• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.53-53
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• 2011

As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

• The Journal of Advanced Prosthodontics
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• v.12 no.4
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• pp.181-188
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• 2020

PURPOSE. The effect of core design on the fracture resistance of zirconia-lithium disilicate (LS2) bilayered crowns for anterior teeth is evaluated by comparing with that of metal-ceramic crowns. MATERIALS AND METHODS. Forty customized titanium abutments for maxillary central incisor were prepared. Each group of 10 units was constructed using the same veneer form of designs A and B, which covered labial surface to approximately one third of the incisal and cervical palatal surface, respectively. LS2 pressed-on-zirconia (POZ) and porcelain-fused-to-metal (PFM) crowns were divided into "POZ_A," "POZ_B," "PFM_A," and "PFM_B" groups, and 6000 thermal cycles (5/55 ℃) were performed after 24 h storage in distilled water at 37 ℃. All specimens were prepared using a single type of self-adhesive resin cement. The fracture resistance was measured using a universal testing machine. Failure mode and elemental analyses of the bonding interface were performed. The data were analyzed using Welch's t-test and the Games-Howell exact test. RESULTS. The PFM_B (1376. 8 ± 93.3 N) group demonstrated significantly higher fracture strength than the PFM_A (915.8 ± 206.3 N) and POZ_B (963.8 ± 316.2 N) groups (P<.05). There was no statistically significant difference in fracture resistance between the POZ_A (1184.4 ± 319.6 N) and POZ_B groups (P>.05). Regardless of the design differences of the zirconia cores, fractures involving cores occurred in all specimens of the POZ groups. CONCLUSION. The bilayered anterior POZ crowns showed different fracture resistance and fracture pattern according to the core design compared to PFM.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.27 no.1
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• pp.8-13
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• 2016

A pattern-switchable origami antenna is designed with paper using inkjet-printing technology. The proposed antenna can be switched between loop and dipole antenna modes by folding and unfolding the paper, respectively. The proposed antenna is designed for the resonant frequencies of both modes to be 1.85 GHz. Eutectic gallium-indium liquid metal is introduced in order to avoid cracks in the conductive ink when the paper is folded. The performance of the proposed antenna is demonstrated through simulation and measurement results and antenna gain of dipole-mode and loop-mode are -4 dBi and -5 dBi, respectively. Also, the nulls of both dipole and loop modes compensate nulls from each mode.

• Korean Journal of Materials Research
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• v.23 no.10
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• pp.580-585
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• 2013

To observe the formation of defects at the interface between an oxide semiconductor and $SiO_2$, ZnO was prepared on $SiO_2$ with various oxygen gas flow rates by RF magnetron sputtering deposition. The crystallinity of ZnO depends on the characteristic of the surface of the substrate. The crystallinity of ZnO on a Si wafer increased due to the activation of ionic interactions after an annealing process, whereas that of ZnO on $SiO_2$ changed due to the various types of defects which had formed as a result of the deposition conditions and the annealing process. To observe the chemical shift to understand of defect deformations at the interface between the ZnO and $SiO_2$, the O 1s electron spectra were convoluted into three sub-peaks by a Gaussian fitting. The O 1s electron spectra consisted of three peaks as metal oxygen (at 530.5 eV), $O^{2-}$ ions in an oxygen-deficient region (at 531.66 eV) and OH bonding (at 532.5 eV). In view of the crystallinity from the peak (103) in the XRD pattern, the metal oxygen increased with a decrease in the crystallinity. However, the low FWHM (full width at half maximum) at the (103) plane caused by the high crystallinity depended on the increment of the oxygen vacancies at 531.66 eV due to the generation of $O^{2-}$ ions in the oxygen-deficient region formed by thermal activation energy.

