• Journal of the Korean Vacuum Society
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• v.9 no.2
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• pp.99-101
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• 2000

The fabrication of the submicron size hole has been interesting due to the potential application of the near field optical sensor or liquid metal ion source. The 2 micron size dot array was photolithographically patterned. After formation of the V-groove shape by anisotropic KOH etching, dry oxidation at $1000^{\circ}C$ for 600 minutes was followed. In this procedure, the orientation dependent oxide growth was performed to have an etch-mask for dry etching. The reactive ion etching by the inductively coupled plasma (ICP) system was performed in order to etch ~90 nm $SiO_2$ layer at the bottom of the V-groove and to etch the Si at the bottom. The negative ion energy would enhance the anisotropic etching by the $Cl_2$ gas. After etching, the remaining thickness of the oxide on the Si(111) surface was measured to be ~130 nm by scanning electron microscopy. The etched Si aperture can be used for NSOM sensor.

• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2079-2081
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• 2003

현재 산업화 사회가 가속됨에 따라 인체에 유해한 물질들이 발생한다. 그 중에서 VOC(Volatile Organic Component)는 인체에 치명적인 해를 일으키는 물질이다. 본 논문은 MOS(Metal Oxide Semiconductor) 센서를 이용하여 인체에 치명적인 유해 물질인 VOC를 측정하였다. 현재 VOC의 측정은 GC(Gas Chromatograph)를 이용하는데 이는 측정 시간이 길며 숙련된 측정자에 의해서만 측정이 가능하고 그 분석이 가능하다. 그러나 MOS 센서를 이용하면 숙련되지 않은 측정자도 측정이 가능하며 인공신경망을 이용하여 그 분석을 함으로서 누구나 쉽게 분석이 가능하고 실시간으로 측정이 가능하다.

• Food Science and Preservation
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• v.12 no.4
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• pp.361-366
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• 2005

An electronic nose equipped with metal oxide sensor(MOS) was used for investigating the quality of reconstitute orange juice added different recoverable oil(cold pressed valencia oil) contents during 21 days of storage at $4^{\circ}C$. Quality changes in orange juice was described in terms of the sensitivity(${\Delta}R_{gas}/R_{air}$) of the sensors. Principal component analysis(PCA) was carried out using data obtained from twelve metal oxide sensors. The flavor of orange juice contained with the different recoverable oil contents($0.01\%{\sim}0.05\%$) was separated in PCA plot, in which the first principal component score was correlated with the content of recoverable oil. As storage periods prolonged, no significantly different sensitivity score of orange juice was observed in electronic nose. The content of recoverable oil in orange juice was reduced rapidly within 14 days, and then the decreasing ratio was slow on the next 7 days during storage at $4^{\circ}C$. The sensory score for overall and orange flavor of orange juice added $0.03\%$ recoverable oil was decreased during the 14 days and then rapidly dropped next 7 days of storage at $4^{\circ}C$.

• Journal of the Korean Electrochemical Society
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• v.2 no.3
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• pp.130-133
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• 1999

In this work, a capacitance-type alcohol gas sensor using porous silicon layer is developed to apply for breath alcohol measurement and its characteristics are estimated at room temperature. Current alcohol sensors using metal oxides such as tin-oxide are not only difficult to measure low alcohol concentration, but also should heat at $200\;to\;400^{\circ}C$ to improve the sensitivity. But the sensor using porous silicon layer has good sensitivity even at room temperature by very large effective surface area and suitable structure to fabricate integrated micro sensors. In the experiment, the capacitance was measured for the range of 0 to $0.5\%$ alcohol concentration with the interval of $0.05\%$, in which alcohol solution was kept at 25, 36, and $45^{\circ}C$ by a heater. As the result, good linearity was observed and the capacitance increased about 1.1, 2.6 and $4.6\%$ per the increment of $0.1\%$ alcohol concentration each temperature, respectively, at the frequency of 120 Hz.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.8 s.350
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• pp.13-18
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• 2006

[ $SnO_2$ ] and ZnO nanostructures were grown on the surface of thin film by heat treatment of metal Sn, Zn under Ar gas flow and $O_2$ at atmospheric pressure, respectively. The sensitivity of the $SnO_2$ thin film device on which grown nanowires to CO gas(5,000 ppm) was 50 % at the operating temperature of $200^{\circ}C$. In case of using Pt as catalysts, the sensitivity was enhanced and operating temperature was reduced(73 % at $150^{\circ}C$ ). The sensitivity of the ZnO nanorods device using Cu as catalysts to NOx gas was 90 % at the operating temperature of $200^{\circ}C$. It was found that the sensitivity to CO and NOx gases for the device on which grown nanostructures was much higher than those for general thin film device.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.222-222
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• 2012

