• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.254-259
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• 2009

The mixed cooling dryer has been developed significantly by adopting both advantages of cooling dryers and desiccant dryers. In this study, it is introduced that the desired effect, such as drying rate period reduction and energy-saving, could be achieved only by adding the desiccant dryer if an existing cooling dryer is used. The experiment should be conducted for quite long time due to the material selection, so it is regrettable that there are not enough data.

• Journal of Korean Society of Disaster and Security
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• v.11 no.2
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• pp.61-67
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• 2018

Scour protection methods can be categorized as two types: The first is to reduce the horseshoe and wake vortices which are the main reasons for local scour. Either small cylindrical structures or separated vertical deflectors can be placed in front of the pier or the horizontal deflector (or collar) can be attached to the pier like the spoiler to reduce the dynamics of vortical structures. The second is to employ the protection layer to keep the bed material in place, which is a common method with a merit of immediate effect by using block mat or tetrapod. This study examined the effect of scour reduction using the former method. The relationship between the reflector interval and reduction of scour was not clear. It is assumed that the width of the reflector is somewhat correlated with the reduction of the scour. As the KC numbers increases, the Effect of Scour reduction rate is shown to decrease. Also, Scour reduction rate showed a rapid change at $U_R=25$ or KC = 8.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1993.05a
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• pp.28-32
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• 1993

A deposition rate of styrene thin films is linearly increased, but one of benzene thin films is nonlinearly increased with increasing discharge power under maintaining a polymerization time, pressure and monomer flow rate. And, the reduction of transmittance at shortwave is larger than that of transmittance at longwave. The refractive index with wavelength is various from 1.55 to 1.65. The refractive index of their thin films is decreased with increasing discharge power. Also, it is known that measured results are valid because the calculation of the extinction coefficient is about $10^3$ within variation of refractive index.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2012.05a
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• pp.85-86
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• 2012

This application plan is hasty prepared with the actual condition in which the majority is reclaimed by the waste with the marine and the polysilicon sludge, that is the main raw material of the solar pannel support, does. In this research, by using OPC and Fly ash, the applicability as the blending material of the polysilicon sludge was analyze and it tried to contribute to the waste reduction afterward. The replacement ratio of the sludge was set to 5. 10, 15, 20(%) with the experiment based on the based test result and the air flow rate, liquidity, flexural strength, and compressive strength was measured. The liquidity was reduced in spite of as the replacement ratio of the sludge increased and the air flow rate increased.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.2
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• pp.147-150
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• 2019

There is a need for the development of transparent conductive materials that are economical and environmentally friendly with exhibit low resistivity and high transmittance in the visible spectrum. In this study, the deposition rate and uniformity of Al-doped ZnO-thin films were improved by changing the Z-motion of the sputtering system. The deposition rate and the uniformity were determined to be 3.44 nm/min and 1.23%, respectively, under the 10 mm Z-motion condition. During $O_2$ plasma treatment, the intrusion-type metal elements in the thin film were reduced, which contributed to an oxygen vacancy reduction in addition to structural stabilization. Moreover, the sheet resistance was more easily saturated.

• Korean Journal of Materials Research
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• v.33 no.12
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• pp.530-536
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• 2023

The theoretical capacity of silicon-based anode materials is more than 10 times higher than the capacity of graphite, so silicon can be used as an alternative to graphite anode materials. However, silicon has a much higher contraction and expansion rate due to lithiation of the anode material during the charge and discharge processes, compared to graphite anode materials, resulting in the pulverization of silicon particles during repeated charge and discharge. To compensate for the above issues, there is a growing interest in SiO_x materials with a silica or carbon coating to minimize the expansion of the silicon. In this study, spherical silica (SiO₂) was synthesized using TEOS as a starting material for the fabrication of such SiO_x through heating in a reduction atmosphere. SiO_x powder was produced by adding PVA as a carbon source and inducing the reduction of silica by the carbothermal reduction method. The ratio of TEOS to distilled water, the stirring time, and the amount of PVA added were adjusted to induce size and morphology, resulting in uniform nanosized spherical silica particles. For the reduction of the spherical monodisperse silica particles, a nitrogen gas atmosphere mixed with 5 % hydrogen was applied, and oxygen atoms in the silica were selectively removed by the carbothermal reduction method. The produced SiO_x powder was characterized by FE-SEM to examine the morphology and size changes of the particles, and XPS and FT-IR were used to examine the x value (O/Si ratio) of the synthesized SiO_x.

• Journal of Biosystems Engineering
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• v.40 no.2
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• pp.102-109
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• 2015

Purpose: Slow manual harvesting of rain-fed chickpeas cultivated in fallow fields in developing countries have encouraged the design of a mechanical harvester. Methods: A tractor-pulled harvester was built, in which a modified stripper header detached pods from an anchored plant and a chain conveyor transferred material. The stripper harvester was redesigned to use: 1) the maneuverability of tractor-mounted frames, 2) the adaptability of floating headers, and 3) the flexibility of pneumatic conveyors. Results: A mobile vacuum conveyor, which was an innovator open system, was designed for the dilute phase transferring mode for both grain and material other than grain. A centrifugal fan transferred harvested material to a cyclone separator that settled harvested material in a grain tank 1 m high. The machine at the spot work rate of $0.42ha{\cdot}h^{-1}$ harvested chickpea pods equal to the output of 16.6 farm laborers. Conclusion: The low cost and reasonable projected purchase price are the advantages of the concept. Additionally, the shattering loss reduction confirms the feasibility of the prototype chickpea harvester for commercialization.

• Journal of the Korean Ceramic Society
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• v.31 no.8
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• pp.893-901
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• 1994

In this study, AlN powder of fine particle size and of high purity was synthesized by the carbothermal reduction-nitridation of monodisperse, spherical Al(OH)3 which had been prepared by sol-gel method using Al(O-sec-C4H9)3 as the starting material. Depending on the mixing order and kinds of reducing agents, the optimum condition for the preparation of AlN was determined as follows. AlN single-phase was produced by the carbothermal reduction-nitridation of (1) Benzene-washed Al(OH)3 and the reducing agent, carbon, which was mixed in a ball mill: for 5 hours at 140$0^{\circ}C$ under NH3 atmosphere; (2) The mixture prepared by hydrolysis of alkoxide solution into which carbon had been dispersed beforehand: for 5 hours at 135$0^{\circ}C$ ; (3) Al(OH)3 Poly(furfuryl alcohol) composite powder: for 2.5 hours at 135$0^{\circ}C$; (4) The mixture of Al(OH)3 and polyacrylonitrile: for 5 hours at 140$0^{\circ}C$. Addition of CaF2 increased the nitridation rate when carbon or polyacrylonitrile was used as the reducing agent; but it had no effect on the nitridation rate when furfuryl alcohol was used as the reducing agent.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2006.05a
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• pp.387-390
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• 2006

Conventional spinning, shear forming and flow forming techniques are being utilized increasingly due to the great flexibility provided for producing complicated parts, enabling customers to optimize designs and reduce weight and cost, all of which are vital, especially in automotive industries, space shuttle, a munitions industry. The deformation mechanism of conventional spinning and shear forming is studied in this paper through analysis. The forming loads of a spin formed dome in an Al launch vehicle fuel tank was studied analysis and a simple FE model to predict the forming loads of the dome was proposed. The analysis is carried out to study the effects of feed rates and thickness reduction on material flow.