• 제목/요약/키워드: Mechanical force

검색결과 5,388건 처리시간 0.035초

CMP 공정에서 마찰력 측정을 통한 마멸 및 윤활 특성에 관한 연구 (Characteristic of the Wear and Lubrication using the Friction Froce Measurement in CMP Process)

  • 박범영;김형재;서헌덕;김구연;이현섭;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.231-234
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    • 2004
  • Chemical mechanical polishing(CMP) process was studied in terms of tribology in this paper. CMP performed by the down force and the relative motion of pad and wafer with the slurry is typically tribological system composed of friction, wear and lubrication. The piezoelectric quartz sensor for friction force measurement was installed and the friction force was detected during CMP process. Various coefficient of friction was attained and analyzed with the kind of pad, abrasive and the abrasive concentration. The lubrication regime is also classified with ${\eta}v/p(\eta,\;v\;and\;p;$ the viscosity, relative velocity and pressure). Especially, the co-relation not only between the friction force and the removal per unit distance but also between the coefficient of friction and within-wafer-nonuniformity was estimated.

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삼차원 프린트된 몰드와 액체 금속을 이용한 웨어러블 힘 센서 개발 (Wearable Force Sensor Using 3D-printed Mold and Liquid Metal)

  • 김규영;최중락;정용록;김민성;김승환;박인규
    • 센서학회지
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    • 제28권3호
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    • pp.198-204
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    • 2019
  • In this study, we propose a wearable force sensor using 3D printed mold and liquid metal. Liquid metal, such as Galinstan, is one of the promising functional materials in stretchable electronics known for its intrinsic mechanical and electronic properties. The proposed soft force sensor measures the external force by the resistance change caused by the cross-sectional area change. Fused deposition modeling-based 3D printing is a simple and cost-effective fabrication of resilient elastomers using liquid metal. Using a 3D printed microchannel mold, 3D multichannel Galinstan microchannels were fabricated with a serpentine structure for signal stability because it is important to maintain the sensitivity of the sensor even in various mechanical deformations. We performed various electro-mechanical tests for performance characterization and verified the signal stability while stretching and bending. The proposed sensor exhibited good signal stability under 100% longitudinal strain, and the resistance change ranged within 5% of the initial value. We attached the proposed sensor on the finger joint and evaluated the signal change during various finger movements and the application of external forces.

Experiments of Force Control Algorithms for Compliant Robot Motion

  • Kim, Dong-Hee;Park, Jong-Hyeon;Song, Ji-Hyuk;Hur, Jong-Sung
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2004년도 ICCAS
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    • pp.1786-1790
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    • 2004
  • The main objective of this paper is to analyze the performance of various force control algorithms in improving and adjusting the compliance of industrial robots in contact with their environment. Some of fundamental force control algorithms such as sensorless control, impedance control and hybrid position/force control are theoretically analyzed and simulated for various situations of an environment, and then a series of experiments using them were performed. In this paper, a control scheme to use position control in implementing the impedance control was investigated in order to nullify the effect of joint friction. The new reference trajectory is generated using contact force feedback and original desired trajectory. And an inner position control loop is designed to provide accurate position tracking for the new reference trajectory and good disturbance rejection. Experiments to insert a peg in a hole (so-called the peg-in-a-hole task) were performed with HILS (hardware-in-theloop simulation) system based on the results of the analyses and simulations on the characteristics of each control algorithm. The experiments showed that various force control methods improved the performance of robots in close contact with the environment by adjusting their compliance with respect to an arbitrary set of coordinates.

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100 kN Deadweight Force Standard Machine and Evaluation

  • Park Yon-Kyu;Kim Min-Seok;Kim Jong-Ho;Kang Dae-Im;Song Hou-Keun
    • Journal of Mechanical Science and Technology
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    • 제20권7호
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    • pp.961-971
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    • 2006
  • A deadweight force standard machine is a mechanical structure that generates force by subjecting deadweights to the local gravitational field. The Korea Research Institute of Standards and Science (KRISS) developed and installed a 100 kN deadweight force standard machine for national force standards. It can generate forces from 2 kN to 110 kN in increments of 1 kN. The uncertainty of the force machine was estimated and declared as $2\times10^{-5}$. This 100 kN deadweight force machine was compared with the 500 kN deadweight force standard machine at KRISS and the 20 kN and 50 kN deadweight force standard machines at the National Metrology Institute of Japan (NMIJ). The measurement results showed good agreement between the deadweight force machines, and the accuracy level of the 100 kN deadweight force machine was verified.

Modeling and experiment for the force/impact control via passive hardware damper

  • Oh, Y.H.;Chung, W.K.;Youm, Y.
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1993년도 한국자동제어학술회의논문집(국제학술편); Seoul National University, Seoul; 20-22 Oct. 1993
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    • pp.172-178
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    • 1993
  • This paper deals with the modeling and experiment of a robot system for force/impact control performance. The basic model is composed of a direct drive motor, servo amplifier, link, force sensor and environments. Based on the developed model, the stability of the whole system was analyzed via root locus method. For the force control, integral force compensation with velocity feedback method shows the best performance of all the explicit force control strategies. In dealing with impact, PID position control and the explicit force control method were implemented. Instead of add more damping to the robot system by velocity feedback, we developed a new passive damping method and it was also applied to enhance the damping characteristic of the system.

