• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.346-351
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• 2003

In the recent years, as the research and the development of micro and precision machinery become active, the interest of micro actuators using SMA(Shape Memory Alloy) has been increased. The dynamic characteristic analysis of SMA is necessary for actuator application and many common researches report the material characteristics of SMA sufficiently. However, the research on dynamic characteristics is very deficient. In this paper, the helical spring are fabricated with NiTi SMA wire of high resistivity. The force, response speed, temperature, and displacement are measured by digital force gauge, infrared thermometer, and laser displacement sensor so that the dynamic characteristics of this SMT is analyzed. Also, bidirectional actuator was fabricated and experimented for its performance

• Journal of the Korean Society for Precision Engineering
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• v.29 no.11
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• pp.1207-1213
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• 2012

Typically commercial controllers do not give data of the controller gains. Therefore, it is very hard to determine the optimal controller gain even though the dynamic model is derived. In this case, design of experiment (DOE) methodology can be a powerful tool for gain tuning. In this research, gain tuning process is proposed based on the DOE. Micro parallel mechanism platform with 3 degrees-of-freedom (DOF) is used for the experiments. Controller gains are measured indirectly from the voltages of adjustable resistors. The controller gains of three actuators are optimized by two or three steps, respectively. The correlations of the controller gains are also analyzed. The process and methodology can be adopted in gain tuning of other mechanical systems.

• Journal of Industrial Technology
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• v.19
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• pp.9-14
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• 1999

The voice coil actuator uses the Lorentz force between the magnetic field of the permanent magnets and the electromagnets to the motions and positioning. The small size, light weight and fast dynamic response of the these type actuators lead to admit them in the micro-positioning apparatus of the micro-machining systems. In this paper, the linear motion voice coil actuator is developed for the driving and positioning the rotating electrode of the electric discharge machine (EDM). The analyzed and measured results for the actuator are compared and discussed.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.659-661
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• 1997

An in-plane motion measurement method using $moir{\acute{e}}$ patterns by linear-gratings and cross-gratings, which can be used as micro inertial sensors, micro actuators, and micromachined scanning microscopes is demonstrated. A simple digital image processing method that calculates and analyzes the motion of microstructure from $moir{\acute{e}}$ patterns was developed. And using several grating structures fabricated by surface micromachining, we formed $moir{\acute{e}}$ patterns and analyzed the motion of microstructure.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1142-1144
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• 1999

A 4-beam cross type silicon elastic body was fabricated for the electromagnetic type vibration micro transducer. To improve energy transfer efficiency, the structure and size of vibration transducer were optimized by the FEA simulation package. Experimental results of the fabricated transducer shows $0.5{\sim}8$ dyne of vibration force at the condition of $1{\sim}4$ mA of current source $100{\sim}7000$ Hz of frequency band width. These results presented the useful applications for micro actuators and sensors.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.9
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• pp.663-670
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• 2003

As the micro-technologies in the high precision manufacturing processes are developed, the demand for micro actuating device is increasing. But, it is difficult to achieve high resolution and wide operating range simultaneously with the conventional actuating systems which are contacting and type of dual servo system. So, the contact-free surface actuators whose movers are suspended or levitated were proposed. These systems can be applied to high precision stages and alignment apparatuses. The suspended mover can be assumed to be rigid body, but the mover is a structure in this study, therefore the vibration caused during the operating process has a serious adverse effect on the performance and it is very important to identify the vibrational characteristics. In this paper, a contact-free surface actuator is modeled in finite element method and updated by using the experimental modal data. Finally, the static and dynamic characteristics of the finite element model are predicted and then discussed.

• Journal of the Korean Society of Visualization
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• v.7 no.2
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• pp.35-41
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• 2010

Supersonic microjets acquire considerable research interest from a fundamental fluid dynamics perspective, in part because the combination of highly compressible flow at low-to-moderate Reynolds number is not very common, and in part due to the complex nature of the flow itself. In addition, microjets have a great variety engineering applications such as micro-propulsion, MEMS(Micro-Electro Mechanical Systems) components, microjet actuators and fine particle deposition and removal. Numerical simulations have been carried out at moderate nozzle pressure ratios and for different nozzle exit diameters to investigate and to understand in-depth of aerodynamic characteristics of supersonic microjets.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.735-740
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• 2001

With the development of micro-technology, the demand for micro actuator is increasing. But, it is difficult to achieve high resolution and long travel range simultaneously with the conventional actuators. So, the noncontact surface actuator was proposed. This actuator can realize high dynamic range and the planar motion without complex cross-axis linear slides. This paper describes a magnetically suspended linear actuator for developing a non-contact surface actuator. The operating principle and the structure of the proposed linear actuator are similar to switched reluctance motor, but the proposed linear actuator utilizes normal force and propulsion force simultaneously. With this characteristic, the system can be simpler than other non-contact surface actuator.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.13-22
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• 2008

For the accuracy correction of the micro-positioning industrial robot, micro-manipulator has been devised. The compliant mechanisms using piezoelectric actuators is necessary geometrically and structurally to be developed by the optimization approaches. The overall geometric advantage as the mechanical efficiencies of the mechanism are considered as objective functions, which respectively art the ratio of output displacement to input force, and their constraints are the vertical notion of supporting leg and the structural strength of manipulation. In optimizing the compliant mechanical amplifier, the sequential linear programming and an optimality criteria method are used for the geometrical dimensions of compliant bridges and flexure hinges. This paper presents the integrated design process which not only can maximize the mechanism feasibilities but also can ensure the positioning accuracy and sufficient workspace. Experiment and simulation are presented for validating the design process through the comparisons of the kinematical and structural performances.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.1 s.244
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• pp.84-89
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• 2006

A wireless capsule endoscope has been developed to replace the conventional endoscope. However, the commercialized capsule endoscope moves passively by peristaltic waves, which has some limitations for doctors to diagnose more thoroughly and actively. In order to solve this problem, a locomotive mechanism is proposed for wireless capsule endoscopes. Based on the tests of various actuators, a piezo actuator is selected as a micro actuator for capsule endoscope. In general, piezo actuators are known to have limited displacement with high voltage supply. In order to overcome the limitation of common piezo actuator, the impact based piezo actuator, is developed to realize long stroke up 11mm. By using the impact based piezo actuator, a prototype of an earthworm-like locomotive mechanism was developed. In addition, the proposed locomotive mechanism has engraved clamps mimicked the claw of an insect. The earthworm-like locomotive mechanism has 15 mm in diameter and 30mm under retraction stage and 41 mm under elongation stage in total length. Hollow space is allocated to comprise essential endoscope components such as a camera, a communication module, bio sensors, and a battery. For the feasibility test of proposed locomotive mechanism, a series of experiments were carried out including in-vitro tests. Based on results of the experiments, we conclude that the proposed locomotive mechanism is effective to be used for micro capsule endoscopes.