• Title/Summary/Keyword: MgO substrate

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Pyroelectric infrared microsensors made by micromachining technology (마이크로 가공 기술을 이용한 강유전체 박막 초전형 적외선 센서)

  • 최준임
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.4
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    • pp.93-100
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    • 1998
  • Pyoelectric infrared detectors based on La-modified PbTiO3 (PLT) thin films have been fabricated by RF magnetron sputtering and micromachining technology. The detectors form Pb$_{1-x}$ La$_{x}$Ti$_{1-x}$ O$_{3}$ (x=0.05) thin film ferroelectric capacitors epitaxially grown by RF magnetron sputtering on Pt/MgO (100) substrate. The sputtered PLT thin film exhibits highly c-axis oriented crystal struture that no poling trealization for sensing applications is required. This is an essential factor to increase the yield for realization of an infrared image sensor. Micromachining technology is used to lower the thermal mass of the detector by giving maximum sensor efficiency. Polyimide is coated on top of the sensing elements to support the fragile structure and the backside of the MgO substrate is selectively eteched to reduce the heat loss. The sensing element exhibited a very high detectivity D* of 8.5*10$^{8}$ cm..root.Hz/W at room temperature and it is about 100 times higher than the case of micromachining technology is not used. a sensing system that detects the position as well as the existence of a human body is realized using the array sensor.sor.

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Preparation and Characterization of Bi-Sr-Ca-Cu-O Superconductor Thin Film by Metal Organic Chemical Vapor Deposition (MOCVD법을 이용한 Bi-2212계 초전도박막 제조 및 특성에 관한 연구)

  • 장건익;김호인;박인길;김호기
    • Journal of the Korean Ceramic Society
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    • v.31 no.10
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    • pp.1123-1132
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    • 1994
  • Bi-Sr-Ca-Cu-O superconductor thin films were prepared on MgO and LaAlO3 substrates by MOCVD technique. The films deposited on MgO and LaAlO3 substrates became superconducting at 64 K and 70 K respectively. The measured critical current density of thin film deposited on LaAlO3 substrate was around 104 A/$\textrm{cm}^2$. After annealing at $700^{\circ}C$ for 3 hours, the critical transition temperature(Tc) of films deposited on LaAlO3 was changed from 70 K to 74 K.

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Yields of oyster mushroom(Pleurotus ostreatus) on addition rate of Juglans mandshurica sawdust (가래나무(Juglans mandshurica) 톱밥의 첨가량이 느타리버섯의 수량에 미치는 영향)

  • Lee, Chan-Jung;Cheong, Jong-Chun;Jhune, Chang-Sung;Moon, Ji-Won;Kong, Won-Sik;Suh, Jang-Sun;Park, Gi-Chun;Shin, Yu-Su;Lee, Jeong-Hoon
    • Journal of Mushroom
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    • v.11 no.4
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    • pp.219-225
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    • 2013
  • This study was carried out to investigated optimum mixing ratio of Korean natural Juglans mandshurica using as functional plants. Total nitrogen and carbon source of J. mandshurica was 0.21% and 46.0%, respectively and C/N ratio was 219. Total nitrogen source and pH of substrate mixed with J. mandshurica was 2.3~2.9 and 5.0, respectively. The contents of CaO, MgO and $Na_2O$ at J. mandshurica media were higher at harvest media than inoculation media. Mycelial growth was the fastest at J. mandshurica 20%, and slower by increase of J. mandshurica substrate. Yields of fruiting body show the highest to 163 g/850 mL of medium which are addition 10% of J. mandshurica sawdust, and diameter and thick of pileus were the highest, too. The L value of pileus and stipes were increased by increase of J. mandshurica substrate, but there was no significant difference in the a-value and the b-value. The contents of $P_2O_5$ and $K_2O$ of fruiting body were increased at J. mandshurica substrate, but there was no significant difference in contents of CaO, MgO and $Na_2O$. The contents of Cu of fruiting body was decreased by increase of J. mandshurica substrate, but Fe, Mn and Zn were increased.

