• 한국전기전자재료학회논문지
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• 제26권11호
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• pp.841-845
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• 2013

We give a textured front on silicon wafer for high-efficiency solar cells by using micro contact printing method which uses PDMS (polydimethylsiloxane) silicon rubber as a stamp and SAM (self assembled monolayer)s as an ink. A random pyramidal texturing have been widely used for a front-surface texturing in low cost manufacturing line although the cell with random pyramids on front surface shows relatively low efficiency than the cell with inverted pyramids patterned by normal optical lithography. In the past two decades, the micro contact printing has been intensively studied in nano technology field for high resolution patterns on silicon wafer. However, this promising printing technique has surprisingly never applied so far to silicon based solar cell industry despite their simplicity of process and attractive aspects in terms of cost competitiveness. We employ a MHA (16-mercaptohexadecanoic acid) as an ink for Au deposited $SiO_2/Si$ substrate. The $SiO_2$ pattern which is same as the pattern printed by SAM ink on Au surface and later acts as a hard resist for anisotropic silicon etching was made by HF solution, and then inverted pyramidal pattern is formed after anisotropic wet etching. We compare three textured surface with different morphology (random texture, random pyramids and inverted pyramids) and then different geometry of inverted pyramid arrays in terms of reflectivity.

• Transactions on Electrical and Electronic Materials
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• 제3권1호
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• pp.30-37
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• 2002

A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control'writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 $\times$ 0.5 mm$^2$area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.86-86
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• 2010

Micro- and nanoscale texturing and control of surface energy have been considered for superhydrophobicity on polymer and silicon. However these surfaces have been reported to be difficult to meet the robustness and transparency requirements for further applications, from self cleaning windows to biochip technology. Here we provided a novel method to fabricate a nearly superhydrophobic soda-lime glass using two-step method. The first step involved wet etching process to fabricate micro-sale patterns on soda-lime glass. The second step involved application of $SiO_x$-incorporated DLC to generate high intrinsic contact angle on the surface using chemical vapor deposition (CVD) process. To investigate the effect of surface roughness, we used both positive and negative micro-scale patterns on soda-limeglass, which is relatively hard for surface texturing in comparison to quartz or Pyrex glasses due to the presence of impurities, but cheaper. For all samples we tested the static wetting angle and transparency before and after 100 cycles of wear test using woolen steel. The surface morphology is observed using optical and scanning electron microscope (SEM). The results shows that negative patterns had a greater wear resistance while the hydrophobicity was best achieved using positive patterns having static contact angle up to 140 deg. with about 80% transparency. The overall experiment shows that positive patterns at etching time of 1 min shows the optimum transparency and hydrophobicity. The optimization of micro-scale pattern to achieve a robust, transparent, superhydrophobic soda-lime glass will be further investigated in the future works.

• 대한치과보존학회:학술대회논문집
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• 대한치과보존학회 2002년도 추계학술대회
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• pp.706-706
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• 2002

No Abstract, See Full Text

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제37회 하계학술대회 초록집
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• pp.110-110
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.91-92
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.185-186
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.199-200
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• 2007

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.1894-1899
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• 2007

This paper presents the thermal characteristics for micro heat exchanger with different micro-channel shapes. The shapes of micro-channel has been manufactured sheet metal by chemical etching for the I shape of straight channel and V and W shapes of chevron feature and fabricated micro plated heat exchangers using the vacuum brazing of bonding technology. The experimental study has been performed on heat transfer and pressure drop characteristics with various Reynolds number for water to water at the counter flows. The average heat transfer rate of V and W shapes has been showed about 1.5${\sim}$1.6 times large than those of I shape. For the comparison of Nusselt number, it is known that the convective heat transfer of V and W shapes represent more effect than I shape. The pressure drops of V and W shapes are about 1.2${\sim}$1.7 times lager than those of I shape.

• 한국정밀공학회지
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• 제22권9호
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• pp.27-33
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• 2005

This study deals with the truing of diamond wheel fur the manufacture of micro v-shaped grooves with fine sharp edges in the grinding. Fine micro v-shaped grooves are key components to fabricate LGP(light guide plate), optical fiber connector and so on. Conventional v-shaped groove methods such as etching and lithography are difficult to make grooves with accuracy and cutting by lathe is difficult to select target materials. Therefore, as a preliminary stage to developing the grinding technology that will be expected fabrications for micro 3-dimensional structure of high effectivity and accuracy and freed up the restrictions of machinability to the materials for micro v-shaped grooves, truing is carried out with resin bond diamond wheel and electroforming diamond wheel using a cup-type truer. From the experimental results, it is found that the effects according to working direction of the cup-type truer and the restrainable methods of plastic deformation that is generated at wheel edge are examined. As a result, fine micro v-shaped diamond wheel was obtained, which are applicable to micro grinding for optical devices.