• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
• /
• pp.38-39
• /
• 2005

We have investigated the effect of the pad surface characteristics such as roughness, groove density and wear of pad on within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). We found that WIWNU increases as pad surface roughness($R_{pk}$; Reduced peak height) increases in an early stage of polishing. But after polishing time goes to a certain extent, WIWNU decreases as uniformity of pad surface roughness. Also, groove of pad has effect on relative pad stiffness although original mechanical properties of pad are unchanged by grooving. WIWNU decreases as relative pad stiffness decreases. In addition, conditioning process causes non-uniform wear of pad during in CMP. The profile of pad wear has a significant effect on WIWNU.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
• /
• pp.573-574
• /
• 2006

The planarization technology of Chemical-mechanical polishing(CMP), used for the manufacturing of multi-layer various material interconnects for Large-scale Integrated Circuits (LSI), is also readily adaptable as an enabling technology in MicroElectroMechanical System (MEMS) fabrication, particularly polysilicon surface micromachining. However, general LSI device CMP has partly distinction aspects, the pattern scale and material sorts in comparison with MEMS CMP. This study performed preliminary CMP tests to identify slurry characteristic used in general IC device. The experiment result is possible to verify slurry characteristic in MEMS structure material.

• 한국기계가공학회지
• /
• 제20권10호
• /
• pp.102-111
• /
• 2021

Maintainability is a major design parameter that includes availability as well as reliability in a RAM (reliability, availability, maintainability) analysis, and is an index that must be considered when developing a system. There is a lack of awareness of the importance of predicting and analyzing maintainability; therefore, it is dependent on past-experience data. To improve the utilization rate, maintainability must be managed as a key indicator to meet the user's requirements for failure maintenance time and to reduce life-cycle costs. To improve the maintainability-prediction accuracy in the detailed design stage, we present a maintainability-prediction method that applies Method B of the Military Standardization Handbook (MIL-HDBK-472) Procedure V, as well as a Korean maintainability-prediction software package that reflects the system complexity.

• 한국기계가공학회지
• /
• 제21권7호
• /
• pp.91-97
• /
• 2022

Pipes transport and supply fuel in various categories; however, corrosion occurs because of the external environment, impurities are mixed in the fuel, and substances leak to the outside, which can lead to serious accidents. Therefore, in this study, inspection equipment using a laser scanner was manufactured to classify conditions according to the degree of corrosion of the outer wall of the pipe, and the corrosion height and maximum value of the pipe were obtained from the surface information. Using the k-means method, it was classified into four states, and the standard of the average height and maximum height of corrosion for each state was derived.

• 한국기계가공학회지
• /
• 제20권11호
• /
• pp.1-8
• /
• 2021

In this study, the water resistance and mechanical properties of heat-treated polyvinyl alcohol (PVA)/cellulose nanocrystal (CNC) films were investigated. PVA is the most commonly used synthetic biodegradable polymers owing to its excellent properties. However, the water/moisture sensitivity and relatively poor mechanical properties of PVA limits its applications. Although heat treatment is a conventionally used method to improve the mechanical strength and water resistance of PVA, the effectiveness of this method is insufficient. Therefore, CNC was used to further improve the mechanical properties and water resistance of the heat-treated PVA film. PVA/CNC nanocomposites containing CNC contents of 0, 1, 3, 5, and 10 wt% were fabricated using solvent casting and subsequent heat treatment. The mechanical properties and water resistance of PVA/CNC films were significantly improved. The tensile strength and wet strength of the PVA/CNC film with a CNC content of 5 wt% (PVA/CNC 5%) were 184.5% and 136.0% higher than those of the untreated PVA, respectively. In addition, the water absorption and solubility of PVA/CNC 5% were 56.6% and 68.2% lower than those of the untreated PVA.

• 한국기계가공학회지
• /
• 제21권5호
• /
• pp.46-52
• /
• 2022

Although pipe performs various functions in industrial sites and residential spaces, if it is damaged due to corrosion caused by the external environment, it may cause equipment failure or a major accident. For this reason, various studies for safety management are being conducted, but studies on detecting corrosion or cracks on the pipe surface using a laser displacement sensor have hardly been conducted. Therefore, in this study, the corrosion degree of the pipe surface was compared and classified into 4 corrosion conditions, and inspection equipment using a laser scanner was manufactured. The corrosion height was calculated from the four surface data obtained from the measuring equipment and applied to various CNN algorithms, and 91% accuracy was obtained during training using the Modified VGGNet16 code with reduced number of parameters.

• 대한기계학회논문집A
• /
• 제20권3호
• /
• pp.945-959
• /
• 1996

In this paper, a comprehensive computer model is described which can be used to generate the volumetric error map combining the machine parametric errors and the measurement prove error, for most types of CMMs and axis configurations currently in use.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2009년도 추계학술대회 논문집
• /
• pp.217-217
• /
• 2009

In this study, the effect of bending strain on the transport property and critical current of lap and butt-jointed BSCCO tapes have been investigated. The samples were joined using a mechanically controlled jointing procedure. In order to ensure a uniform pressure application at the joint part, a single point contact has been devised and also to achieve a uniform thickness at the joint interface.

• 대한기계학회논문집
• /
• 제5권3호
• /
• pp.193-198
• /
• 1981

Muskhelishvili 의 복소수방법에 의해 일반적 하중 즉 열 및 기계적 하중을 받는 무한 탄성체내에 공동을 가정하고 그 주위의 응력 및 변위를 유도하였다. 선형트랙(line rack)이 부분적으로 또는 완정히 닫힐 임계하중조건과 그때의 응력세기 계수 (stress intensity factor)를 McClintork와 Walsh 의 크랙닫힘에 관한 결정에 기초를 두고 해석학적으로 유도하였다.

• 한국자동차공학회논문집
• /
• 제2권1호
• /
• pp.106-115
• /
• 1994

A parallel integration approach is proposed for real-time simulation of controlled mechanical systems. The proposed approach, which employs the dual-rate integration method in a parallel computing environment, is developed to deal with stiffness and high frequency characteristics of the controlled mechanical systems effectively. Numerical experiments are performed to demonstrate the effectiveness of the approach in shared memory multiprocessors, Alliant FX/8 and Alliant FX/80.