• 한국세라믹학회지
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• 제38권10호
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• pp.871-875
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• 2001

Cobalt silicidation at sidewall spacer edge of Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) with post annealing treatment for capacitor forming process has been investigated as a function of dopant species. Cobalt silicidation of nMOSFET with n-type Lightly Doped Drain (LDD) and pMOSFET with p-type LDD produces a well-developed cobalt silicide with its lateral growth underneath the sidewall spacer. In case of pMOSFET with n-type LDD, however, a void is formed at the sidewall spacer edge with no lateral growth of cobalt silicide. The void formation seems to be due to a retarded silicidation process at the LDD region during the first Rapid Thermal Annealing (RTA) for the reaction of Co with Si, resulting in cobalt mono silicide at the LDD region. The subsequent second RTA converts the cobalt monosilicide into cobalt disilicide with the consumption of Si atoms from the Si substrate, producing the void at the sidewall spacer edge in the Si region. The void formed at the sidewall spacer edge serves as a resistance in the current-voltage characteristics of the pMOSFET device.

• Journal of Mechanical Science and Technology
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• 제20권9호
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• pp.1514-1524
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• 2006

This work presents the three-dimensional analysis of flow and heat transfer performed for a wire-wrapped fuel assembly of liquid metal reactor using Reynolds-averaged Wavier-Stokes analysis in conjunction with 557 model as a turbulence closure. The whole fuel assembly has been analyzed for one period of the wire-spacer using periodic boundary conditions at inlet and outlet of the calculation domain. Three different assemblies, two 7-pin wire-spacer fuel assemblies and one bare rod bundle, apart from the pressure drop calculations for a 19-pin case, have been analyzed. Individual as well as a comparative analysis of the flow field and heat transfer have been discussed. Also, discussed is the position of hot spots observed in the wire-spacer fuel assembly. The flow field in the subchannels of a bare rod bundle and a wire-spacer fuel assembly is found to be different. A directional temperature gradient is found to exist in the subchannels of a wire-spacer fuel assembly Local Nusselt number in the subchannels of wire-spacer fuel assemblies is found to vary according to the wire-wrap position while in case of bare rod bundle, it's found to be constant.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2005년도 연구개발 발표회 논문집
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• pp.240-243
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• 2005

This study deals with the shape optimization of a wire spacer fuel assembly of Liquid Metal Reactors (LMRs). The Response Surface based optimization Method is used as an optimization technique with the Reynolds-averaged Navier-Stokes analysis of fluid flow and heat transfer using Shear Stress Transport (SST) turbulence model as a turbulence closure. Two design variables namely, pitch to fuel rod diameter ratio and lead length to fuel rod diameter ratio are selected. The objective function is defined as a combination of the heat transfer rate and the inverse of friction loss with a weighting factor. Three level full-factorial method is used to determine the training points. In total, nine experiments have been performed numerically and the resulting datas have been analysed for optimization study. Also, a comparison has been made between the optimized surface and the reference one in this study.

• Journal of Korean Vacuum Science & Technology
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• 제6권2호
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• pp.76-78
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• 2002

We have carried out the first-principle electronic structure calculations to investigate the spacer layer formation of Fe/Si multilayered films (MLF) and compared with the results obtained by optical spectroscopy. The computer-simulated spectra based on various structural models of MLF showed that neither FeSi$_2$ nor B2O-phase FeSi, which are semiconducting, could be considered as the spacer layers in the Fe/Si MLF for the strong antiferromagnetic coupling. The optical properties of the spacer extracted from the effective optical response of the MLF strongly support its metallic nature. The optical conductivity spectra of various phases of Fe-Si compounds were calculated and compared with the extracted optical properties of the spacer. From the above theoretical investigations it is concluded that a E2-phase metallic FeSi compound is spontaneously formed at the interfaces during deposition.

• 한국표면공학회지
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• 제40권4호
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• pp.197-202
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• 2007

Fit of the restoration and its cementation procedure is crucial to both its short and long term prognosis. Marginal fit is affected by many variables during the fabrication process. These variables, being intrinsic properties of the materials or the clinical technique used, can cause changes in the size and shape of the definitive restoration. Even if all variables are controlled carefully, the seating of a restoration can still be affected due to insufficient space for the luting agent. The use of die spacer can reduce the elevation of a cast restoration of a prepared tooth, decreased seating time, improve the outflow of excess cement, and lower the seating forces. The purpose of this study was to evaluate the marginal fidelity according to die spacer application times and measurement site. Casting alloys were prepared and fabricated using non-precious metal at $950^{\circ}C$. Specimens are divided into four groups: I(die spacer painted casting for wax pattern), II(die spacer non painted casting for wax pattern). The specimens were cut and polished for marginal gap observation. The marginal gap was observed using scanning electron microscopy (SEM).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.174-174
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• 2000

