• 제목/요약/키워드: Mechanical activation

검색결과 545건 처리시간 0.026초

반도체 ALD 공정에서의 질화규소 증착 수치해석 (Numerical Analysis on Silicon Nitride Deposition onto a Semiconductor Wafer in Atomic Layer Deposition)

  • 송근수;유경훈
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2032-2037
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    • 2007
  • Numerical analysis was conducted to investigate the atomic layer deposition(ALD) of silicon nitride using silane and ammonia as precursors. The present study simulated the surface reactions for as-deposited $Si_3N_4$ as well as the kinetics for the reactions of $SiH_4$ and $NH_3$on the semiconductor wafer. The present numerical results showed that the ALD process is dependent on the activation constant. It was also shown that the low activation constant leads to the self-limiting reaction required for the ALD process. The inlet and wafer temperatures were 473 K and 823 K, respectively. The system pressure is 2 Torr.

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Ti의 ${\Omega}$법을 이용한 고온 크리프 거동해석 (Creep Behavior Analysis of Pure Ti by Omega Method)

  • 조진화;이헌식;정순억
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.388-393
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    • 2004
  • Creep behavior of Ti had been studied in a stress from 9.8 to 29.4 MPa and temperature rang from 873K to 973K with a special reference to tertiary creep. It was found that stress exponent of Ti was larger than that of the general pure metal and the compound metal. The relationship between true strain and strain rate in tertiary creep was appeared as the equation, $ln{\dot{e}}$ = $ln{\dot{e}}_{0}$ + ${\Omega}$ e Also, Apparent activation energy of was appeared as 274.92kJ/mol by using the equation ${\dot{\varepsilon}}_{0}$ = A ${\sigma }_{0}^{\ast_0}$ exp$(-Q_{0}/RT)$

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Creep Behavior of 9% Ni Alloy Steel at Elevated Temperatures

  • Suh, Chang-Min;Oh, Sang-Yeob
    • 한국해양공학회지
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    • 제25권4호
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    • pp.12-17
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    • 2011
  • Little design data is available for the creep life prediction of 9% Ni alloy in elevated temperatures. Therefore, in this study, a series of creep tests under 16 combined conditions with 4 kinds of stresses and 4 temperatures was performed to obtain creep design and life prediction data for 9% Ni alloy, with the following results. The stress exponents decreased as the test temperature increased. The creep activation energy gradually decreased as the stresses became larger. The Larson-Miller parameter (LMP) constant for this alloy was estimated to be about 2.

SHS of Oxide Systems Based on MCR of Quartz Modified by Organometallic Compounds

  • Soh, Dea-Wha;Tlek, Ketegenov;Z.A., Mansurov
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.666-669
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    • 2002
  • The differences of the effects of mechanical substance pre-activation in the mills with divers force effect schemes on the self-propagating high temperature synthesis (SHS) of the $SiO_2$ + 37.5% Al system were investigated. The power saturation of activated material state are estimated referring on the variations of dilatometry curve paths. The effects of activation time on the temperature of sample self-ignited in the furnace, combustion temperature and completeness of the quartz reaction with aluminium were determined. The enhancing effects of organic modifiers of quartz particle surfaces on the further SHS synthesis development were shown.

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애자용 실리콘 고무의 유전특성 (Dielectric Characteristics of Silicone Rubber for Insulators)

  • 이상민;신현택;변두균;신종열;이창형;이충호;홍진웅
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.451-454
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    • 2002
  • A silicone rubber has been used so many dielectric materials for extremely high voltage(EBW) electric appliances. The reason why it is very stable in the thermal, mechanical and electrical environment. In this paper, we have studied the dependence of dielectric characteristics of silicone rubber on frequency-dependent variation. The dielectric characteristics were measured in the temperature range of 25[$^{\circ}C$] and 150[$^{\circ}C$]. Also we measured in the voltage range of 1[V] and 20[V]. The energy of activation on the dielectric loss obtained 2.44[kcal/mol], 2.1[kcal/mol], 1.63[kcal/mol] and 1.57[kcal/mol] by appling respectively.

