Role of Hf in amorphous oxide thin film transistors fabricated by rf-magnetron sputtering (스퍼터링 공정으로 제작된 비정질 산화물 박막트랜지스터의 하프늄 금속이온 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2010.06a
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- pp.12-12
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- 2010