• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.109-110
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• 2005

We have suggested sputtered W-C-N thin film for preventing thermal budget between semiconductor and metal. These results show that the W-C-N thin film has good thermal stability and low resistivity. In this study we newly suggested sputtered W-B-C-N thin diffusion barrier. In order to improve the characteristics, we examined the impurity behaviors as a function of nitrogen gas flow ratio. This thin film is able to prevent the interdiffusion during high temperature (700 to $1000^{\circ}C$) annealing process and has low resistivity ($\sim$200$\mu{\Omega}-cm$). Through the analysis of X-Ray diffraction, resistivity and XPS, we studied structure behavior of W-B-C-N diffusion barrier.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.765-770
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• 2003

We have developed a low-temperature, and low-pressure radical induced oxidation (RIO) technology, so that high-quality ultrathin silicon dioxide layers have been effectively produced with a high reproducibility, and successfully employed to realize high performace SiGe heterostructure complementary MOSFETs (HCMOS) lot the first time. The obtained oxide layer showed comparable leakage and breakdown properties to conventional furnace gate oxides, and no hysteresis was observed during high-frequency capacitance-voltage characterization. Strained SiGe HCMOS transistors with a 2.5 nm-thick gate oxide layer grown by this method exhibited excellent device properties. These suggest that the present technique is particularly suitable for HCMOS devices requiring a fast and high-precision gate oxidation process with a low thermal budget.

• Journal of the Korean Society of Safety
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• v.26 no.5
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• pp.110-117
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• 2011

The paper tries to understand the other side of characteristics on occupational injuries and diseases in forestry. Occupational injuries and diseases in forestry seems to be greatly influenced by the environmental characteristics of the mountain district and individual's ability of workers. A traditional method on the analysis of occupational injuries and diseases data may show that the main cause of occupational injuries and diseases is the material factors significantly. To identify the other side of occupational injuries and diseases in forestry, the occupational injuries and diseases data of 3,091 workers in forestry was analyzed. The data in forestry, 2009 shows certain characteristics among the recent occupational injuries and diseases data. The first step is to classify the data according to standard of classification of original cause materials. Material factors are 72.3% and human factors (included managerial factors) and environmental factors are 27.0%. The next step is to reclassify the first step data by using the concept of influence factors which caused and influenced occupational injuries and diseases. The result is that material factors are 2.4%, human factors(included managerial factors) and environmental factors are 97.0%. Also, an aging degree of workers in forestry is higher than other categories of business. It is true that an aging degree of injured or diseased workers in forestry is higher than that of other categories of business. However, relevance with increase of occupational injuries and diseases could not be explained. An injury and disease rate in forestry is remarkably increased recently than other categories of business. One of the reason why an injury and disease rate increased remarkably in 2009 could be considered as the increase of the number of workers and related budget. Therefore, this study proposes important measures or means to prevent occupational injuries and diseases in forestry.

• Journal of Korean Elementary Science Education
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• v.32 no.1
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• pp.47-59
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• 2013

The purpose of this study is to investigate the perception about STEAM education of primary teachers who have developed and applied STEAM education to their students through teacher training program. For this study, 101 among 172 attendance are responded to questionnaire of three categories consisting of development and application teaching material for STEAM instruction, and spreading STEAM education. The major findings are as follows: First, when primary teachers develop materials for STEAM education, they consider applicabilities in real classes. Second, they feel the burden of time when they develop STEAM material. Third, they think that their own program has significant educational effectiveness and that students enjoyed the program. Especially, they think that STEAM education program can raise students' interest about learning. Fourth, primary teachers point out the constraints for application of STEAM education program, which are lack of expertise and difficulty acquiring class time. Fifth, primary teachers evaluate the effect of STEAM education program on primary education is positive, and they answer that we need many teaching materials for STEAM education, operating as a regular curriculum, and securing budget. In order to spread STEAM education in field of primary education successfully, administrators have to consider and reflect the voice of teachers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.96-98
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• 1999

유기전계발광소자(OELD)의 성능 향상을 위한 많은 연구가 진행되고 있지만 아직까지 금속전극과 유기발 광층 사이의 접촉저항(Contact Resistance)에 관한 연구는 거의 보고되지 않고 있다. Ohmic 접합에서 접촉 저항은 효율적이고 신뢰성 있는 소자제작에 있어서 간과되어서는 안될 매우 중요한 부분이다. 본 연구에서는 금속전극과 유기발광충 사이의 접촉저항에 관해서 논의하고자 한다. 본 연구에서 제작된 샘플은 금속전극으로 Ag, 유기발광재료로서 Alq$_3$를 사용하였으며, Alq3의 두께를 100 $\AA$에서 500 $\AA$까지 각각 다르게 하여 서로 다른 두께의 유기발광층을 가지는 샘플을 제작하였다. 금속전극의 매트릭스 구조에 의해 형성된 적선의 크기는 3 mm x 2 mm이며, 제작된 샘플의 접촉비저항은 TLM(Transmission Line Measurement) 방법을 이용하여 구하였다. Planar한 TLM model로부터 새로운 vertical model을 유추하였으며, 이를 근거로 접촉저항 및 transfer length 등을 계산하였다. 상온에서 측정된 전체 저항값은 유기발광층의 두께가 증가함 에 따라 증가하는 경향을 나타냈으며, 이 때 계산된 접촉비저항은 1.49$\times$$10^1$ $\Omega$-$\textrm{cm}^2$ 이다. 접촉저항은 전극 사이의 거리의 증가에 따라 증가하지만, 측정시간의 thermal budget의 영향으로 상대적으로 전체저항이 감 소하였으나, 저항감소분의 포화에 따라서, 거리에 비례하여 다시 저항이 증가하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.5
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• pp.358-364
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• 1998

