• Ocean and Polar Research
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• 제25권1호
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• pp.21-30
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• 2003

Seasonal fluctuations of physico-chemical and biological aspects of the environment were studied in Vladivostok harbour (Golden Horn Bay, the East Sea/Sea of Japan). The benthic community structure was described with a focus on size-spectra (bacteria, meio- and macrofauna) related with the chemical environment and chemical fluxes in sediment and to reveal their possible ecological role in the process of bioremediation of the environment. Samples from two sites with different concentrations of heavy metals (Fe, Zn, Cu, Pb, Mn, Cr, Ni Cd, Co) and petroleum hydrocarbon were assessed by a number of methods. These included plate counts of culturable bacteria, observation through a scanning electron (SEM) and transmission electron microscope (TEM). These approaches were complemented with microscopic assessments of the diversity of the benthic community. The specific communities had a limited number of species, tolerant to abnormally high levels of toxic compounds. The dominant species were presented by several sho.1-lived small polychaetes (Capitella capitata) and nematodes (Oncholaimium ramosum). The highest population density was recorded in microbenthos, in various diatoms, various physiological groups of bacteria which participate in biomineralization: marine heterotrophic bacteria, which oxidized oil, black oil in addition to groups resistant to heavy metals. They have the entire set of mechanisms for neutralizing the negative effect of those compounds, forming the detrital food web and biogeochemical circulation of material in sediments, which results in the biological self-recycling of sea basins. Macro- and meiobenthic organisms were more sensitive to a greater extent of $H_2S$ and petroleum hydrocarbons than to metal content, but the within-site rankings were the same as those achieved for microbiological analyses.

• Journal of Welding and Joining
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• 제32권3호
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• pp.68-73
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• 2014

Among through silicon via (TSV) technologies, for replacing Cu filling method, the method of molten solder filling has been proposed to reduce filling cost and filling time. However, because Sn alloy which has a high coefficient of thermal expansion (CTE) than Cu, CTE mismatch between Si and molten solder induced higher thermal stress than Cu filling method. This thermal stress can deteriorate reliability of TSV by forming defects like void, crack and so on. Therefore, we fabricated SiC composite filling material which had a low CTE for reducing thermal stress in TSV. To add SiC nano particles to molten solder, ball-typed SiC clusters, which were formed with Sn powders and SiC nano particles by ball mill process, put into molten Sn and then, nano particle-dispersed SiC composite filling material was produced. In the case of 1 wt.% of SiC particle, the CTE showed a lowest value which was a $14.8ppm/^{\circ}C$ and this value was lower than CTE of Cu. Up to 1 wt.% of SiC particle, Young's modulus increased as wt.% of SiC particle increased. And also, we observed cross-sectioned TSV which was filled with 1 wt.% of SiC particle and we confirmed a possibility of SiC composite material as a TSV filling material.

• 대한기계학회논문집A
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• 제37권10호
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• pp.1239-1249
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• 2013

본 연구에서는 zircaloy-4 판재에 대해 바우싱거 효과를 고려한 경화거동 예측모델을 구축했다. 금속소재 가공에서 인장 후 압축 시 항복응력이 감소한다. 이에 스프링백 해석 시 바우싱거 효과를 반드시 고려해야 한다. Simple shear 시험에서 적정 시편크기 및 적정 조임토크에 대한 결정법을 제시했다. 5 가지 재료에 대한 simple shear 시험을 통해 응력-변형률 곡선을 구했다. 또한 유한요소해석을 활용해 simple shear 하중-변위 곡선으로부터 유효응력-변형률 곡선으로 변환과정을 소개했다. 등방/운동성 경화 조합모델을 활용해 simple shear 순/역방향 시험을 모사했다. 이때 각 경화계수에 따른 하중-변위 곡선 변화를 관찰하고, zircaloy-4에 대한 경화계수를 결정했다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권1호
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• pp.53-60
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• 2014

Different kinds of post-deposition annealing (PDA) by a rapid thermal process (RTP) are used to enhance the field-effect passivation of $Al_2O_3$ film in crystal Si solar cells. To characterize the effects of PDA on $Al_2O_3$ and the interface, metal-insulator semiconductor (MIS) devices were fabricated. The effects of PDA were characterized as functions of RTP temperature from $400{\sim}700^{\circ}C$ and RTP time from 30~120 s. A high temperature PDA can retard the passivation of thin $Al_2O_3$ film in c-Si solar cells. PDA by RTP at $400^{\circ}C$ results in better passivation than a PDA at $400^{\circ}C$ in forming gas ($H_2$ 4% in $N_2$) for 30 minutes. A high thermal budget causes blistering on $Al_2O_3$ film, which degrades its thermal stability and effective lifetime. It is related to the film structure, deposition temperature, thickness of the film, and annealing temperature. RTP shows the possibility of being applied to the PDA of $Al_2O_3$ film. Optimal PDA conditions should be studied for specific $Al_2O_3$ films, considering blistering.

