Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1993.05a
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- Pages.28-32
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- 1993
The Optical Properties of Plasma Polymerized Organic Thin Films Using Spectrophotometry
분광광도계법을 이용한 플라즈마 중합 유기박막의 광학특성
- Choi, C.S. (Inha Univ.) ;
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Park, B.K.
(ChonBuk Sanup Univ.) ;
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Park, C.B.
(Wonkwang Univ.) ;
- Lee, D.C. (Inha Univ.)
- Published : 1993.05.15
Abstract
A deposition rate of styrene thin films is linearly increased, but one of benzene thin films is nonlinearly increased with increasing discharge power under maintaining a polymerization time, pressure and monomer flow rate. And, the reduction of transmittance at shortwave is larger than that of transmittance at longwave. The refractive index with wavelength is various from 1.55 to 1.65. The refractive index of their thin films is decreased with increasing discharge power. Also, it is known that measured results are valid because the calculation of the extinction coefficient is about
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