• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.5
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• pp.13-20
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• 2005

Micro EDM process is generally used for machining microholes, cavities, and three dimensional shapes. For machining micro structures, first of all, micro tool electrode is indispensable and WEDG system is proposed for tool fabrication method. When using WEDG, its machining characteristics are highly affected by many EDM parameters such as applied voltage, current, rotation speed, capacitance, and pulse duration. Therefore, the design of experiment is introduced to fully understand the effect of the EDM parameters on machining tool electrode. And an attempt has been made to develop the mathematical model for predicting the size of the tool electrode by calculating spark distance. The suggested model was verified with experiment and predicted working gap distance is in good accord with the measured value.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.953-956
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• 1997

Micro drilling characteristics by EDM method was investigated. In detail, Micro tool electrode for EDM drilling was machined by use of WEDG method and micro hole was drilled using the machined tool electrode in SUS plate. The machining accuracy and time was compared in a different dielectric fluid. As a result, it was convinced that this method could be utilized as a fabrication technology of micro mold or micro 3 dimensional parts.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.4
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• pp.218-224
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• 2004

We present a miniature Direct Methanol Fuel Cell (micro-DMFC) using platinum sputtered microcolumn electrodes with a limited amount of fuel. We use the microcolumn electrode in order to improve the power density of the micro-DMFC that consists of two electrodes and polymer electrolyte. We also design the built-in fuel chamber in the anode for the portable electronics applications. We design and fabricate both microcolumn and planar electrodes, having an identical projective area of 5mm${\times}$5mm. The diffusion current density of the microcolumn electrode is 1.73 times higher than that of the planar electrode at electrode potential of 1.1V in the half-cell test. The micro-DMFC based on the microcolumn electrodes shows the maximum power of 10.8$\pm$7.54㎼(43.23$\pm$0.16㎼/$\textrm{cm}^2$) at the projective area of 5mm${\times}$5mm, while the planar electrode micro-DMFC shows the maximum power of 0.81$\pm$0.42㎼(3.24$\pm$1.68㎼/$\textrm{cm}^2$) at the same projective area. The micro-DMFC based on the microcolumn electrodes shows 13 times higher power density that the micro-DMFC based on the planar electrodes does.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.191-197
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• 2003

As mechanical components are miniaturized, the demand on micro die and mold is increasing. Micro mechanical components usually have high hardness and good conductivity. So micro electrical discharge machining (MEDM) is an effective way to machine those components. In micro cavity fabrication using MEDM, it is observed that the bottom surface of cavity is distorted. Electric charges tend to be concentrated at the sharp edge. At the center of the bottom surface, debris can not be drawn off easily. These two phenomena make the bottom surface of the electrode and workpiece distort. As machining depth increases, the distorted shape of electrode approaches hemisphere. This process is affected by capacitance and the size of electrode. By using a smaller electrode than the desired cavity size and appropriate tool movement, bottom shape distortion can be prevented.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.4
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• pp.44-48
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• 2005

As mechanical components are miniaturized, the demands on micro die/mold are increasing. Micro mechanical components usually have high hardness and good conductivity. Micro electrical discharge machining (MEDM) can thus be an effective way to machine those components. In micro cavity fabrication using MEDM, it is observed that the bottom surface of the cavity is distorted. Electric charges tend to be concentrated at the sharp edge, and debris cannot be drawn off easily at the center of the bottom surface. These two phenomena make the bottom surface of electrode and workpiece distort. As machining depth increases, the distorted shape of the electrode approaches hemisphere. This process is affected by both capacitance and the size of electrode. By using a smaller electrode than the desired cavity size and appropriate tool movement, bottom shape distortion can be prevented.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.175-180
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• 2005

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. In this research, fabrication of micro plasma electrode was carried out using FIB. The one of problems of FIB-sputtering is the redeposition of material including Ga+ ion source during sputtering process. Therefore the effect of the redeposition was verified by EDX. And the micro plasma electrode of copper was fabricated by FIB.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1093-1096
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• 2001

Eletrochemical phenomenon are employed in the manufacturing of micro-electrochemical machining(micro-ECM). The application of controlled electrochemical metal removal in the fabrication of microstructures and microcomponents is refer to as micro-electrochemical machining. In this paper, we introduce a new method named $\ulcorner$point-electrode electro chemical machining method$\lrcorner$ was proposed to establish micro fabrication technology by use of electrochemical machining. And we find effect of the electrochemical phenomenon in several conditions.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.31-36
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• 2001

As a part of micro engine development feasibility estimation was done through fabrication and test of down scaled combustor and MEMS fabricated spark electrode. In an experimental observation of the down scaled combustion phenomena where flame propagation was observed by optical method and pressure change in combustor which gives the information about the reaction generated thermal energy was recorded and analyzed. Optimal combustor scale was derived to be about 2mm considering increased heat loss effect and thermal energy generation capability. Through the fabrication and discharge test of MEMS electrode effects of electrode width and gap was investigated. Electrode was fabricated by thick PR mold and electroplating. From the result discharge voltage characteristic in sub millimeter scale electrode having thickness of $40{\mu}m$ was obtained. From the result base technology for design and fabrication of micro engine was obtained.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.227-232
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• 2003

In order to make a deep and precise micro-hole, electrode wear and clearance between the electrode and the workpiece are important parameters using micro-electrical discharge machining. In this study, experiments were carried out to show the characteristics of electrode wear and radial clearance with respect to the depth of machined hole. Electrode wear varied with respect to the depth of hole. With deeper machined hole, bigger clearance was observed. Also it was found that the diameter of electrode influences machining characteristics of deep holes.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1627-1628
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• 2006

In this paper, mesoporous only platinum electrode and micro pore platinum electrode with mesoporous Pt are fabricated and characterized on a silicon substrate to check their usability as enzymeless sensing electrodes for developing non-disposable glucose sensors integrated with silicon CMOS read out circuitry. Since most of electrochemical glucose sensors are disposable due to the use of the enzymes that are living creatures, these are limited to use in the in-vivo and continuous monitoring system applications. The proposed mesoporous Pt electrode with approximately 2.5nm in pore diameter and 150nm in height was fabricated by using a nonionic surfactant $C_{16}EO_8$ and an electroplating technique. The micro pore Pt electrode with mesoporous Pt means the mesoporous Pt electrode fabricated on top of micro pore arrayed Pt electrode with approximately $10{\mu}m$ in pore diameter and $80{\mu}m$ in height. The measured current responses at 10mM glucose solution of plane Pt, micro pore Pt, micro pore with mesoporus Pt, and mesoporous Pt electrodes are approximately $9.9nA/mm^2$, $92.4nA/mm^2$, $3320nA/mm^2$ and $44620nA/mm^2$, respectively. These data indicate that the mesoporous Pt electrode is much more sensitive than the other Pt electrodes. Thus, it is promising for non-disposable glucose sensor and electrochemical sensor applications.