• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.423.1-423.1
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• 2016

Polyvinylidene fluoride (PVDF) has drawn much attention due to its many advantages. PVDF shows high mechanical strength and flexibility, thermal stability, and good piezoelectricity enabling its application to various fields such as sensors, actuators, and energy transducers. Further studies have been conducted on PVDF in the form of thin films. The thin films exhibit different ionic conductivity according to the number of pores within the film, letting these films to be applied as electrolytes or separators of batteries. Porous PVDF membranes are also easily processed, usually made by using electrospinning. However, a large portion of researches were conducted using PVDF membranes produced by far field electrospinning, which is not a well-controlled experimental method. In this paper, we use near field electrospinning (NFES) process for more controlled, small-scaled, mesh type PVDF structures of nano to micro fibers fabricated by controlling process parameters and investigate the properties of such membranous structures. These membranes vary according to geometrical shape, pore density, and fiber thickness. We then measured the mechanical strength and piezoelectric characteristic of the structures. With various geometries in the fiber structures and various scales in the fibers, these types of structures can potentially lead to broader applications for stretchable electronics and dielectric electro active polymers.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.5-8
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• 2005

In this paper, the electromechanical displacements of curved piezoelectric actuators composed of PZT ceramic and laminated composite materials are calculated based on high performance computing technology and the optimal configuration of composite curved actuator is examined. To accurately predict the local pre-stress in the device due to the mismatch in coefficients of thermal expansion, carbon-epoxy and glass-epoxy as well as PZT ceramic are numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers increases the number of degrees of freedom, large-scale structural analyses are performed through the PEGASUS supercomputer, which is installed in our laboratory. In the first stage, the curved shape of the actuator and the internal stress in each layer are obtained by the cured curvature analysis. Subsequently, the displacement due to the piezoelectric force (which is resulted from applied voltage) is also calculated. The performance of composite curved actuator is investigated by comparing the displacements obtained by the variation of thickness and elastic modulus of laminated composite layers. In order to consider the finite deformation in the first analysis stage and include the pre-stress due to curing process in the second stage, nonlinear finite element analyses are carried out.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.10
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• pp.1045-1053
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• 2009

Precision stages for 6-DOF positioning, actuated by PZT stacks, which are fed back by gap sensors and guided by flexure hinges, have enlarged their application territory in micro/nano manufacturing and measurement area. The precision stages inherently have such limitations as the nonlinearity between input and output in piezoelectric stacks, feedback signal noise in precision capacitive gap sensors and low material damping in precision kinematic linkages of mechanical flexures. To surmount these limitations, the precision stage is modeled with physics-based variables, which are identified by transient response correspondence, and a gain margin calculation algorithm using the Prandtl-Ishlinskii model and describing function is newly developed to assess system performance more precisely than linear controller design schemes. Based on such analyses, a precision positioning controller is designed. Excellent positioning accuracy with rapid settlement accomplished by the controller is shown in step responses of the closed-loop system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.205-205
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• 2010

Recently, low temperature co-fired ceramic (LTCC) technology is widely used in sensors, actuators and microsystem fields because of its very good electrical and mechanical properties, high stability as well as possibility of making 3D micro structures. In this study, we investigated the effects of on $O_2$ annealing treatment on the electrical properties of Pb(ZrTi)$O_3$ (PZT) thin films deposited on LTCC substrate. The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. The PZT thin films were deposited on Au / LTCC substrates by RF magnetron sputtering method. The change of the crystallization of the films were investigated under various atmosphere. The structural variation of the films were analyzed by using X-Ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) and secondary ion mass spectrometry (SIMS).

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.22 no.9
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• pp.903-909
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• 2012

In elliptical vibration cutting(EVC) where the cutting tool traces a micro-scale 2-dimensional elliptical trajectory, the kinematical and vibrational characteristics of the EVC device greatly affect cutting performance. In this study, kinematical and vibrational characteristics of an EVC device constructed with two orthogonally-arranged stacked piezoelectric actuators were investigated both analytically and experimentally. The step voltage was applied to the orthogonal EVC device and the associated displacements of the cutting tool were measured to assess kinematical characteristics of the orthogonal EVC device. To investigate the vibrational characteristic of the orthogonal EVC, sinusoidal voltage was applied to the EVC device and the resulting displacements were measured. It was found from experiments that coupling of displacements in the thrust and cutting directions and the tilt of the major axis of the elliptical trajectory exists. In addition, as the excitation frequency is in vicinity of resonant frequencies the distortion in the shape of the elliptical trajectory becomes greater and change in the rotation direction occurs. To correct the shape distortion of the elliptical trajectory, the shape correcting procedure developed for the parallel EVC device was applied for the orthogonal EVC device and it was shown that the shape correcting method successfully corrects distortion.

• Steel and Composite Structures
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• v.27 no.3
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• pp.371-388
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• 2018

In this paper, a new model based on nonlocal high order theory is proposed to study the size effect on the bending of nano-sandwich beams with a compliance core. In this model, in contrast to most of the available sandwich theories, no prior assumptions are made with respect to the displacement field in the core. Herein the displacement and the stress fields of the core are obtained through an elasticity solution. Equations of motion and boundary conditions for nano-sandwich beam are derived by using Hamilton's principle and an analytical solution is presented for simply supported nano-sandwich beam. The results are validated with previous studies in the literature. These results can be utilized in the study of nano-sensors and nano-actuators. The effect of nonlocal parameter, Young's modulus of the core and aspect ratio on the deflection of the nano-sandwich beam is investigated. It is concluded that by including the small-scale effects, the deflection of the skins is increased and by increasing the nonlocal parameter, the influence of small-scale effects on the deflections is increased.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.190-194
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• 2005

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile camera phones. However, conventional magnetic coils of electromagnetic motors are a major obstacle for miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM (ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 1.52 mm/s at 10 kHz input signal in 5 V.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.251-256
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• 2006

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile phone cameras. However, the magnetic coils used in conventional electromagnetic motors are a major obstacle for the miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM(ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 5.4 mm/s at 10V saw signal of 41 kHz.

• Smart Structures and Systems
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• v.20 no.6
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• pp.657-668
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• 2017

In this research, an active vibration suppression of a smart beam having piezoelectric sensor and actuators is investigated by designing separate controllers comprising a linear quadratic regulator and a neural network. Firstly, design of a smart beam which consists of a cantilever aluminum beam with surface bonded piezoelectric patches and a designed mechanism having a micro servomotor with a mass attached arm for obtaining variations in the frequency response function are presented. Secondly, the frequency response functions of the smart beam are investigated experimentally by using different piezoelectric patch combinations and the analytical models of the smart beam around its first resonance frequency region for various servomotor arm angle configurations are obtained. Then, a linear quadratic regulator controller is designed and used to simulate the suppression of free and forced vibrations which are performed both in time and frequency domain. In parallel to simulations, experiments are conducted to observe the closed loop behavior of the smart beam and the results are compared as well. Finally, active vibration suppression of the smart beam is investigated by using a linear controller with a neural network based adaptive element which is designed for the purpose of overcoming the undesired consequences due to variations in the real system.