• Title/Summary/Keyword: Metal grid

Search Result 130, Processing Time 0.03 seconds

Single-step 전자빔 묘화 장치를 이용한 Focusing Grating Coupler 제작 연구 (Fabrication technology of the focusing grating coupler using single-step electron beam lithography)

  • 김태엽;김약연;손영준;한기평;백문철;김해성;신동훈;이진구
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
    • /
    • pp.976-979
    • /
    • 2002
  • A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control' writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm), To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and $0.5{\times}0.5mm^2$ area, respectively, This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolpution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

  • PDF

Fabrication Technology of the Focusing Grating Coupler using Single-step Electron Beam Lithography

  • Kim, Tae-Youb;Kim, Yark-Yeon;Han, Gee-Pyeong;Paek, Mun-Cheol;Kim, Hae-Sung;Lim, Byeong-Ok;Kim, Sung-Chan;Shin, Dong-Hoon;Rhee, Jin-Koo
    • Transactions on Electrical and Electronic Materials
    • /
    • 제3권1호
    • /
    • pp.30-37
    • /
    • 2002
  • A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control'writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 $\times$ 0.5 mm$^2$area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

Two 3D CdII and ZnII Complexes Based on Flexible Dicarboxylate Ligand and Nitrogen-containing Pillar: Synthesis, Structure, and Luminescent Properties

  • Liu, Liu;Fan, Yan-Hua;Wu, Lan-Zhi;Zhang, Huai-Min;Yang, Li-Rong
    • Bulletin of the Korean Chemical Society
    • /
    • 제34권12호
    • /
    • pp.3749-3754
    • /
    • 2013
  • Two 3D isomorphous and isostructural complexes, namely, $[Zn(BDOA)(bpy)(H_2O)_2]_n$ (1) and $[Cd(BDOA)-(bpy)(H_2O)_2]_n$ (2); (BDOA = Benzene-1,4-dioxyacetic acid, bpy = 4,4'-bipyridine) were synthesized under hydrothermal conditions and characterized by means of elemental analyses, thermogravimetric (TG), infrared spectrometry, and single crystal X-ray diffraction. Complexes 1 and 2 crystallize in the triclinic system, space group P-1 and each metal ion in the complexes are six-coordinated with the same coordination environment. In the as-synthesized complexes, $BDOA^{2-}$ anions link central metal ions to form a 1D zigzag chain $[-BDOA^{2-}-Zn(Cd)-BDOA^{2-}-Zn(Cd)-]_{\infty}$, whereas bpy pillars connect metal ions to generate a 1D linear chain $[-bpy-Zn(Cd)-bpy-Zn(Cd)-]_{\infty}$. Both infinite chains are interweaved into 2D grid-like layers which are further constructed into a 3D open framework, where hydrogen bonds play as the bridges between the adjacent 2D layers. Luminescent properties of complex 1 showed selectivity for $Hg^{2+}$ ion.

보일러 내부 고온가스에 노출된 전열 튜브에서의 열유속 평가 방법 (Estimation method of heat flux at tube bank exposed to high temperature flue gas in large scale coal fired boilers)

  • 정재진;송정일
    • 한국태양에너지학회:학술대회논문집
    • /
    • 한국태양에너지학회 2009년도 추계학술발표대회 논문집
    • /
    • pp.259-264
    • /
    • 2009
  • Most of the fossil power plants firing lower grade coals are challenged with maintaining good combustion conditions while maximizing generation and minimizing emissions. In many cases significant derate, availability losses and increase in unburned carbon levels can be attributed to poor combustion conditions as a result of poorly controlled local fuel and air distribution within the boiler furnace. The poor combustion conditions are directly related to the gas flow deviation in upper furnace and convection tube-bank but a less reported issue related to in large-scale oppose wall fired boilers. In order to develop a on-line combustion monitoring system and suggest an alternative heat flux estimation method at tube bank, which is very useful information for boiler design tool and blower optimizing system, field test was conducted at operating power boiler. During the field test the exhaust gases' temperature and tube metal temperature were monitored by using a spatially distributed sensors grid which located in the boiler's high temperature vestibule region. At these locations. the flue gas flow is still significantly stratified, and air in-leakage is minimal which enables tracing of poor combustion zones to specific burners and over-fire air ports. Test results showed that the flue gas monitoring method is more proper than metal temperature distribution monitoring for real time combustion monitoring because tube metal temp. distribution monitoring method is related to so many variables such as flue gas, internal flow unbalance, spray etc., Heat flux estimation at the tube bank with flue gas temp. and metal temp. data can be alternative method when tube drilling type sensor can't able to use.

