable by the applied magnetic field the vibration can be effectively absorbed.

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Development of Micro-opto-mechanical Accelerometer using Optical fiber (광섬유를 이용한 미세 광 기계식 가속도 센서의 개발)

  • Lee, Seung-Jae
    • Journal of the Korean Society of Mechanical Technology
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    • v.13 no.4
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    • pp.93-99
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    • 2011
  • This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.

A Simple Plane-Shaped Micro Stator Using Silicon Substrate Mold and Enamel Coil

  • Choi, Ju Chan;Choi, Young Chan;Jung, Dong Geun;Lee, Jae Yun;Min, Seong Ki;Kong, Seong Ho
    • Journal of Sensor Science and Technology
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    • v.22 no.5
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    • pp.333-337
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    • 2013
  • This study proposes a simply fabricated micro stator for higher output power than previously reported micro stators. The stator has been fabricated by inserting enamel coil in silicon mold formed by micro etching process. The most merits of the proposed micro stator are the simple fabrication process and high output power. Previously reported micro stators have high resistance because the micro coil is fabricated by relatively thin-film-based deposition process such as sputtering and electroplating. In addition, the previously reported micro coil has many electrical contact points for forming the coil structure. These characteristics of the micro stator can lead to low performance in output power. However, the proposed micro stator adopts commercially available enamel coil without any contact point. Therefore, the enamel coil of the proposed micro stator has low junction resistance due to the good electrical quality compared with the deposited or electroplated metal coil. Power generation tests were performed and the fabricated stator can produce 5.4 mW in 4000 RPM, $1{\Omega}$ and 0.3 mm gap. The proposed micro stator can produce larger output power than the previously reported stator spite of low RPM and the larger gap between the permanent magnet and the stator.

Investigation of effect of zirconia on osseointegration by surface treatments (지르코니아 표면처리가 골유착에 미치는 영향)

  • Jeong, Jin-Woo;Song, Young-Gyun
    • Journal of Dental Rehabilitation and Applied Science
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    • v.37 no.1
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    • pp.23-30
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    • 2021
  • Purpose: The aim of this study was to investigate effect of zirconia on osseointegration and Surface appearance by surface treatments using various acid solution. Materials and Methods: The prepared zirconia disks were treated with hydrofluoric acid solution and photo-assisted etching under various condition. The surface was analyzed by SEM and the surface roughness was analyzed by using surface profiler. The osteogenic effect of MC3T3-E1 cells was assessed via fluorescent staining observation and reverse transcriptase-polymerase chain reaction (RT-PCR). Results: Various roughness were obtained according to the surface treatment method. The surface roughness increased in the group treated with hydrofluoric acid solution, but that had week network structure. In the method using photo-assisted etching, the surface roughness increased in micro units. Cell reaction showed better results in the photo-assisted etching group than in the hydrofluoric acid-treated group (P < 0.05). And it showed even osteoblastic cell distribution in photo-assisted etching group. Conclusion: As a result, the photo-assisted etching method is more effective than the simple acid solution treatment for zirconia treatment for osseointegration.

Fabrication Method and Performance Evaluation of Micro Igniter for MEMS Thruster (MEMS 추력기를 위한 마이크로 점화기의 제작 방법 및 성능 평가)

  • Lee, Jongkwang
    • Journal of the Korean Society of Propulsion Engineers
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    • v.19 no.1
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    • pp.1-8
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    • 2015
  • Micro igniter on the glass membrane for MEMS thruster was developed. The stability of the micro igniter by using a glass membrane with a thickness of tens of microns was improved. The micro igniter was fabricated by anisotropic wet etching of photosensitive glass and deposition of Pt/Ti for electric heat coil. The solid propellant was loaded into the propellant chamber without an especial technique due to the high structural stability of the glass membrane. Ignition tests were performed successfully. The minimum ignition delay was 27.5 ms with an ignition energy of 19.3 mJ.

Effect of Micro Casting and Plasma-etching on Polycaprolactone Film for Bone (뼈 재생을위한 폴리카프로락톤 필름에 대한 마이크로 캐스팅 및 플라즈마 에칭)

  • Lee, Jae-Yun;Yang, Ji-Hun;Kim, Geun-Hyeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.24-24
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    • 2018
  • One of the challenges in tissue engineering is the design of optimal biomedical scaffolds, which can be governed by topographical surface characteristics, such as size, shape, and direction. Of these properties, we focus on the effects of nano - to micro - sized hierarchical surface. To fabricate the hierarchical surface structure on poly(${\varepsilon}$-caprolactone) (PCL) film, we employed a nano/micro-casting technique (NCT) and modified plasma process. The micro size topography of PCL film was controlled by sizes of the micro structures on lotus leaf. Also, the nano-size topography and hydrophilicity of PCL film were controlled by modified plasma process. After the plasma treatment, the hydrophobic property of the PCL film was significantly changed into hydrophilic property, and the nano-sized structure was well developed, as increasing the plasma exposure time and applied power. The surface properties of the modified PCL film were investigated in terms of initial cell morphology, attachment, and proliferation using osteoblast-like-cells (MG63). In particular, initial cell attachment, proliferation and osteogenic differentiation in the hierarchical structure were enhanced dramatically compared to those of the smooth surface.

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Fabrication of ZnO TFTs by micro-contact printing of silver ink electrodes

  • Shin, Hong-Sik;Yun, Ho-Jin;Nam, Dong-Ho;Choi, Kwang-Il;Baek, Kyu-Ha;Park, Kun-Sik;Do, Lee-Mi;Lee, Hi-Deok;Wang, Jin-Suk;Lee, Ga-Won
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1600-1603
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    • 2009
  • In this work, we have fabricated inverted staggered ZnO TFTs with 1-${\mu}m$ resolution channel length by micro contact printing (${\mu}$-CP) method. Patterning of micro scale source/drain electrodes without etching is successfully achieved by micro contact printing method by using silver ink and polydimethylsiloxane (PDMS) stamp. And the time dependent characteristics of the sheet resistance show that Ag inklayer could be used as source and drain electrodes for ZnO TFTs.

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