Fundamental Study on Deformation Behavior of the Nano Structure for Application to the Hyper-fine Pattern and Mold Fabrication (극미세 Mold 및 패턴 제작물 위한 나노변형의 기초연구)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2002.10a
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- pp.333-336
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- 2002