• Proceedings of the Korean Magnestics Society Conference
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• 2014.05a
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• pp.122-124
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• 2014

• Proceedings of the Korean Magnestics Society Conference
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• 2010.06a
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• pp.112-113
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• 2010

• Proceedings of the Korean Magnestics Society Conference
• /
• 2009.05a
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• pp.186-188
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• 2009

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.318-318
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• 2005

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.149-149
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• 2005

• Proceedings of the Korean Magnestics Society Conference
• /
• 2009.05a
• /
• pp.238-238
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• 2009

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1998.05a
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• pp.86-86
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• 1998

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1997.05a
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• pp.90-90
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• 1997

• Journal of the Korean institute of surface engineering
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• v.57 no.3
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• pp.125-139
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• 2024

As the limits of semiconductor integration are approached, the challenges in semiconductor processes have intensified. And, for the production of semiconductors with dimensions under a few nanometers and to resolve the issues related to nanoscale device fabrication, research on atomic layer etching (ALE) technology has been conducted. The investigation related to ALE encompasses not only silicon and dielectric materials but also metallic materials. Particularly, there is an increasing need for ALE in next-generation metal materials that could replace copper in interconnect materials. This brief review will summarize the concept and methods of ALE and describe recent studies on potential next-generation metal replacements for copper, along with their ALE processes.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09b
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• pp.896-897
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• 2006

In the viewpoint of engineering, materials problem is a key problem, which determines whether the exploitation of fusion energy will be success. The most important class of fusion materials is plasma-facing materials (PFM). W, as high Z high melting-point metal is one of the most important candidate materials due to its high plasma erosion resistance. Improving the ductility of W and W based alloy, lowering its ductile-brittleness transition temperature for meeting the requirements of fusion application is an important task. In this paper, severalpowder meatllurgy methods of fabricating W and W based materials are being investigated.