• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.1-5
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• 2000

As the semiconductor devices are miniaturized, the number of the unit cleaning processes increases. In order to processes by conventional RCA cleaning process, the consumption of volume of liquid chemical and DI water became huge. Therefore, the problem of environmental issues are evolved by the increased consumption of chemicals. To resolve this matter, an advanced cleaning process by Electrolyzed Water was studied in this work. The electrolyzed water was made by an electrolysis equipment which was composed of three chambers of anode, cathode, and middle chambers. In the case of electrolyzed water with electrolytes in the middle chamber, oxidatively acidic water of anode and reductively alkaline water of cathode were obtained. The oxidation/reduction potentials and pH of anode water and cathode water were measured to be +l000mV and 4.8, and -530mV and 6.3, respectively. The Si-wafers contaminated with metallic impurities were cleaning with the electrolyzed water. To analysis the amounts of metallic impurities on Si-water surfaces, ICP-MS(Inductively Coupled Plasma-Mass spectrometer) was introduced. From results of ICP-MS measurements, it was concluded that the ability of electrolyzed water was equivalent to that of the conventional RCA cleaning.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.11a
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• pp.271-274
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• 1998

Metallic ferromagnet LA$_{1-x}$ Sr$_{x}$MnO$_3$ has received considerable attentions because of its metallic conductivity and giant magnetic resistivity. It is generally believed that layered perovskite SrO(LA$_{1-x}$ Sr$_{x}$MnO$_3$)$_{n}$ phase is insulating and shows no metallic transition. But recent report revealed that some single crystal SrO(LA$_{1-x}$ Sr$_{x}$MnO$_3$)$_{n}$ phase showed MR effect. In this study, layered perovskite SrO(LA$_{1-x}$ Sr$_{x}$MnO$_3$)$_2$ Phases were synthesized by solid state reaction at 140$0^{\circ}C$ in air atmosphere, for wide range of x and their phases were confirmed by X-ray diffraction. Electrical and magnetic properties were measured down to 10K and the possibility of MR effects was investigated.as investigated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.6 s.249
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• pp.653-661
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• 2006

Metallic sandwich plates with various inner cores have important new features with not only ultra-light material characteristics and load bearing function but also multifunctional characteristics. Because of production possibility on the large scale and a good geometric precision, sandwich plates with inner dimpled shell structure from a single material have advantages as compared with other solid sandwich plates. Inner dimpled shell structures can be fabricated with press or roll forming process, and then bonded with two face sheets by multi-point resistance welding or adhesive bonding. Elasto-plastic bending behavior of sandwich plates have been predicted analytically and measured. The measurements have shown that elastic perfectly plastic approximation can be conveniently employed with less than 10% error in elastic stiffness, collapse load, and energy absorption. The dominant collapse modes are face buckling and bonding failure after yielding. Sandwich plates with inner dimpled shell structure can absorb more energy than other types of sandwich plates during the bending behavior.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.2
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• pp.131-136
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• 2000

We have investigated the slurry induced metallic contaminations of undoped and doped silicate oxides surface on CMP cleaning process. The metallic contaminations by CMP slurry were evaluated in four different oxide films, such as plasma enhanced tetra-ethyl-orthyo-silicate glass(PE-TEOS), O3 boro-phos-pho-silicate glass(O3-BPSG), PE-BPSG, and phospho-silicate glass(PSG). All films were polished with KOH-based slurry prior to entering the post-CMP cleaner. The Total X-Ray fluorescence(TXRF) measurements showed that all oxide surfaces are heavily contaminated by potassium and calcium during polishing which is due to a CMP slurry. The polished O3-BPSG films presented higher potassium and calcium contaminations compared to PE-TEOS because of a mobile ions gettering ability of phosphorus. For PSG oxides, the slurry induced mobile ion contamination increased with an increase of phosphorus contents. In addition, the polishing removal rate of PSG oxides had a linear relationship as a function of phosphorus contents.