호흡율 측정기를 이용한 폐수처리 공정수의 생물학적 활성측정

  • Lee, Yeong-Rak;Lee, Gi-Yong;Im, Ji-Hun;Lee, Sang-Hun;Mun, Hong-Man;Lee, Jin-Won
    • 한국생물공학회:학술대회논문집
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    • 2000.11a
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    • pp.463-466
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    • 2000
  • In this study, it was observed to oxygen uptake rate(OUR) on microbes in activated sludge process. OUR was showed to 43, 55, and $64\;mgO_2/L/hr$ when inoculated microbes mass were 3, 5, and 10%(v/v%). In additon to oxygen was consumed to $4{\sim}42\;mgO_2/L/hr$ as changed substrate concentration. Also, we were measured kinetics coefficient in order to know growth tendency. It was concluded to maximum growth rate$(\;{\mu}\;_{max})$, $2.7\;day^{-1}$, yield coefficient, 0.655, and half-velocity coefficient, 36.11 mg/L.

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Different formation of carbon nanofilaments as a function of the gap between the substrate and the microwave plasma

  • Kim Sung-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.16 no.1
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    • pp.20-24
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    • 2006
  • Iridium-catalyzed carbon nanofilaments were formed on MgO substrate as a function of the gap between the substrate and the plasma using microwave plasma-enhanced chemical vapor deposition method. Under the remote plasma condition, carbon nanofibers were formed on the substrate. Under the adjacent plasma condition, on the other hand, carbon nanotubes-like materials instead of carbon nanofibers could be formed. When the substrate immersed into the plasma, any carbon nanofilaments formation couldn't be observed. During the reaction, the substrate temperatures were measured as a function of the gap. Based on these results, the cause for the different carbon nanofilaments formation according to the gap was discussed.

Manufacture and Characterization of Low Firing Temperatur Substrate using Glass Ceramics with Fluorine (Fluorine 함유 Glass Ceramics를 이용한 저온 소결기판 제조 및 기판의 특성 평가)

  • 강원호
    • Journal of the Microelectronics and Packaging Society
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    • v.3 no.2
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    • pp.27-38
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    • 1996
  • Lithium fluorhectorite 결정상을 함유한 glass ceramics 분말의 형성과 제조된 glass ceramics 분말을 이용한 저온 소결기판의 특성평가를 하였다. Li2O-MgO-MgF2-SiO2 계 유 리로 핵형성 및 결정 성장을 실시하여 lithium fluorhectorite 결정상을 지닌 glass ceramics 를 제조하였다. 유리시편의 핵형성 온도는 46$0^{\circ}C$였고 결정성장온도는 600, 640, 110$0^{\circ}C$에서 나타났다. $600^{\circ}C$에서의 결정상으 Li2.4LiSi4O10F2가 나타났다. Li2.4Mg8LiSi4와 Li2.8Mg0.6SiO4은 lithium fluorhectorite 결정상으로 되기 위한 중간상임을 확인할수 있었다. 64$0^{\circ}C$에서 열처리 후 110$0^{\circ}C$에서 재열처리하여 형성된 결정은 lithium fluorhectorite 와 tridymite가 최종 결정 상으로 나타났다. 이것은 수중에서 water swelling 현상에 의하여 분말화할 수 있었다, 기판 제조용 slurry를 제조하기 위해 glass ceramics 분말에 Al2O3분말을 0,25,50wt%로 혼합한것 과 glass ceramics 분말에 potashborosilica-te glass 분말을 15, 30, 45, 60 wt% 로 배합하 여 doctor blade 법으로 green sheet를 제조하였다. green sheet 는 950~150$0^{\circ}C$로소성하여 기판의 특성을 평가하였다. 겉보기 기공율은 3.06~19,14%이었고, 전기적 특성으로 유전상수 는 3~5(100KHz)를 나타내었다.

Microwave Properties and Microstructures of (Ba,Sr)TiO3 Thin Films on Various Substrates with Annealing Temperature (다양한 기판위에 증착된 BST 박막의 열처리 온도에 따른 마이크로파 유전성질과 미세구조 변화)