  • PDF

The a-Si:H/poly-Si Heterojunction Solar Cells

  • Kim, Sang-Su;Kim, do-Young;Lim, Dong-Gun;Junsin Yi;Lee, Jae-Choon;Lim, Koeng-Su
    • Journal of Electrical Engineering and information Science
    • /
    • 제2권5호
    • /
    • pp.65-71
    • /
    • 1997
  • We present heterojunction solar cells with a structure of metal/a-Si:H(n-i-p)/poly-Si(n-p)/metal for the terrestrial applications. This cell consists fo two component cells: a top n-i-p junction a-Si:Hi cell with wide-bandgap 1.8eV and a bottom n-p junction poly-Si cell with narrow-bandgap 1.1eV. The efficiency influencing factors of the solar cell were investigated in terms of simulation an experiment. Three main topics of the investigated study were the bottom cell with n-p junction poly-Si, the top a-Si:H cell with n-i-p junction, and the interface layer effects of heterojunction cell. The efficiency of bottom cell was improved with a pretreatment temperature of 900$^{\circ}C$, surface polishing, emitter thickness of 0.43$\mu\textrm{m}$, top Yb metal, and grid finger shading of 7% coverage. The process optimized cell showed a conversion efficiency about 16%. Top cell was grown by suing a photo-CVD system which gave an ion damage free and good p/i-a-Si:H layer interface. The heterojunction interface effect was examined with three different surface states; a chemical passivation, thermal oxide passivation, and Yb metal. the oxide passivated cell exhibited the higher photocurrent generation and better spectral response.

  • PDF

결정질 실리콘 태양전지의 고효율 화를 위한 Selective emitter 구조 및 Ni/Cu plating 전극 구조 적용에 관한 연구 (PA study on selective emitter structure and Ni/Cu plating metallization for high efficiency crystalline silicon solar cells)

  • 김민정;이재두;이수홍
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
    • /
    • pp.91.2-91.2
    • /
    • 2010
  • The use of plated front contact for metallization of silicon solar cell may alternative technologies as a screen printed and silver paste contact. This technologies should allow the formation of contact with low contact resistivity a high line conductivity and also reduction of shading losses. The better performance of Ni/Cu contacts is attributed to the reduced series resistance due to better contact conductivity of Ni with Si and subsequent electroplating of Cu on Ni. The ability to pattern narrower grid lines for reduced light shading combined with the lower resistance of a metal silicide contact and improved conductivity of plated deposit. This improves the FF as the series resistance is deduced. This is very much required in the case of low concentrator solar cells in which the series resistance is one of the important and dominant parameter that affect the cell performance. A selective emitter structure with highly dopes regions underneath the metal contacts, is widely known to be one of the most promising high-efficiency solution in solar cell processing. This paper using selective emitter structure technique, fabricated Ni/Cu plating metallization cell with a cell efficiency of 17.19%.

  • PDF

태양전지의 저가격.고효율화를 위한 Ni/Cu/Ag 전극에 관한 연구 (The Research of Solar Cells Applying Ni/Cu/Ag Contact for Low Cost & High Efficiency)

  • 조경연;이지훈;이수홍
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
    • /
    • pp.444-445
    • /
    • 2009
  • The metallic contact system of silicon solar cell must have several properties, such as low contact resistance, easy application and good adhesion. Ni is shown to be a suitable barrier to Cu diffusion as well as desirable contact metal to silicon. Nickel monosilicide(NiSi) has been suggested as a suitable silicide due to its lower resistivity, lower sintering temperature and lower layer stress than $TiSi_2$. Copper and Silver can be plated by electro & light-induced plating method. Light-induced plating makes use the photovoltaic effect of solar cell to deposit the metal on the front contact. The cell is immersed into the electrolytic plating bath and irradiated at the front side by light source, which leads to a current density in the front side grid. Electroless plated Ni/ Electro&light-induced plated Cu/ Light-induced plated Ag contact solar cells result in an energy conversion efficiency of 16.446 % on $0.2\sim0.6\;{\Omega}{\cdot}cm$, $20\;\times\;20\;mm^2$, CZ(Czochralski) wafer.