• 한국재료학회지
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• 제25권8호
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• pp.386-390
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• 2015

Fe-base superalloy powders with $Y_2O_3$ dispersion were prepared by high energy ball milling, followed by spark plasma sintering for consolidation. High-purity elemental powders with different Fe powder sizes of 24 and 50 mm were used for the preparation of $Fe-20Cr-4.5Al-0.5Ti-O.5Y_2O_3$ powder mixtures (wt%). The milling process of the powders was carried out in a horizontal rotary ball mill using a stainless steel vial and balls. The milling times of 1 to 5 h by constant operation (350 rpm, ball-to-powder ratio of 30:1 in weight) or cycle operation (1300 rpm for 4 min and 900 rpm for 1 min, 15:1) were applied. Microstructural observation revealed that the crystalline size of Fe decreased with an increase in milling time by cyclic operation and was about 15 nm after 3 h, forming a FeCr alloy phase. The cyclic operation had an advantage over constant milling in that a smaller-agglomerated structure was obtained. The milled powders were sintered at $1100^{\circ}C$ for 30 min in vacuum. With an increase in milling time, the sintered specimen showed a more homogeneous microstructure. In addition, a homogenous distribution of Y-compound particles in the grain boundary was confirmed by EDX analysis.

• 융합정보논문지
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• 제11권2호
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• pp.10-15
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• 2021

본 논문에서는 먼저 습식 코팅 방법으로 페로브스카이트 (CH3NH3PbI3) 박막을 글라스 상에 형성하고, 다양한 분석 기법을 이용하여 막의 두께, 표면거칠기, 결정성, 구성성분 및 가시광 영역에서의 이 물질의 반응에 대해 논한다. 완성된 반도체 물질은 막내부에 결함(defect)이 없고 균일하며, 표면거칠기는 매우 작으며, 가시광영역에서 높은 흡수율이 관찰되었다. 다음으로 이와 같이 형성된 유무기 층에 hole 형상을 구현하기 위하여, 구멍이 일정한 간격으로 있는 메탈마스크, 페로브스카이트 물질이 코팅되어 있는 유리, 자석 순서로 되어있는 구조의 샘플을 상압플라즈마 공법을 이용하여 시간에 따른 물질에 형성되는 hole 형태의 변화를 분석하였다. 시간이 길어짐에 따라 더 많이 식각되는 것을 알 수 있으며, 이 중에서 공정 시간을 가장 오래한 샘플에 대해서는 보다 자세하게 살펴보았고, 플라즈마의 위치에 따른 차이에 의해 7영역으로 분류할 수 있었다.

• Design & Manufacturing
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• 제15권4호
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• pp.24-31
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• 2021

In this study, an artificial neural network model was constructed to convert CAE analysis data into similar experimental data. In the analysis and experiment, the injection molding data for 50 conditions were acquired through the design of experiment and random selection method. The injection molding conditions and the weight, height, and diameter of the product derived from CAE results were used as the input parameters for learning of the convert model. Also the product qualities of experimental results were used as the output parameters for learning of the convert model. The accuracy of the convert model showed RMSE values of 0.06g, 0.03mm, and 0.03mm in weight, height, and diameter, respectively. As the next step, additional randomly selected conditions were created and CAE analysis was performed. Then, the additional CAE analysis data were converted to similar experimental data through the conversion model. An artificial neural network model was constructed to predict the quality of injection molded product by using converted similar experimental data and injection molding experiment data. The injection molding conditions were used as input parameters for learning of the predicted model and weight, height, and diameter of the product were used as output parameters for learning. As a result of evaluating the performance of the prediction model, the predicted weight, height, and diameter showed RMSE values of 0.11g, 0.03mm, and 0.05mm and in terms of quality criteria of the target product, all of them showed accurate results satisfying the criteria range.

• 자원환경지질
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• 제30권5호
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• pp.395-406
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• 1997

