A Study on the Magnetic Suspension Type Linear Actuator for a Non-contact Surface Actuator

비접촉 평면구동기를 위한 자기 서스펜션방식 직선구동기

With the development of micro-technology, the demand for micro actuator is increasing. But, it is difficult to achieve high resolution and long travel range simultaneously with the conventional actuators. So, the noncontact surface actuator was proposed. This actuator can realize high dynamic range and the planar motion without complex cross-axis linear slides. This paper describes a magnetically suspended linear actuator for developing a non-contact surface actuator. The operating principle and the structure of the proposed linear actuator are similar to switched reluctance motor, but the proposed linear actuator utilizes normal force and propulsion force simultaneously. With this characteristic, the system can be simpler than other non-contact surface actuator.