  • Cho, Kwang-Hwan;Kang, Chong-Yun;Yoon, Seok-Jin;Kim, Hyun-Jai
    • Korean Journal of Materials Research
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    • v.17 no.7
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    • pp.386-389
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    • 2007
  • The dielectric properties of $(Ba_{0.5}Sr_{0.5})TiO_3$ ferroelectric thin films have been investigated according to the substrates in order to optimize the their properties. MgO, r-plane sapphire, and poly-crystalline sapphire (Alumina) substrates have been used to deposite $(Ba_{0.5}Sr_{0.5})TiO_3$ ferroelectric thin films by RF magnetron sputtering. The BST thin films deposited on the single crystal (100)MgO substrates have high tunability and low dielectric loss. These results are caused by a low misfit between the lattice parameters of the BST films and the substrate. The BST films deposited on r-plane sapphire have relatively high misfit, and the tunability of 17% and dielectric loss of 0.0007. To improve the dielectric properties of the BST films, the post-annealing methods has been introduced. The BST films deposited on (100)MgO, (1102)r-plane sapphire, and poly-crystalline sapphire substrates have best properties in post-annealing conditions of $1050^{\circ}C$, $1100^{\circ}C$, and $1150^{\circ}C$, respectively. The different optimal post-annealing conditions have been found according to the different misfits between the films and substrates, and thermal expansion coefficients. Moreover, the films deposited on alumina substrate which is relatively cheap have a good tunability properties of 23% by the post-annealing.

Preparation and Characterization of Glass-ceramics in MgO-${Al_2}{O_3}$-$SiO_2$ Glass (MgO-${Al_2}{O_3}$-$SiO_2$계 결정화유리의 제조 및 물성평가)

  • 손성범;최세영
    • Journal of the Korean Ceramic Society
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    • v.37 no.6
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    • pp.604-611
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    • 2000
  • Glass-ceramics containing a cordierite (2MgO-2Al2O3-5SiO2) as a main crystal phase was prepared from MgO-Al2O3-SiO2 system glass through a controlled 2-step heat treatment for the application to magnetic memory disk substrate for higher storage capacity. Parent glasses prepared with addition of CeO2 as a fulx and TiO2 as a nucleating agent were crystallized by a 2-step heat treatment i.e. nucleation and crystal grwoth. Then the maximum nucleation and crystal growth rates were investigated and several properties such as bending strength, surface hardness and surface roughness were also studied for heat treated glass. As a result, only a $\alpha$-cordierite was precipitated as a main crystal phase for all heat treatment conditions and the maximum nucleation and crystal growth rates were 2.4$\times$109/㎣.hr at 80$0^{\circ}C$ and 0.3${\mu}{\textrm}{m}$/hr at 915$^{\circ}C$ respectively. After being nucleated at 80$0^{\circ}C$ for 5 hours and then crystallized at 915$^{\circ}C$ for 1 hour, the heat treated glass had a crystal volume fraction of 17.6% and crystal size fo 0.3${\mu}{\textrm}{m}$, and showed the optimum properties for the application to magnetic memory disk substrates as follows. ; Bending strength of 192 MPa, Vidkers hardness of 642.1kgf/$\textrm{mm}^2$, and surface roughness of 27$\AA$.

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Development of Surface Acoustic Wave Biosensor Using Epitaxial Lift-Off(ELO) Technology (ELO 기술을 이용한 표면 탄성파 바이오 센서의 개발)

  • 김기범;정우석;권대규;김남균;홍철운
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.447-449
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    • 2004
  • The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.

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Joining of Presureless Sintered SiC Ceramics using $MgO-Al_2O_3-SiO_2$ System ($MgO-Al_2O_3-SiO_2$계를이용한 상압소결 SiC의 접합)

  • 이홍림;남서우;한봉석;박병학;한동빈
    • Journal of the Korean Ceramic Society
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    • v.34 no.7
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    • pp.781-789
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    • 1997
  • Pressure sintered SiC specimens were joined using MgO-Al2O3-SiO2 (MAS) glass which has a thermal expansion coefficient similar to that of SiC. MAS melt showed excellent behavior of wetting on the SiC substrate over 148$0^{\circ}C$, and the wettability was much influenced by the joining atmosphere. The joining was conducted at 150$0^{\circ}C$ for 30 min in Ar atmosphere. The flexural strength of the joined specimen shows 342~380 MPa up to 80$0^{\circ}C$, which is almost the same as that of as-recieved SiC specimen. However, the flexural strength of the joined specimen decreased to about 80 MPa at 90$0^{\circ}C$ due to softening of the glass melt. The analyses od XRD and WDS show that the reaction between the SiC specimen and the MAS melt produces the oxycarbide glass, which had a high strength and a good stability at high temperatures.

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