Metal oxide gas sensors based on semiconductor type have attracted a great deal of attention due to their low cost, flexible production and simple usability. However, most works have been focused on n-type oxides, while the characteristics of p-type oxide gas sensors have been barely studied. An investigation on p-type oxides is very important in that the use of them makes possible the novel sensors such as p-n diode and tandem devices. Monoclinic cupric oxide (CuO) is p-type semiconductor with narrow band gap (~1.2 eV). This is composed of abundant, nontoxic elements on earth, and thus low-cost, environment-friendly devices can be realized. However, gas sensing properties of neat CuO were rarely explored and the mechanism still remains unclear. In this work, the neat CuO layers with highly ordered mesoporous structures were prepared by a template-free, one-pot solution-based method using novel ink solutions, formulated with copper formate tetrahydrate, hexylamine and ethyl cellulose. The shear viscosity of the formulated solutions was 5.79 Pa s at a shear rate of 1 s-1. The solutions were coated on SiO2/Si substrates by spin-coating (ink) and calcined for 1 h at the temperature of $200{\sim}600^{\circ}C$ in air. The surface and cross-sectional morphologies of the formed CuO layers were observed by a focused ion beam scanning electron microscopy (FIB-SEM) and porosity was determined by image analysis using simple computer-programming. XRD analysis showed phase evolutions of the layers, depending on the calcination temperature, and thermal decompositions of the neat precursor and the formulated ink were investigated by TGA and DSC. As a result, the formation of the porous structures was attributed to the vaporization of ethyl cellulose contained in the solutions. Mesoporous CuO, formed with the ink solution, consisted of grains and pores with nano-meter size. All of them were strongly dependent on calcination temperature. Sensing properties toward H2 and C2H5OH gases were examined as a function of operating temperature. High and fast responses toward H2 and C2H5OH gases were discussed in terms of crystallinity, nonstoichiometry and morphological factors such as porosity, grain size and surface-to-volume ratio. To our knowledge, the responses toward H2 and C2H5OH gases of these CuO gas sensors are comparable to previously reported values.

• Journal of Sensor Science and Technology
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• v.23 no.5
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• pp.337-341
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• 2014

For various additives doped-$VO_2$ critical temperature sensors using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were systematically investigated. As a starting material of $VO_2$ sensor, vanadium pentoxide ($V_2O_5$) powders were used, and CaO, SrO, $Bi_2O_3$, $TiO_2$, and PbO dopants were used, respectively. The $V_2O_5$ powders with dopants were mixed with a vehicle to form paste. This paste was silk screen-printed on $Al_2O_3$ substrates and then $V_2O_5$-based thick films were heat-treated at $500^{\circ}C$ for 2 hours in $N_2$ gas atmosphere for the reduction to $VO_2$. From X-ray diffraction analysis, $VO_2$ phases for pure $VO_2$, and CaO and SrO-doped $VO_2$ thick films were confirmed and their grain sizes were 0.57 to $0.59{\mu}m$. The on/off resistance ratio of the $VO_2$ sensor in phase transition temperature range was $5.3{\times}10^3$ and that of the 0.5 wt.% CaO-doped $VO_2$ sensor was $5.46{\times}10^3$. The presented critical temperature sensors could be commercialized for fire-protection and control systems.

• Journal of Sensor Science and Technology
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• v.11 no.2
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• pp.77-83
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• 2002

In order to get low cost and portability, semiconductor gas sensor need to have low operating temperature and high sensitivity. $Fe_2O_3$ based sensors which were doped with metal oxide catalysts($MoO_3$, $V_2O_5$, $TiO_2$, and CdO) were fabricated by screen printing method. To improve electrical stability of sensors, the $Fe_2O_3$ sensors were annealed in $N_2$ at $700^{\circ}C$ for 2 hours. The $V_2O_5$ doped $Fe_2O_3$ sensor showed about $80{\sim}90%$ sensitivity at alcohol 1,000 ppm and have good selectivity to hydrocarbon gas and tobacco odors. The fabricated sensor and PIC-chip were employed for portable alarm system.

• Food Science of Animal Resources
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• v.30 no.2
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• pp.313-320
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• 2010

The purpose of this study was to evaluate the freshness of chicken meat during 19 d of storage at $4^{\circ}C$ using a portable electronic nose. The portable system consisted of six different metal oxide sensors and a moisture sensor. Determination of volatile compounds with gas chromatography-mass spectrometry, total bacterial count (TBC), and 2-thiobarbituric acid reactive substances (TBARS) monitored the quality change of the samples. These results were compared with the results measured by the electronic nose system. TBC and TBARS measurements could be separated into five groups and seven groups, respectively, among ten groups. According to principal component analysis and linear discriminant analysis with the signals of the portable electronic nose, the sample groups could be clearly separated into eight groups and nine groups, respectively, among ten groups. The portable electronic nose demonstrated potential for evaluating freshness of stored chicken.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.5
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• pp.222-227
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• 2018

$Zn_{1-x}Co_x$ Zeolitic Imidazolate Framework (ZIF) (x = 0~0.05) were prepared by the co-precipitation of $Zn^{2+}$ and $Co^{2+}$ using 2-methylimidazole, which were converted into pure and Co-doped ZnO nanoparticles by heat treatment at $600^{\circ}C$ for 2 h. Homogeneous Zn/Co ZIFs were achieved at x < 0.05 owing to the strong coordination of the imidazole linker to $Zn^{2+}$ and $Co^{2+}$, facilitating atomic-scale doping of Co into ZnO via annealing. By contrast, heterogeneous Zn/Co ZIFs were formed at $x{\geq}0.05$, resulting in the formation of $Co_3O_4$ second phase. To investigate the potential as high-performance gas sensors, the gas sensing characteristics of pure and Co-doped ZnO nanoparticles were evaluated. The sensor using 3 at% Co-doped ZnO exhibited an unprecedentedly high response and selectivity to trimethylamine, whereas pure ZnO nanoparticles did not. The facile, bimetallic ZIF derived synthesis of doped-metal oxide nanoparticles can be used to design high-performance gas sensors.