Retrograde well is a new process for ULSI fabrication. High energy ion implantation has been used for retrograde well formation. In this paper the forming condition for retrograde well using high energy ion implantation is compared with that for conventional well. TW signals for retrograde p-,n-well($900^{\circ}C$),after annealing are similar trends to those of conventional ones($1150^{\circ}C$), however the signals for RTA have the highest value because of small thermal budget. Junction depths of retrograde well are varied from about 1.2 to $3.0\{mu}m$ as for conventional well. The peak concentrations of retrograde well, however, are about 10 times higher in values than those of conventional ones so that they can be used as any types of potential barriers or gettering sites. The critical dose for phosphorus implantation in our experiments is between $3\times10^{13} and 1\times10^{14}/cm^2$. Under the above critical dose, there are many secondary defects near projected range such as dislocation lines and dislocation loops.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.48-51
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• 2004

In this paper the importance of re-nitridation on a plasma-enhanced chemical-vapor deposited(PECVD) $SiO_2$ stacked on a thermally grown thin-nitrided $SiO_2$ on n-type 4H SiC have been investigated. Without the final re-nitridation process, the leakage current of metaloxidesemiconductor(MOS) was extremely large. It is believed that water and carbon, contamination from the low-thermal budget PECVD process, are the main factors that destroyed the high quality thin-buffer nitrided oxide. After re-nitridation annealing, the quality of the stacked gate oxide was improved. The reasons of this improvement are presented.

• Korean Journal of Agricultural Science
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• v.49 no.4
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• pp.761-769
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• 2022

The Livestock Raw Material Purchase Fund is a policy to increase the export of livestock products by providing loans to exporters of livestock products (including byproducts). The policy started in 2015 and the annual budget is about 26 billion won. However, a quantitative evaluation of policy effects has not yet been made. Therefore, in this study, the economic surplus of the policy was analyzed using the equilibrium displacement model (EDM). From the results of the welfare analysis, from 2016 to 2019, producer surplus in the chicken and duck market increased by KRW 70.9 billion, while consumer surplus decreased by KRW 70 billion. In other words, the total economic surplus of the chicken and duck market increased by about one billion won during the same period due to the increase in export demand according to the policy. Therefore, the Livestock Raw Material Purchase Fund can be viewed as a policy to maintain and increase export demand for export livestock products and to improve the economic surplus of the livestock product market. Also, since the policy is based on loans, it does not place a burden on the government's finances. Therefore, this policy should continue in the future.

• International conference on construction engineering and project management
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• 2022.06a
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• pp.624-631
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• 2022

Highway Rest Areas are envisioned to provide an accessible space for rest and parking for travelers, especially those driving a long distance. In addition, modern highway Rest Areas provide many amenities to highway users, including wifi service, picnic tables, litter barrels, running water, public telephones, and sometimes even free coffee. Various studies were conducted in the domain of Rest Area facility design and their operating costs in different states; however, limited studies were conducted on the maintenance costs of these facilities. Therefore, this study's main objective is to compute the annual maintenance cost of Rest Areas in the state of Nevada. This study also analyzes the main cost categories of the maintenance works. The raw cost data of Nevada Rest Area maintenance from 1990 to 2012 were collected from the Nevada Department of Transportation (NDOT). Results show that the maintenance cost fluctuated over the study period; the maintenance cost decreased from 1991 to 2004 and then increased until 2012. The primary cost categories of maintenance work are labor, equipment, and material costs. Among these, labor cost was the largest category with 56 percent of the total maintenance cost, followed by equipment cost and material cost. The findings of this study may help NDOT and other transportation agencies plan their budget for future Rest Area maintenance activities.

• Journal of the Korean BIBLIA Society for library and Information Science
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• v.27 no.2
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• pp.193-212
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• 2016

The purpose of this paper is to explain the necessity of secure budget in public libraries with regard to promoting library usage. It is namely to attempt to find out if there really is a connection between library funding and library usage. For this purpose, the relevant data of all the 31 public libraries in Busan were collected from the 2013 National library Statistics of Korea. To determine the connection between library funding and usage, two variables were selected, 'TFI (Total Funding Indicator) = $\sqrt{personnelcosts{\times}materialcosts}$' for independent variable and 'LU (Library Usage) = (visits per year) + (loans per year)/number of inhabitants' for dependent variable. The results showed that there is a clear relationship between TFI and LU and If more cost is spent on personal resources and material resources, the total usage of the public library also increase. The findings are limited due to the fact that the observation was focusing on public libraries in one community and the period of observation was one year in 2013.