• Journal of Electrochemical Science and Technology
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• v.11 no.4
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• pp.346-351
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• 2020

The removal characteristics of copper (Cu) from electrochemical surface by voltage-activated reaction were reviewed to assess the applicability of electrochemical-mechanical polishing (ECMP) process in three types of electrolytes, such as HNO₃, KNO₃ and NaNO₃. Electrochemical surface conditions such as active, passive, transient and trans-passive states were monitored from its current-voltage (I-V) characteristic curves obtained by linear sweep voltammetry (LSV) method. In addition, the oxidation and reduction process of the Cu surface by repetitive input of positive and negative voltages were evaluated from the I-V curve obtained using the cyclic voltammetry (CV) method. Finally, the X-ray diffraction (XRD) patterns and energy dispersive spectroscopy (EDS) analyses were used to observe the structural surface states of a Cu electrode. The electrochemical analyses proposed in this study will help to accurately control the material removal rate (MRR) from the actual ECMP process because they are a good methodology for predicting optimal electrochemical process parameters such as current density, operating voltage, and operating time before performing the ECMP process.

• Journal of Electrochemical Science and Technology
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• v.15 no.2
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• pp.220-241
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• 2024

Due to its unique advantages, electrochemical machining (ECM) is playing an increasingly significant role in the manufacture of difficult-to-machine materials. Most of the current ECM research is conducted at room temperature, with studies on ECM in a cryogenic environment not having been reported to date. This study is focused on the electrochemical dissolution characteristics of typical iron and nickel base alloys in NaNO₃ solution at low temperature (-10℃). The polarization behaviors and passive film properties were studied by various electrochemical test methods. The results indicated that a higher voltage is required for decomposition and more pronounced pitting of their structures occurs in the passive zone in a cryogenic environment. A more in-depth study of the composition and structure of the passive films by X-ray photoelectron spectroscopy and electrochemical impedance spectroscopy showed that the passive films of the alloys are modified at low temperature, and their capacitance characteristics are more prominent, which makes corrosion of the alloys more likely to occur uniformly. These modified passive films have a huge impact on the surface morphologies of the alloys, with non-uniform corrosion suppressed and an improvement in their surface finish, indicating that lowering the temperature improves the localization of ECM. Together with the cryogenic impact of electron energy state compression, the accuracy of ECM can be further improved.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.11
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• pp.1251-1258
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• 2011

With the help of nanoscale materials like carbon nanotube (CNT), there is the potential to develop new actuators that will provide higher work per cycle than previous actuator technologies, and generate much higher mechanical strength. In this study, the electrochemical actuation characteristics of nano carbon materials were experimentally studied to develop electrochemical actuators. The electrochemical actuators were composed of aqueous NaCl electrolyte and their actuating electrodes were made of multi-walled carbon nanotube (MWCNT)/polystyrene composite and graphene respectably. Actuation is proportional to charging transfer rate, and the electrolysis with an AC voltage input has very complex characteristics. To quantify the actuation property, the strain responses and output model were studied based on electrochemical effects between the nano carbon films and the electrolyte.

• Journal of the Korean institute of surface engineering
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• v.42 no.1
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• pp.34-40
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• 2009

In the study, it was carried out dissimilar metal welding on materials for Al ship. The electrochemical and mechanical characteristics evaluated for specimen welded by ROBOT. The hardness of welding zone is lower than those of heat affected zone and base metal. At the result of tensile test, the specimen welded with ER5183 welding material presented excellent property compared with ER5556. The polarization trend for the base metal and welding metal showed the effects of concentration polarization due to oxygen reduction and activation polarization due to hydrogen generation. At the Tafel experiments result, the corrosion density in welded with ER5183 welding material presented the lowest value.

• Corrosion Science and Technology
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• v.12 no.5
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• pp.245-252
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• 2013

In this study, mechanical and electrochemical characteristics with welding material in MIG welded with ROBOT for dissimilar Al alloys were investigated using various experiment methods. The MIG welding by ROBOT with ER5183 and ER5556 for the 5456-H116 and 6061-T6 Al alloy were carried out. The hardness of welding zone was lower than that of base metal. In electrochemical experiment, ER5183 welding material presented excellent characteristics. The yield strength and maximum tensile strength in welding with welding material of ER5183 presented lower value than those of ER5556. The elongation and time-to-fracture showed the opposite results.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.3
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• pp.430-438
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• 1997