Some RE (Zr, Nb, REE) ore deposits are located in the middle part of the Korean peninsula. Geotectonically, the RE ore deposits situated on the Kyemyeongsan Formation of northern margin of the Okcheon geosynclinal belt and in the transitional zone between Kyeonggi massif and Okcheon belt. The rare metal deposits distributed in Kyemyeongsan Formation which consists of schist and alkaline granite. The alkali granite has suffered extensive post-magmatic metasomatism and hydrothermal processes. The ore contains mainly Ce-La, Ta-Nb, Y, Y-Nb, Ti-Nb-(U), Nd-Th group minerals. Fergusonite, one of Nb-Y rich REE minerals belonging to the A-B oxides, is most common mineral in the rare metal deposits. The fergusonite bearing rocks may be devided into four types by occurrence features and mineral association, that is, zircon type, allanite vein, feldspar type, and fluorite type. Fergusonites show wide variations in optical properties, due to part of differences in their chemical composition (depending on the types), but also the degree of crystalinity of the individual specimens. Fergusonite metamicts enclosed in biotite are generally surrounded by well developed pleochroic haloes. Usually, fergusonite is accompanied with zircon and other REE-bearing minerals. Petrographical and chemical data are presented for fergusonites which collected different types. $Nb_2O_3$ and $Y_2O_3$ contents range from 48.51 to 53.01 wt.% and 29.18 to 42.02 wt.% respectively. Also, $ThO_2$, (1.83~6.93), $UO_2$, (0.17~2.84), ${\sum}RE_2O_3$ (except to Y) (1.11~8.73), and $TiO_2$, (0.19~1.19 wt.%) contents show variational compositions according to fergusonite types. The ${\sum}RE_2O_3$ of fergusonites are positive relation with $Y_2O_3$ and negative relaton with $ThO_2$ and $({\sum}{RE_2O_3}-{Y_2O_3})$. The $Nb_2O_3$ is sightly negative relation with $Ta_2O_3$. Back-scattered electron microscope images (BEI) of fergusonite show the mineral composition and textural feature is very complicated. The variation of Nb, Th and REE content of fergusonite and the modes of occurrence of mineral, suggests that REE may have been mobilized during the circulation of hydrothermal fluids related to contact metamorphism (metasomatism). The chemical variation of the fergusonites with occurrences and mineral association can be related to metasomatism of alkaline fluid was probably the dominant ore-forming process in Chungju district.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.546-546
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• 2008

Copper (Cu) Chemical mechanical polishing (CMP) has been an essential process for Cu wifing of DRAM and NAND flash memory beyond 45nm. Copper has been employed as ideal material for interconnect and metal line due to the low resistivity and high resistant to electro-migration. Damascene process is currently used in conjunction with CMP in the fabrication of multi-level copper interconnects for advanced logic and memory devices. Cu CMP involves removal of material by the combination of chemical and mechanical action. Chemicals in slurry aid in material removal by modifying the surface film while abrasion between the particles, pad, and the modified film facilitates mechanical removal. In our research, we emphasized on the role of chemical effect of slurry on Cu CMP, especially on the effect of amine functional group on removal rate selectivity between Cu and Tantalum-nitride (TaN) film. We investigated the two different kinds of complexing agent both with amine functional group. On the one hand, Polyacrylamide as a polymer affected the stability of abrasive, viscosity of slurry and the corrosion current of copper film especially at high concentration. At higher concentration, the aggregation of abrasive particles was suppressed by the steric effect of PAM, thus showed higher fraction of small particle distribution. It also showed a fluctuation behavior of the viscosity of slurry at high shear rate due to transformation of polymer chain. Also, because of forming thick passivation layer on the surface of Cu film, the diffusion of oxidant to the Cu surface was inhibited; therefore, the corrosion current with 0.7wt% PAM was smaller than that without PAM. the polishing rate of Cu film slightly increased up to 0.3wt%, then decreased with increasing of PAM concentration. On the contrary, the polishing rate of TaN film was strongly suppressed and saturated with increasing of PAM concentration at 0.3wt%. We also studied the electrostatic interaction between abrasive particle and Cu/TaN film with different PAM concentration. On the other hand, amino-methyl-propanol (AMP) as a single molecule does not affect the stability, rheological and corrosion behavior of the slurry as the polymer PAM. The polishing behavior of TaN film and selectivity with AMP appeared the similar trend to the slurry with PAM. The polishing behavior of Cu film with AMP, however, was quite different with that of PAM. We assume this difference was originated from different compactness of surface passivation layer on the Cu film under the same concentration due to the different molecular weight of PAM and AMP.

• 방사성폐기물학회지
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• 제7권2호
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• pp.125-131
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• 2009

건식공정에서 우라늄 수지상의 성장을 억제하는데 사용할 교반기를 개발하기 위하여, 수용액계로 된 모의시험 장치(아연 양극 - 갈륨 음극)에서 자체 제작한 여러 가지 교반기의 성능을 평가하였다. 교반기를 사용하지 않았을 경우에는 전착 후 1 시간 내에 액체음극 표면에서 아연이 수지상으로 성장되기 시작하여 6 시간 정도면 수지상 중의 일부가 도가니 바깥으로 자라게 되었다. 사각형 또는 경사형 교반기로 액체음극을 40${\sim}$150 rpm으로 교반하면 8 시간까지 아연이 수지상으로 성장되는 것을 억제할 수 있었으나, 회전수가 150 rpm으로 증가하면 전착물 중의 일부가 음극 도가니 바깥으로 흘러넘치게 되었다. 해로우형 교반기는 40 rpm에서는 수지상 성장을 억제하지 못하였으나, 100 rpm 이상에서는 수지상으로 전착되는 것을 억제할 수 있었고, 또한 아연 전착물이 150 rpm에서도 도가니 바깥으로 흘러넘치지 않았다. 파운더 교반기는 수지상의 성장을 어느 정도 억제할 수 있었으나 전위가 불규칙하게 변화되고 운전 장치가 복잡한 것이 단점으로 나타났다.