  • PDF

전극함몰형 태양전지의 제조를 위한 레이저 scribing (Laser scribing for buried contact solar cell processing)

  • 조은철;조영현;이수홍
    • E2M - 전기 전자와 첨단 소재
    • /
    • 제9권6호
    • /
    • pp.593-599
    • /
    • 1996
  • Laser scribing of silicon plays an important role in metallization including the grid pattern and the front surface geometry which means aspect ratio of metal contacts. To make a front metal electrode of buried contact solar cell, we used ND:YAG lasers that deliver average 3-4W at TEM$\_$00/ mode power to sample stage. The Q-switched Nd:YAG laser of 1.064 gm wavelength was used for silicon scribing with 20-40.mu.m width and 20-200.mu.m depth capabilities. After silicon slag etching, the groove width and depth for buried contact solar cell are -20.mu.m and 30-50.mu.m respectively. Using MEL 40 Nd:YAG laser system, we can scribe the silicon surface with 18-23.mu.m width and 20-200.mu.m depth controlled by krypton arc lamp power, scan speed, pulse frequency and beam focusing. We fabricated a buried contact Silicon Solar Cell which had an energy conversion efficiency of 18.8 %. In this case, the groove width and depth are 20.mu.m and 50.mu.m respectively.

  • PDF

$Al_2O_3$ 박막을 이용한 MIS Inversion Layer Solar Cell의 제작 및 특성평가 (Fabrication and Properties of MIS Inversion Layer Solar Cell using $Al_2O_3$ Thin Film)

  • 김현준;변정현;김지훈;정상현;김광호
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
    • /
    • pp.242-242
    • /
    • 2010
  • 산화 알루미늄($Al_2O_3$) 박막을 p-type Czochralski(CZ) Si 위에 Remote Plasma Atomic Layer Deposition(RPALD)을 이용하여 저온 공정으로 증착하였다. Photolithography 공정으로 grid 패턴을 형성한 후 열 증착기로 알루미늄을 증착하여 MIS-IL (Metal-Insulator-Semiconductor Inversion Layer) solar cell을 제작하였다. 반응소스로는 Trimethylaluminum (TMA)과 $O_2$를 이용하였다. $Al_2O_3$ 박막의 전기적 특성 평가를 위해 MIS capacitor를 제작하여 Capacitance-voltage (C-V), Current-voltage (I-V), Interface state density ($D_{it}$)를 평가하였으며 Solar simulator를 이용하여 MIS-IL Solar cell의 Efficiency을 측정하였다.

  • PDF

Experiments and analysis of the post-buckling behaviors of aluminum alloy double layer space grids applying ball joints

  • Hiyama, Yujiro;Ishikawa, Koichiro;Kato, Shiro;Okubo, Shoji
    • Structural Engineering and Mechanics
    • /
    • 제9권3호
    • /
    • pp.289-304
    • /
    • 2000
  • This study discusses on the experimental and analytical results of the global buckling tests, carried out on aluminum alloy double layer space grids composed of tubular members, ball joints and connecting bolts at the member ends, with the purpose of demonstrating the effectiveness of a simplified analysis method using an equivalent slenderness ratio for the members. Because very few experiments have been carried out on this type of aluminum space grids, the buckling behavior is investigated experimentally over the post buckling regions using several space grid specimen with various values for the member slenderness ratio. The observed behavior duping the experiments is compared with the analytically obtained results. The comparison is made based on two different schemes; one on the plastic hinge method considering a bending moment-axial force interaction for members and the other on a method using an equivalent slenderness ratio. It is confirmed that the equivalent slenderness method can be effectively applied, even in the post buckling regions, once the effects of the rotational rigidity at the ball joints are appropriately evaluated, because the rigidity controls the buckling behavior. The effectiveness of the equivalent slenderness method will be widely utilized for estimation of the ultimate strength, even in post buckling regions for large span aluminum space grids composed of an extreme large number of nodes and members.