Deburring and edge finishing technology as the final process of machining operation is required for manufacturing of advanced precise conponents. But, deburring is considered as a difficult problem on going to the high efficient production and automation in the FMS. Removal of burr couldn't have a standard of its definition because of its various shapes, dimensions and properties and mostly depends on manual treatment. Especially, deburring for cross hole inside is very difficult owing to its shape passing through out perpendicular to a main hole. The electrochemical method is suggested as its solution in practical aspect. Therefore, electrochemical deburring technology needs to be developed for the high efficiency and automation of internal deburring in the cross hole. In this study, the new process in the eliminating burr inside cross hole, electrochemical deburring by the wheel electroplated with Cubic-Boron-Nitrade abrasives, is suggested. Its deburring mechanism is described and machining performances is investigated. Also, CBN electroplated wheel is designed and manufactured and then characteristics of electrochemical deburring are investigated through experiments. Overall electrochemical deburring performance against burr inside cross hole is examined in the various power sources such as peak current and direct current.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.303-308
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• 2005

In this paper, the effects of oxidants on tungsten chemical mechanical polishing (CMP) process were investigated using three different oxidizers such as Fe(NO₃)₃, KIO₃ and H₂O₂. Moreover, the interaction between the tungsten film and the oxidizer was discussed by potentiodynamic polarization measurement with three different oxidizers, in order to compare the effects of W-CMP and electrochemical characteristics on the tungsten film as a function of oxidizer. As an experimental result, the tungsten removal rate reached a maximum at 5 wt％ Fe(NO₃)₃concentration, and when 5 wt％ H₂O₂was added in the slurry, the removal rate of W increased. Also, the microstructures of surface layer by atomic force microscopy(AFM) image were greatly influenced by the slurry chemical composition of oxidizers. It was shown that the surface roughness and removal rate of the polished surface were improved in Fe(NO₃)₃than KIO₃. The electrochemical results indicate that the corrosion current density of the 5 wt％ H₂O₂ and 5 wt％ H₂O/sub 2+/＋ 5 wt％ Fe(NO₃)₃was higher than the other oxidizers. Therefore, we conclude that the W-CMP characteristics are strongly dependent on the kinds of oxidizers and the amounts of oxidizer additive.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.4
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• pp.49-54
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• 2005

In this paper, micro structuring technique using localized electrochemical deposition (LECD) with ultra short pulses was investigated. Electric field in electrochemical cell was localized near the tool tip end region by applying pulses of a few hundreds of nano second duration, Pt-Ir tip was used as a counter electrode and copper was deposited on the copper substrate in mixed electrolyte of 0.5 M $CuSO_4$ and 0.5 M $H_2SO_4$, The effectiveness of this technique was verified by comparison with ECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration were investigated. The proper condition was selected based on the results of the various experiments. Micro columns less than $10{\mu}m$ in diameter were fabricated using this technique. The real 3D micro structures such as micro spring and micro pattern were made by the presented method.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.12
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• pp.1984-1991
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• 1997

Recently burr technology is rising in the fields of the precision manufacturing and the high quality machining, deburring has treated as a difficult problem on going to the high efficiency, automation in the FMS. Removal of burr with various shapes, dimensions and properties couldn't be standardized and has depended on manual treatment. Especially, deburring for cross hole inside owing to passing through out perpendicular to a main hole is more difficult, the electrochemical method is proper as its solution at practical aspects. Burr elimination in the cross hole drilling of governor shaft used in the automobile engine so far has been worked by a manual post-processing by a skillful worker, which becomes a factor of productivity-down and cost-up so that improvement of machining process is needed. Therefore, for the high efficiency and automation of internal deburring in the cross hole, development of electrochemical deburring technology is needed. So, the new process in the burr treatment is supposed. In this study, characteristics of electrochemical deburring through experiments were identified and factors such as electrolytic gap and electorlytic fluid contributed to removal burr height were analyzed. Also, deburring efficiency and electrolytic performance for cross hole were examined according to electrolytic current and electrochemical deburring condition corresponding to acquired edge quality was found out.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.4
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• pp.263-268
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• 2001

This paper describes the effects of applied bias conditions on electrochemical etch-stop characteristics. THere are a number of key issues such as diode leakage and ohmic losses which arise when applying the conventional 3-electrochemical etch-stop to fabricated some of he MEMS(microelectro mechanical system) and SOI(Si-on-insulator) structures which employ SDB(Si-wafer direct bonding). This work allows to perform anin situ diagnostic to predict whether or not an electrochemical etch-stop would fail due to diode-leakage-induced premature passivation. In addition, it presents technology which takes into account the effects of ohmic losses and allows to calculate the appropriate bias necessary to obtain a successful electrochemical etch-stop.