• Transactions of Materials Processing
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• v.23 no.5
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• pp.303-310
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• 2014

Functionally graded properties are characterized by the gradual variation in composition and structure through the volume of the material, resulting in corresponding gradation in properties of the material. Direct laser melting (DLM) is a prototyping process whereby a 3-D part is built layer-wise by melting metal powder with laser scanning. Studies have been performed on the functionally graded properties induced by direct laser melting of compositionally selected metallic powders. For the current study, quadrangle structures were fabricated by DLM using Fe-Ni-Cr powders having variable compositions. Hardness and EDX analysis were conducted on cross-sections of the fabricated structure to characterize the properties. From the analysis, it is shown that functionally graded properties can be successfully obtained by DLM of selected metallic powders with varying compositions.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2003.11a
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• pp.689-695
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• 2003

Electrochemical decontamination process has been applied for recycle or self disposal with authorization of large amount of metallic wastes contaminated with uranium compounds such as $UO_2$, ammonium uranyl carbonate (AUC), ammonium di-uranate (ADU), and uranyl nitrate(UN) with tributylphosphate(TBP) and dodecane, which are generated by dismantling the contaminated system components and equipment of a retired uranium conversion plant in Korea Atomic Energy Research Institute (KAERI). Electrochemical decontamination for metallic wastes contaminated with uranium compounds was evaluated through the experiments on the electrolytic dissolution of stainless steel as the material of the system components in neutral salt electrolytes. The effects of type of neutral salt as the electrolyte, current density, and concentration of electrolyte on the dissolution of the materials were evaluated. Decontamination performance tests using the specimens taken from a uranium conversion plant were quite successful with the application electrochemical decontamination conditions obtained through the basic studies on the electrolytic dissolution of structural material of the system components.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.127-136
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• 2006

Metallic sandwich plates with inner dimpled shell subject to 3-point bending have been analyzed and then optimized for minimum weight. Inner dimpled shells can be easily fabricated by press or roll with high precision and bonded with same material skin sheets by resistance welding or adhesive bonding. Metallic sandwich plates with inner dimpled shell structure can be optimally designed for minimum weight subject to prescribed combination of bending and transverse shear loads. Fundamental findings for lightweight design are presented through constrained optimization. Failure responses of sandwich plates are predicted and formulated with an assumption of narrow sandwich beam theory. Failure is attributed to four kinds of mechanisms: face yielding, face buckling, dimple buckling and dimple collapse. Optimized shape of inner dimpled shell structure is a hemispherical shell to minimize weight without failure. It is demonstrated that bending stiffness of sandwich plate is 2 or 3 times larger than solid plates with the same strength. Failure mode boundaries and iso-strength lines dependent upon the geometry and yield strain of the material are plotted with respect to geometric parameters on the failure map. Because optimal parameters of maximum strength for given material weight can be selected from the map, analytic solutions for maximum strength are expressed as a function of only material property and proposed strength. These optimal parameters match well with numerical optimal parameters.

• Journal of the Korean Society for Nondestructive Testing
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• v.10 no.2
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• pp.38-42
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• 1990

The specific strength of the fiber reinforced composite material is closely related to the anisotropy of the material. For the quantitative characterization of the anisotropy in the composite material, applied was CODF concept which was extensively used in the metallic material. As the results, the anisotropy of the material could be quantitatively analysed from the measurement of the phase velocities of the angular dependent $SH_o$ waves.

• Journal of the Korean institute of surface engineering
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• v.30 no.5
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• pp.347-354
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• 1997

Composite plating is a method of co-depositing fine particles of metallic, non-metallic compound or polymers in the plated layer to improve material properties such as were-resistance, lubrication, or corrosion resistance. Graded Ni-Sic composite coating were produced in this research. Prior to produce Graded Ni-SiC composite coatings, effects of particle size, particle content, pH of electrolyte, temperature, current density, stirring rate on the amount of SiC deposited in the Ni layer were investigated. By manipulating current density and plating time properties of these coating were evaluated by micro-indentation hardness test.

• Korean Journal of Materials Research
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• v.16 no.10
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• pp.639-646
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• 2006

Over the last two decades, microbiologically influenced corrosion (MIC) of metallic materials has received considerable attention due to its serious effects on industrial field. In this context, it is important to devise control methods which inhibit biofilm formation on various metallic compounds and are compatible with environment. It was change of various conditions (duty cycle, current density, $AgNO_3$ concentration and pH) for injection of Ag particles in anodized Aluminum alloy pore using pulsed current. Optimal condition was obtained by means of FE-SEM, ICP analysis etc. The antibacterial metal's specimen were manufactured under optimal condition and this specimen were tested the antibacterial characterization and anticorrosion characterization. In result of test, we can confirmed that the antibacterial characterization and anticorrosion characterization of the specimens of injected Ag particles in anodized Aluminum alloy pore using pulsed current were better than the anodized Aluminum alloy specimens.