• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.04a
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• pp.29-33
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• 2000

MEMS, Micro Electro-Mechanical Systems, present one of the greatest advanced packaging challenges of the next decade. Historically hybrid technology, generally thick film, provided sensors and actuators while integrated circuit technologies provided the microelectronics for interpretation and control of the sensor input and actuator output. Brought together in MEMS these technical fields create new opportunities for miniaturization and performance. Integrated circuit processing technologies combined with hybrid design systems yield innovative sensors and actuators for a variety of applications from single crystal silicon wafers. MEMS packages, far more simple in principle than today's electronic packages, provide only physical protection to the devices they house. However, they cannot interfere with the function of the devices and often must actually facilitate the performance of the device. For example, a pressure transducer may need to be open to atmospheric pressure on one side of the detector yet protected from contamination and blockage. Similarly, an optical device requires protection from contamination without optical attenuation or distortion being introduced. Despite impediments such as package standardization and complexity, MEMS markets expect to double by 2003 to more than ＄9 billion, largely driven by micro-fluidic applications in the medical arena. Like the semiconductor industry before it. MEMS present many diverse demands on the advanced packaging engineering community. With focused effort, particularly on standards and packaging process efficiency. MEMS may offer the greatest opportunity for technical advancement as well as profitability in advanced packaging in the first decade of the 21st century! This paper explores MEMS packaging opportunities and reviews specific technical challenges to be met.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.479-486
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• 2012

This paper presents a high-speed automatic micro-alignment system that is a part of an inspection machine for small-sized molded lenses of mobile phones, palm-top computers, and so on. This work was motivated by the shortcomings of existing highest-grade commercial machine. A simple tip/tilt/Z parallel mechanism is designed based on kinematic couplings, which is a 3-degree-of-freedom (3-DOF) moderate-cost alignment stage. It is used to automatically adjust the posture of each lens on the tray, which is impossible by the conventional instrument. Amplified piezoelectric actuators are used to ensure the accuracy and dynamic response. Forward kinematic analysis and simulation show that the parasitic motion is small enough compared to the actuator stroke. From the workspace analysis of the moving platform, it is clear that the output motion range satisfies the design requirements.

• Smart Structures and Systems
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• v.6 no.7
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• pp.793-810
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• 2010

This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers. In order to measure the angular rate of the rotating frame, a driving force is applied to the inner mass and the Coriolis force is sensed along the y-direction associated with the outer mass. Due to micro-fabrication imperfections, including anisoelasticity and damping effects, both gyroscopes do not allow accurate measurements, and therefore, it becomes necessary to devise feedback controllers to reduce the effects of such imperfections. Given an ideal gyroscope that meets certain performance specifications, a feedback control strategy is synthesized to reduce the error dynamics between the actual and ideal gyroscopes. For a dual-mass gyroscope, it is demonstrated that the error dynamics are remarkably decreased with the application of four actuators applied to both masses in the x and y directions. It is also shown that it is possible to reduce the error dynamics with only two actuators applied to the outer mass only. Simulation results are presented to prove the efficiency of the proposed control design.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.05a
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• pp.247-251
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• 2008

This paper presents a micro air pump actuated by PZT actuator (synthetic jet actuator) for air supply for micro fuel cells. The synthetic jet actuators are usually created by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, in/outlet channel and PZT diaphragms. To design the micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. A prototype of the micro air pump, with a size of $mm{\times}mm{\times}mm$, was fabricated by PDMS replication process and was conducted performance test. To control the PZT actuator, we used the SP4423 micro chips that can be amplified input voltage to reduce the controller size and the power consumption. With a voltage of 3V at 100Hz, the air pump's pumping pressure is 600pa and its power consumption is only 0.1mW.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.164-169
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• 2005

The micro-gripper system is one of the systems that should be improved in the respect of performance for practical usage. In the previous works, the important issues are considered and presented using axiomatic design approach. In this paper, the functional requirements and design parameters are evaluated in order to improve the performance and efficiency of the system. The evaluation is a very difficult task since many variables are related to the outcomes. To provide a basis for correct design decisions, axiomatic design principles have been advanced. Since the framework of axiomatic design makes design issues easier to understand when they are analyzed, we used those as an evaluation tool. The object of the system is to handle micro-size parts. Main device is a micro-gripper using two bender-typed and one stack-typed PZTs as actuators. And it has three tips made of tungsten wires fur holding function. Also the system must satisfy other functional requirements for appropriate handling performance. The results of this study show design improvements of micro-gripper system such as structural change of gripper, additional element, and integration of physical parts. Axiomatic design guides presented suitable design parameters corresponding to functional requirements and made the design elements improve through diagrams of whole system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.12
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• pp.1185-1191
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• 2011

