• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.113-113
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• 2008

Cu CMP (Chemical Mechanical Planarization) has been used to remove copper film and obtain a planar surface which is essential for the semiconductor devices. Generally, it is known that chemical reaction is a dominant factor in Cu CMP comparing to Silicon dioxide CMP. Therefore, Cu CMP slurry has been regarded as an important factor in the entire process. This investigation focused on understanding the effect of corrosion inhibitor on copper surface and CMP results. Benzotriazole (BTA) was used as a corrosion inhibitor in this experiment. For the surface analysis, electrochemical characteristics of Cu was measured by a potentiostat and surface modification was investigated by X-ray photoelectron spectroscopy (XPS). As a result, corrosion potential (Ecorr) increased and nitrogen concentration ratio on the copper surface also increased with BTA concentration. These results indicate that BTA prevents Cu surface from corrosion and forms Cu-BTA layer on Cu surface. CMP results are also well matched with these results. Material removal rate (MRR) decreased with BTA concentration and static etch rate also showed same trend. Consequently, adjustment of BTA concentration can give us control of step height variation and furthermore, this can be applicable for Cu pattern CMP.

• 한국표면공학회지
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• 제57권3호
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• pp.192-200
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• 2024

Cu as a heat exchanger tube is an important component in thermal fluid transfer. However, Cu tubes are exposed to stress in certain environments, leading to stress corrosion cracking (SCC). In this study, the effect of Sn addition on microstructure and corrosion characteristics was examined. The microstructural examination revealed the presence of columnar crystal and a grain refinement due to the addition of Sn. Electrochemical measurements showed that the 5 wt.% NH₃ environment was the most vulnerable environment to Cu corrosion, and the corrosion current density increased as stress increased. The immersion test exhibited the formation of Cu2O and Cu(OH)₂ corrosion product in 3.5 wt.% NaCl and 5 wt.% NH₃ environments, respectively. Results indicated that Sn addition to Cu was an important factor in improving the mechanical strength.

• Journal of Advanced Marine Engineering and Technology
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• 제39권5호
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• pp.542-547
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• 2015

Since the oil price has been significantly jumped for several years, a heavy oil of low quality has been mainly used in the diesel engine of the merchant ship. Thus, a combustion chamber of the engine has been often exposed to severely corrosive environment more and more because temperature of the exhaust gas of the combustion chamber has been getting higher and higher with increasing of using the heavy oil of low quality. As a result, wear and corrosion of the engine parts such as exhaust valve, piston crown and cylinder head surrounded with combustion chamber are more serious compared to the other parts of the engine. Therefore, an optimum repair welding for these engine parts is very important to prolong their lifetime in a economical point of view. In this study, Inconel 625 filler metal were welded with GTAW method in the cast steel which would be generally used with piston crown material. And the corrosion properties of weld metal, heat affected and base metal zones were investigated using electrochemical methods such as measurement of corrosion potential, anodic polarization curves, cyclic voltammogram and impedance etc. in 35% $H_2SO_4$ solution. The weld metal and base metal zones exhibited the highest and lowest values of hardness respectively. Furthermore, the corrosion current density of the weld metal zone revealed the lowest value, having the highest value of hardness. The corrosive products with red color and local corrosion like as a pitting corrosion were considerably observed at the base metal zone, while these morphologies were not wholly observed in the weld metal zone. In particular, the polarization characteristics such as impedance, polarization curve and cyclic voltammogran associated with corrosion resistance property were well in good agreement with each other. Consequently, it is suggested that the mechanical and corrosion characteristics of the piston crown can be predominantly improved by repair welding method using the Inconel 625 electrode.

• 공업화학
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• 제5권5호
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• pp.764-771
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• 1994

친핵성용매하에서 p-toluenesulfonic acid나 bezensulfonic acid와 같은 유기산을 지지전해질 겸 dopant로 사용하여 전도성 Polypyrrole필름을 전해중합하였고 분해 특성과 기계적 물성증가에 대하여 고찰하였다. Dimethyformamide/p-toluenesulfonic acid에서 합성한 polypyrrole 필름이 전도도 10-40S/cm, 인장강도 $25N/mm^2$. 연신율은 10%로 가장 좋은 특성을 나타내었다. 또한 전해중합시 최적 조건은 0.5M의 pyrrole과 0.5M의 p-toluenesulfonic acid를 첨가하여 정전류법에서는 $2mA/cm^2$의 전류밀도가, 정전위법으로는 0.9V vs. $Ag/Ag^+$에서 중합할 때였으며 생성된 필름은 공기중에서 안정하였고 도핑, 탈-도핑이 가역적이어서 2차 전지로서의 특성을 갖고 있었다. 온도에 따른 분해과정이 1차 반응으로 dopant 음이온이 분해반응에 관여하지 않아 산화안정성이 좋았으며 분해활성화 에너지는 $1.01JK^{-1}mol^{-1}$, $25^{\circ}C$에서의 분해속도상수는 $3.1{\times}10-7min^{-1}$였다. 여러 가지 host polymer와의 composite를 검토한 결과 인장강도는 50%, 연신율은 100% 정도로 기계적 물성을 증가시킬 수 있었다.