• Design & Manufacturing
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• v.14 no.3
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• pp.44-49
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• 2020

One of display trends today is development of high pixel density. To get high PPI, a small size of pixel must be developed. RGB pixel is arranged by evaporation process which determines pixel size. Normally, a fine metal mask (FMM; Invar alloy) has been used for evaporation process and it has advantages such as good strength, and low thermal expansion coefficient at low temperature. A FMM has been manufactured by chemical etching which has limitation to controlling the pattern shape and size. One of alternative method for patterning FMM is laser micromachining. Femtosecond laser is normally considered to improve those disadvantages for laser micromachining process due to such short pulse duration. In this paper, a femtosecond laser drilling for thickness of 16 ㎛ FMM is examined. Additionally, we introduce experimental results for controlling taper angle of hole by vibration module adapted in laser system. We used Ti:Sapphire based femtosecond laser with attenuating optics, co-axial illumination, vision system, 3-axis linear stage and vibration module. By controlling vibration amplitude, entrance and exit diameters are controllable. Using vibrating objective lens, we can control taper angle when femtosecond laser hole drilling by moving focusing point. The larger amplitude of vibration we control, the smaller taper angle will be carried out.

• Nuclear Engineering and Technology
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• v.48 no.1
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• pp.55-63
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• 2016

Calculation of the core neutronic parameters is one of the key components in all nuclear reactors. In this research, the energy spectrum and spatial distribution of the neutron flux in a uranium target have been calculated. In addition, sensitivity of the core neutronic parameters in accelerator-driven subcritical advanced liquid metal reactors, such as electron beam energy ($E_e$) and source multiplication coefficient ($k_s$), has been investigated. A Monte Carlo code (MCNPX_2.6) has been used to calculate neutronic parameters such as effective multiplication coefficient ($k_{eff}$), net neutron multiplication (M), neutron yield ($Y_{n/e}$), energy constant gain ($G_0$), energy gain (G), importance of neutron source (${\varphi}^*$), axial and radial distributions of neutron flux, and power peaking factor ($P_{max}/P_{ave}$) in two axial and radial directions of the reactor core for four fuel loading patterns. According to the results, safety margin and accelerator current ($I_e$) have been decreased in the highest case of $k_s$, but G and ${\varphi}^*$ have increased by 88.9% and 21.6%, respectively. In addition, for LP1 loading pattern, with increasing $E_e$ from 100 MeV up to 1 GeV, $Y_{n/e}$ and G improved by 91.09% and 10.21%, and $I_e$ and $P_{acc}$ decreased by 91.05% and 10.57%, respectively. The results indicate that placement of the Np-Pu assemblies on the periphery allows for a consistent $k_{eff}$ because the Np-Pu assemblies experience less burn-up.

• Journal of Environmental Science International
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• v.27 no.7
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• pp.611-620
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• 2018

In this study, a metal-organic framework (MOF) material $NH_2$-MIL-101(Fe) was synthesized using the solvothermal method, and characterized by X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FT-IR), UV-visible spectrophotometry, field-emission scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDS), transmission electron microscopy (TEM), and surface area measurements. The XRD pattern of the synthesized $NH_2$-MIL-101(Fe) was similar to the previously reported patterns of MIL-101 type materials, which indicated the successful synthesis of $NH_2$-MIL-101(Fe). The FT-IR spectrum showed the molecular structure and functional groups of the synthesized $NH_2$-MIL-101(Fe). The UV-visible absorbance spectrum indicated that the synthesized material could be activated as a photocatalyst under visible light irradiation. FE-SEM and TEM images showed the formation of hexagonal microspindle structures in the synthesized $NH_2$-MIL-101(Fe). Furthermore, the EDS spectrum indicated that the synthesized material consisted of Fe, N, O, and C elements. The synthesized $NH_2$-MIL-101(Fe) was then employed as an adsorbent and photocatalyst for the removal of Indigo carmine and Rhodamine B from aqueous solutions. The initial 30 min of adsorption for Indigo carmine and Rhodamine B without light irradiation achieved removal efficiencies of 83.6% and 70.7%, respectively. The removal efficiencies thereafter gradually increased with visible light irradiation for 180 min, and the overall removal efficiencies for Indigo carmine and Rhodamine B were 94.2% and 83.5%, respectively. These results indicate that the synthesized MOF material can be effectively applied as an adsorbent and photocatalyst for the removal of dyes.