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4관능성 에폭시 수지/불소를 함유한 에폭시 수지 블렌드 시스템의 경화거동 및 파괴인성에 관한 연구 (Studies on Curing Behavior and Fracture Toughness of Tetrafunctional Epoxy Resin/Fluorine-containing Epoxy Resin Blend System)

  • Jin, Fan-Long;Lee, Jae-Rock;Park, Soo-Jin;Shin, Jae-Sup
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2002년도 추계학술발표대회 논문집
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    • pp.273-275
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    • 2002
  • In this studies, curing behavior and mechanical properties of tetrafunctional epoxy resin (4EP)/ fluorine-containing epoxy resin (FEP) blend systems was investigated with 4, 4'-diaminodiphenol methane (DDM) as a curing agent. The cure activation energies $(E_a)$) were studied by Flynn-Wall-Ozawa's equation with dynamic DSC method. For the fracture toughness of the casting specimens, the critical stress intensity factor ($K_{IC}$) and the specific fracture energy ($G_{IC}$) were determined by fracture toughness test.

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수직 Bridgman 법에 의한 CdTe 단결정 성장과 특성 (Growth and characterization of CdTe single crystal by vertical Bridgman method)

  • 홍명석;홍광준
    • 센서학회지
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    • 제14권6호
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    • pp.369-373
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    • 2005
  • High quality CdTe single crystal for the solar cell fabrication was grown by vertical Bridgman method. The etch pits patterns of (111) surfaces of CdTe etched by Nakagawa solution was observed the (111)A compesed of Cd atoms with typical triangle etch pits of pyramid mode. From the photoluminescence measurement on (111)A, we observed free exciton ($E_{x}$) existing only high quality crystal and neutal acceptor bound exciton ($A^{0}$,X) having very strong peak intensity. Then, the full width at half maximum and binding energy of neutral acceptor bound exciton were 7 meV and 5.9 meV, respectively. By Haynes rule, an activation enery of impurity was 59 meV. Therefore, the origins on impurity level acting as a neutral acceptor were associated Ag or Cu elements.

기계적 합금법으로 제조된 Al-Ni 합금계의 고온특성 (High Temperature properties of Mechanically Alloyed Al-Ni System)

  • 김유영
    • 한국분말재료학회지
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    • 제1권1호
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    • pp.35-41
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    • 1994
  • Mechanical alloying process of Al-8wt.% Ni powder was investigated for the various milling time in order to get the steady state powder. High temperature deformation behaviors of the sintered specimens were investigated by activation energy calculated after high temperature compression tests at the strain rates of 2.5$\times$10-3 s-1, 2.5$\times$10-2 s-1 and 2.5$\times$10-1 s-1 at the temperature range between $350^{\circ}C$ and $450^{\circ}C$. The steady state was obtained after 1000 minutes of milling with the PCA of 1.5 wt.% stearic acid under the condition of grinding media to powder weight ratio of 50 : 1 and impeller rotating speed of 300 rpm. True activation energy of Al-8wt.% Fe alloy was estimated to be 181 kJ/mole at the temperature range of 350~ $400^{\circ}C$ and 265 kJ/mole at the range of 400~$450^{\circ}C$.

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Selective Activation of Mitogen-Activated Protein (MAP) Kinase During the Progression of Renal Disease

  • Park, Sang-Joon;Jeong, Kyu-Shik;Jeong, Tae-Sook;Bok, Song-Hae;Lee, Cha-Soo
    • 한국수의병리학회:학술대회논문집
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    • 한국수의병리학회 2000년도 추계학술대회 및 정기총회
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    • pp.19-19
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    • 2000
  • Most renal diseases progress by consecutive cell responses such as hypertrophy, hyperplsia, proliferation, defferentiation, sclerosis, fibrosis and other cellular degenerative process. These cellular responses are mediated by the activation of various mitogens such as vasoconstrictors, growth factors, hormone, genotoxins and cytokines through mechanical, hemodynamic, immunological injury as well as metabolic abnormality. (omitted)

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등온 열중량 분석에 의한 Mg2NiHx 탈수소화 반응속도 연구 (Dehydriding Kinetics of the Mg2NiHx by Isothermal Thermogravimetry Analysis)

  • 홍태환;김영직
    • 한국수소및신에너지학회논문집
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    • 제11권1호
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    • pp.11-18
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    • 2000
  • In order to investigate the dehydriding properties of the $Mg_2NiH_x$ formed by hydrogen induced mechanical alloying, we performed isothermal thermogravimetry analysis at 453, 463, 473, 483, 493, 503 and 513K for 1 hours. Dehydrogenation kinetics were dependant strongly on the MA conditions which determine the In other words, kinds of synthesized hydrides phases and the crystal microstructures. The MA condition, 66:1 BCR(balls to chips mass ratio), especially 96h milling time, revealed the hydride phases of nano-/ amorphous state and the dehydriding activation energy of $43.4{\pm}3.6kJ/mole$.

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