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Numerical Investigation of Cross-Flow Around a Circular Cylinder at a Low-Reynolds Number Flow Under an Electromagnetic Force

  • Kim, Seong-Jae;Lee, Choung-Mook
    • Journal of Mechanical Science and Technology
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    • 제16권3호
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    • pp.363-375
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    • 2002
  • The effect of the electromagnetic force (or Lorentz force) on the flow behavior around a circular cylinder is investigated by computation. Two-dimensional unsteady flow computation for Re=10$^2$is carried out using a numerical method of finite difference approximation in a curvilinear body-fitted coordinate system by solving the momentum equations including the Lorentz force as a body force. The effect of spatial variations of the Lorentz forcing region and forcing direction along the cylinder circumference is investigated. The numerical results show that the Lorentz force can effectively suppress the flow separation and oscillation of the lift force of circular cylinder cross-flow, leading to reduction of drag.

체결력 산포와 마찰계수의 감소를 위한 가진기의 진동량 변화 실험 (An Experimental Study of Vibrator Amplitude Change for a Clamping Force Dispersion and Friction Coefficient Decrease)

  • 이금강;문석만;조용주
    • Tribology and Lubricants
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    • 제27권6호
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    • pp.332-337
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    • 2011
  • The object of this experimental study is to investigate influences of vibrator amplitude on clamping force in vibration for bolted joint. The experiment is that change the vibrator amplitude to check clamping force. also the friction coefficient calculated by equation to use an obtained in experiments. The main purpose of generation vibrations is decreasing the clamping force dispersion. also If vibration occurs while tightening the bolt is reduced coefficient of friction. In this paper, In experiments to measure the clamping force before vibrator's amplitude changing. Vibrator's amplitude changes to 5.5mm from 4.4mm. As a result, under various vibration condition, relationship of clamping force and Vibrator amplitude.

보강롤 구동 4 단 냉간압연기에서 작업롤의 수평하중 거동분석과 안정위치 결정을 위한 해석적 및 수치적 고찰 (Analytical and Numerical Investigation of Horizontal Force and Stable Position of Work Roll in Backup-Roll-Drive 4-High Cold-Rolling Mill)

  • 변상민;이재현;박흥식
    • 대한기계학회논문집A
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    • 제35권9호
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    • pp.977-982
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    • 2011
  • 보강롤 구동 4 단 냉간압연기에서 작업롤과 보강롤 사이의 접촉력으로 인해 발생된 작업롤의 수평력을 고찰하였다. 본 수평력은 작업롤을 수평방향으로 휘게하고 롤갭 형상을 그 만큼 변화시킨다. 본 논문에서는 압연을 정상상태라고 가정하여 작업롤의 수평력을 예측할 수 있는 수식모델을 제시하였다. 해석에 사용된 소재는 고-실리콘(약 3%) 강판이었다. 수평력의 비-정상거동을 고찰하기 위해서 삼차원 유한요소모델을 채용하였다. 두 가지 모델을 이용하여 작업롤의 수평력은 보강롤의 중심으로부터 작업롤의 중심이 벗어난 길이에 따라 변한다는 결과를 얻었다. 그리고 작업롤의 수평력을 최소화 시킬 수 있는 작업롤의 최적 중심이탈 길이를 도출하였다.

Coupled foot-shoe-ground interaction model to assess landing impact transfer characteristics to ground condition

  • Kim, S.H.;Cho, J.R.;Choi, J.H.;Ryu, S.H.;Jeong, W.B.
    • Interaction and multiscale mechanics
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    • 제5권1호
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    • pp.75-90
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    • 2012
  • This paper investigates the effects of sports ground materials on the transfer characteristics of the landing impact force using a coupled foot-shoe-ground interaction model. The impact force resulting from the collision between the sports shoe and the ground is partially dissipated, but the remaining portion transfers to the human body via the lower extremity. However, since the landing impact force is strongly influenced by the sports ground material we consider four different sports grounds, asphalt, urethane, clay and wood. We use a fully coupled 3-D foot-shoe-ground interaction model and we construct the multi-layered composite ground models. Through the numerical simulation, the landing impact characteristics such as the ground reaction force (GRF), the acceleration transfer and the frequency response characteristics are investigated for four different sports grounds. It was found that the risk of injury, associated with the landing impact, was reduced as the ground material changes from asphalt to wood, from the fact that both the peak vertical acceleration and the central frequency monotonically decrease from asphalt to wood. As well, it was found that most of the impact acceleration and frequency was dissipated at the heel, then not much changed from the ankle to the knee.

과소 구동 전동의수의 파지력 제어를 위한 햅틱 시스템 개발 (Development of a Haptic System for Grasp Force Control of Underactuated Prosthetics Hands)

  • 임현상;권효찬;김권희
    • 대한기계학회논문집A
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    • 제41권5호
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    • pp.415-420
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    • 2017
  • 과소 구동 전동의수는 가벼우며 비교적 경제적이라는 장점이 있다. 본 연구에서는 적응파지가 가능한 과소 구동 전동의수를 대상으로 경제적인 파지력 제어 시스템을 제안하였다. 근전도 신호로 구동되는 메인 케이블의 장력으로 파지력이 결정되므로 장력에 따라 사용자의 피부에 부착된 진동모터를 구동하는 촉감기반 피드백 시스템을 구성하였다. 진동 신호에 대한 사용자의 감각적 판단을 기반으로 파지력을 추정하고 제어하기 위하여 파지력과 진동 신호 간의 적절한 변환 관계를 수립하고 시제품 성능시험을 하였다. 최소한의 훈련으로 사용자들은 비교적 정확하게 파지력을 제어할 수 있었다.