• Korean Journal of Ecology and Environment
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• v.48 no.2
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• pp.86-94
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• 2015

Chironomous is aquatic insect belonging to order Diptera, family Chironomidae. Their larval stage can be found mainly in aquatic benthic environment, hence good model organism to study environmental toxicology assessments and consider as useful bio indicators of contamination of the aquatic environment. In this study, Chironomus Heat Shock Proteins, Cytochrome 450, Glutathione S-transferase, Serine-type endopeptidase gene expressions were compared between polluted field areas (Chironomus plumosus) and under laboratory conditions (Chironomus riparious) to investigate molecular indicators for environmental contaminant stress assessment. Heavy metal (Al, Fe, Mn, Cu, Cr, Zn, Se, Pb, As, Cd) concentrations in sediments collected from three study areas exceeded the reference values. Moreover, HSPs, CYP450 and GST gene expression except SP for C. plumosus showed higher expression than C. riparious gene expression. Similar gene expression pattern was observed in C. riparious that exposed environment waters up to 96 h when compared to C. plumosus exposed to waters that grown in lab conditions. In summary, this comparative gene expression analysis in Chironomous between field and laboratory condition gave useful information to select candidate molecular indicators in heavy metal contaminations in the environment.

• Journal of Environmental Science International
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• v.30 no.1
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• pp.97-108
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• 2021

In the current study, MIL-101(Cr)-SO3H[HCl] as metal-organic frameworks (MOFs) was fabricated via a hydrothermal method. The physicochemical properties of the synthesized material were characterized using XRD, FT-IR, FE-SEM, TEM, and BET surface area analysis. The XRD diffraction pattern of the prepared MIL-101(Cr)-SO3H[HCl] was similar to previously reported patterns of MIL-101(Cr) type materials, indicating successful synthesis of MIL-101(Cr)-SO3H[HCl]. The FT-IR spectrum revealed the molecular structure and functional groups of the synthesized MIL-101(Cr)-SO3H[HCl]. FE-SEM and TEM images indicated the formation of rectangular parallelopiped structures in the prepared MIL-101(Cr)-SO3H[HCl]. Furthermore, the EDS spectrum showed that the synthesized material consisted of the elements of Cr, O, S, and C. The fabricated MIL-101(Cr)-SO3H[HCl] was then employed as an adsorbent for the removal of Sr2+ and Cs+ from aqueous solutions. The adsorption kinetics and adsorption isotherm models were studied in detail. The maximum adsorption capacities of MIL-101(Cr)-SO3H[HCl] for Sr2+ and Cs+ according to pH (3, 5.3~5.8, 10) were 35.05, 43.35, and 79.72 mg/g and 78.58, 74.58, and 169.74 mg/g, respectively. These results demonstrate the potential of the synthesized MOFs, which can be effectively applied as an adsorbent for the removal of Sr2+ and Cs+ ions from aqueous solutions and other diverse applications.

• The Journal of the Korea Contents Association
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• v.21 no.3
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• pp.602-608
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• 2021

For the comparison of bond strength between the Co-Cr alloy and ceramic, which are clinically used, test samples made with a traditional casting method as a control group), and Milling and SLM(3d printing group) samples were made as an experimental group. The metal-ceramic bond strength was measured with a universal testing machine. For the measurement, a three-point bending test was conducted. After the bond strength was measured, metal-ceramic interface was observed. According to the test result, casting group had 53.59 MPa, milling group had 45.90 MPa, and 3d printing group had 58.34 MPa. There was no statistical significance. With regard to failure pattern, most of the samples in two groups, showed mixed failure. This study showed a clinically applicable value when measuring the bond strength of alloy-ceramic material with an alloy produced by 3D printing.