The kinematic characteristics of cutting device significantly affects cutting performance in 2-dimensional elliptical vibration cutting(EVC) where the cutting tool cuts workpiece, traversing a micro-scale elliptical trajectory in a trochoidal motion. In this study, kinematical characteristics of EVC device constructed with two parallel stacked piezoelectric actuators were analytically modeled and compared with the experimental results. The EVC device was subjected to step and low-frequency(0.1 Hz) sinusoidal inputs to reveal only its kinematical displacement characteristics. Hysteresis in the motion of the device was observed in the thrust direction and distinctive skew of the major axis of the elliptical trajectory of the cutting tool was also noticed. Discrepancy in the voltage-to-displacement characteristics of the piezoelectric actuators was found to largely contribute to the skew of the major axis of the elliptical trajectory of the cutting tool. Analytical kinematical model predicted the cutting direction displacement within 10 % error in magnitude with no phase error, but in estimating the thrust direction displacement, it showed a $27^{\circ}$ of phase-lag compared with the measured displacement with no magnitude error.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.12
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• pp.1246-1253
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• 2007

The recent issue of optical pickup actuators is to apply optical storage devices to mobile devices such as a cellular phone and PDA. It requires actuators to become smaller than conventional types. As the size becomes smaller, the magnetic force is reduced and the assembly of optical pickup actuators becomes more difficult. In addition, its dynamic characteristics are changed. In this paper, methods to improve magnetic forces and dynamic characteristics are suggested and the optimal result of the plate spring design is obtained. A diamond shape magnet and the fine pattern coil (FPC) are used to improve magnetic forces and damping elements are attached to decrease the peak magnitude of the mode instead of using structural damping, mostly for the purpose of improving the accuracy of the finite element simulation. To get more stable dynamic characteristics than conventional ones, a plate spring is applied to the optical pickup actuator and it is optimized with topology and parameter optimization to obtain the concept and the detail design, respectively.

• Advances in aircraft and spacecraft science
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• v.2 no.3
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• pp.303-328
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• 2015

A design methodology is presented to develop the hingeless control surfaces for MAV using adhesively bonded Macro Fiber Composite (MFC) actuators. These actuators have got the capability to deflect the trailing edge surfaces of the wing to attain the required maneuverability, besides achieving the set aerodynamic trim condition. A scheme involving design, analysis, fabrication and testing procedure has been adopted to realize the trailing edge morphing mechanism. The stiffness distribution of the composite MAV wing is tailored such that the induced deflection by piezoelectric actuation is approximately optimized. Through ground testing, the proposed concept has been demonstrated on a typical MAV structure. Electromechanical analysis is performed to evaluate the actuator performance and subsequently aeroelastic and 2D CFD analyses are carried out to see the functional requirements of wing trailing edge surfaces to behave as elevons. Efforts have been made to obtain the performance comparison of conventional control surfaces (elevons) with morphing wing trailing edge surfaces. A significant improvement in lift to drag ratio is noticed with morphed wing configuration in comparison to conventional wing. Further, it has been shown that the morphed wing trailing edge surfaces can be deployed as elevons for aerodynamic trim applications.

• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.6
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• pp.264-269
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• 2005

The electrostatic comb drive actuator is one of the main building blocks in the field of micro electro-mechanical systems (MEMS). Most of the comb actuators presented previously have fingers that are rectangular in shape which produce a stable, constant force output during actuation. The use of sawtooth fixed fingers in a comb drive, which were presumed to produce an increasing force output with displacement due to the increased number of regions where fringing force, the driving force of comb actuators, appear. The dimensions of the sawtooth were derived from finite element analysis (FEA) of simplified finger models with sawtooth type fingers of various dimension and were compared to the rectangular finger model that showed that the sawtooth type fingers have $7\~9$ times stronger driving force. Finally, comb drive actuators with sawtooth type and rectangular fingers were fabricated and although the gap was bigger, the comb actuator with sawtooth type fingers showed about 1.7 times greater electrostatic force than the one with rectangular fingers at equal driving voltages. In conclusion, using the proposed sawtooth type comb fingers in a comb drive makes it possible to increase its displacement or reduce the driving voltage.