• 한국해양공학회지
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• 제1권2호
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• pp.93-100
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• 1987

Corrosion fatigue cracking of the austenitic stainless steel(bese metal & heat affected zone by TIG weld) was studied experimentally under the environments of various specific resistance and air. The characteristics of corrosion fatigue crack growth rate and the environmental constants of paris' rule were investigated for SUS 304 weldments in the various specific resistance. The influences of stress intensity factor range and corrosion on the crack growth rate were compared. The characteristics of corrosion fatigue cracking for the weldments were inspected from mechanical, electrochemical and microstructural point of view. Main results obtained are as follows: 1) As the specific resistance decreases, the environmental constant C of paris'rule increases(hence the corrosion fatigue crack growth rate is rapid), but the environmental constant m decreases, so the effect of corrosion to the crack growth rate is more susceptible than thet of stress intensity factor range. 2) As the stress intensity factor range decreases, the corrosion fatigue crack growth rate of heat affected zone is more susceptible than that of the base metal. 3) The corrosion fatigue crack growth rate of the heat affected zone is more rapid than that of the base metal, because of the phenomenon of softening and the less noble potential coused by wedlding heat cycle. 4) The corrosion fatigue cracking of SUS 304 weldment appears transgranular fracture.

• 한국수소및신에너지학회논문집
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• 제24권3호
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• pp.216-222
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• 2013

Durability characteristics of Gas Diffusion Layer(GDL) is one of the important issues for accomplishing commercialization of Proton Exchange Membrane Fuel Cell(PEMFC). It is strongly related to the performances of PEMFC because one of the main functions of GDL is to work as a path of fuel, air and water. When the GDL does not work on their proposed functions due to the degradation of durability, mass transfer in PEMFC is disturbed and it might cause the flooding phenomenon. Thus, investigating the durability of GDL is important and understanding the GDL degradation process is needed. In this study, electrochemical degradation with carbon corrosion is introduced. The carbon corrosion experiment is carried out with GDLs which have different MPL penetration thicknesses. After the experiment, the amount of degradation of GDL is measured with various properties of GDL such as weight, thickness and performance of the PEMFC. The degraded GDL shows loss of their properties.

• 대한기계학회논문집A
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• 제37권2호
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• pp.213-218
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• 2013

초음파 가공(Ultrasonic Machining:USM)은 새로운 기계가공기술 분야 중의 하나이다. 초음파 가공 과정은 비열, 비화학, 그리고 비전도의 방법이기 때문에 공작물 재료의 물리적, 화학적 변화가 없다. 이러한 특성으로 인해 초음파 가공기술은 유리, 세라믹 등과 같은 취성재료의 가공에 적합하다. 그러나 단점으로는 초음파 진동을 이용하여 취성재료를 가공하는 경우 크랙이 빈번하게 발생한다. 본 논문에서는 유리와 세라믹의 미세 구멍가공에서 다구찌 방법을 이용하여 크랙발생을 최소화하는 최적의 가공조건을 얻고자 하였다. 이를 통해 공작물의 입구 및 출구에서 발생하는 크랙 현상을 감소시켰다.

• Journal of Advanced Marine Engineering and Technology
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• 제27권6호
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• pp.714-720
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• 2003

Due to the electric power shortage in summer season and regulation of freon refrigerant, the application of gas absorption refrigeration and hot water systems are considerably increasing trend. But, this system consists of condenser, heat exchanger, supply pipe and radiator etc. which are easily corroded by acidity and dissolved oxygen and gases. In result, this system occurs scale attachment and corrosion damage like pitting and crevice corrosion. In this study, electrochemical polarization test of heat exchanger tubing material (copper, aluminium brass, 30% cupronickel(30% Cu-Ni)) was carried out in 60% lithium bromide solution at $95^{\circ}C$. As a result of polarization test, corrosion behavior by impressed potential and local corrosion. such as galvanic corrosion, pitting corrosion behavior, of tubing materials was investigated. The main results obtained are as follows: (1) The effect of pitting and crevice corrosion control of 30% cupronickel in 60% LiBr solution at $95^{\circ}C$ is very excellent. (2) Dissimilar metal corrosion of 30% cupronickel coupling to aluminium bronze is the most sensitive. (3) Current density behavior of tube materials by impressed potential is high in order of copper > aluminium brass > 30% cupronickel.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.2070-2075
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• 2004

Performance of a solid oxide fuel cell (SOFC) can be enhanced by converting thermal energy of its high temperature exhaust gas to mechanical power using a micro gas turbine (MGT). A MGT plays also an important role to pressurize and warm up inlet gas streams of the SOFC. In this study, the influence of performance characteristics of the tubular SOFC on the hybrid power system is discussed. For this purpose, detailed heat and mass transfer with reforming and electrochemical reactions in the SOFC are mathematically modeled, and their results are reflected to the performance analysis. The analysis target is 220kWe SOFC/MGT hybrid system based on the tubular SOFC developed by Siemens-Westinghouse. Special attention is paid to the ohmic losses in the tubular SOFC counting not only current flow in radial direction, but also current flow in circumferential direction through the anode and cathode.

• 수산해양기술연구
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• 제32권3호
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• pp.302-309
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• 1996

Cavitation erosion-corrosion implies damage to materials due to the shock pressure or shock wave that results when bubbles form and collapse at a metal surface within a liquid. If the liquids corrosive to the material, a condition typically encountered in industry, the component materials may suffer serious damage by a combination of mechanical and electrochemical attack. To suppress cavitation erosion as well as cavitation erosion-corrosion to hydraulic equipments, innovations such as the improvement in the geometric design of the equipment or the selection of suitably resistant construction materials are necessary. This study was tested by using the piezoelectric vibrator with 20kHz, 24${\mu}$m for cavitation generation. And also, the vibratory cavitation erosion-corrosion tests on commercial mild steel SS41were carried out. We carefully observed the erosion pattern and surface photography. The geometrical mechanism of pit growth, which is to be likely these processing; shallow typelongrightarrowundercut typelongrightarrowwide shallow type.