A strong antiferromagnetic coupling in Fe/Si multilayered films (MLF) had been recently discovered and much consideration has been given to whether the coupling in the Fe/Si MLF system has the same origin as the metal/metal MLF. Nevertheless, the nature of the interfacial ron silicide is still controversial. On one hand, a metal/ semiconductor structure was suggested with a narrow band-gap semiconducting $\varepsilon$-FeSi spacer that mediates the coupling. However, some features show that the nature of coupling can be well understood in terms of the conventional metal/metal multilayered system. It is well known that both magneto-optical (MO) and optical properties of a metal depend strongly on their electronic structure that is also correlated with the atomic and chemical ordering. In this study, the nature of the interfacial regions is the Fe/Si multilayers has been investigated by the experimental and computer-simulated MO and optical spectroscopies. The Fe/Si MLF were prepared by rf-sputtering onto glass substrates at room temperature with the number of repetition N=50. The thickness of Fe sublayer was fixed at 3.0nm while the Si sublayer thickness was varied from 1.0 to 2.0 nm. The topmost layer of all the Fe/Si MLF is Fe. In order to carry out the computer simulations, the information on the MO and optical parameters of the materials that may constitute a real multilayered structure should be known in advance. For this purpose, we also prepared Fe, Si, FeSi2 and FeSi samples. The structural characterization of Fe/Si MLF was performed by low- and high -angle x-ray diffraction with a Cu-K$\alpha$ radiation and by transmission electron microscopy. A bulk $\varepsilon$-FeSi was also investigated. The MO and optical properties were measured at room temperature in the 1.0-4.7 eV energy range. The theoretical simulations of MO and optical properties for the Fe/Si MLF were performed by solving exactly a multireflection problem using the scattering matrix approach assuming various stoichiometries of a nonmagnetic spacer separating the antiferromagnetically coupled Fe layers. The simulated spectra of a model structure of FeSi2 or $\varepsilon$-FeSi as the spacer turned out to fail in explaining the experimental spectra of the Fe/Si MLF in both intensity and shape. Thus, the decisive disagreement between experimental and simulated MO and optical properties ruled out the hypothesis of FeSi2 and $\varepsilon$-FeSi as the nonmagnetic spacer. By supposing the spontaneous formation of a metallic ζ-FeSi, a reasonable agreement between experimental and simulated MO and optical spectra was obtained.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.436-437
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• 2012

Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2004년도 유체기계 연구개발 발표회 논문집
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• pp.473-478
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• 2004

This work presents the Thermal Hydraulic analysis has been performed for a 19-pin wire-spacer fuel assembly using three-dimensional Reynolds-averaged Navier-Stokes equations. SST model is used as a turbulence closure. The whole fuel assembly has been analyzed for one period of the wire-spacer using periodic boundary condition at inlet and outlet of the calculation domain. The overall results far a preliminary calculation show a good agreement with the experimental observations. It has been found that the major unidirectional flows are the axial velocity in sub-channels and the peripheral sweeping flows and the velocities are found to be following a cyclic path of period equal to the wire-wrap pitch. The temperature is found to be maximum in the central region and also, there exist a radial temperature gradient between the fuel rods. The major advantage of performing this kind of analysis is the prediction of thermal-hydraulic behavior of a fuel assembly with much ease.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.207-208
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• 2007

Epoxy resin insulators show a lot of advantages for electrical power apparatus. Because epoxy resin provide electrical and mechanical characteristic which is excellent, it is desirable to apply epoxy resin as a spacer and post insulation in Gas Insulated Switchgear (GIS). In this study, we have investigated the influence of surface electric field attached particle contaminated spacer surfaces under SF6 gas. Also, we performed analysis of electric field. As a result, when the particle was attached on spacer, we found out a surface electric field of characteristics.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1638-1640
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• 2003

In the recent years, UHF PD measuring technique for detecting partial discharges was proved the effective method for Gas Insulated Switchgear (GIS). However, in case of GIS with a metal flange around insulating spacer, UHF PD measurement using typical external UHF PD sensor is difficult. In this paper, a novel hole-type UHF PD sensor based on Archimedean spiral antenna theory has been proposed and realized. All spacers with metal flange have small hole in order to inject epoxy. Using the novel hole-type UHF PD sensor, it makes detection possible to PD signal that are emitted through the epoxy injection hole. Additionally, the measuring characteristic of UHF PD signals from several artificial defects in GIS and the novel ${\Phi}$-f-q pattern analysis technology are discussed.