• 반도체디스플레이기술학회지
• /
• 제7권2호
• /
• pp.55-58
• /
• 2008

The objective of the research is to design, manufacture and test a Mass Flow Controller(MFC) capable of measuring compressible fluid flows based on a "bucket and stop-watch"method. The basic principle is the measurement of time, where the time taken to fill and empty a bucket of known volume is measured. This method of flow measurement is a new concept when compared to a commercilized current mass flow controller. For the flow meter to be able to compete with established designs it not only must be comparable in cost and robustness, it must be very accurate and reliable as well. This device should be able to handle fluid flows in the range of 0.1ml/min to 10ml/min within an accuracy of ${\pm}$1%. A possible application for a device such as this is in electronics industry where arsenic gas is used in the production of silicon chips.

• 한국자동차공학회논문집
• /
• 제6권1호
• /
• pp.59-72
• /
• 1998

This experimental study was carried out to investigate the characteristics of the in-cylinder eccentricity swirl flow generated by a 4 valve cylinder head with a tangential and a helical intake port. the measurements of the in-cylinder velocity field have been made by a two-channel LDA system. The mean flow coefficient(Cf(meam)), swirl ratio(Rs) and mass flowrate with valve eccentricity ratios and an intake port partition between the two intake ports were measured in the steady flow test fig using the ISM(impulse swirl meter). The experimental results indicated that the mass flowrate through the tangential intake port was 19% and 7.7% more than that of the helical intake port in case of with and without intake port partition respectively. There was a tendency to be a single rotation flow in swirl flow fields formed by a 4 valve cylinder head because of the interaction between the two intake ports. As the intake port partition was not set between flow coefficient(Cf(mean)) was 7.35%.

• 유체기계공업학회:학술대회논문집
• /
• 유체기계공업학회 1999년도 유체기계 연구개발 발표회 논문집
• /
• pp.109-113
• /
• 1999

Thermal mass flow meter (TMF) is used measuring the small mass flow rate of gases. Generally, flow rate measuring accuracy of TMF is $\pm2{\%}$ of full scale. TMF is manufactured for specified working pressure and specified working gas by customer. If it were applied for different working pressure and gases, flow rate measurement accuracy decreased dramatically. In this study, a TMF tested with three different gases and pressure range of 0.2 MPa to 1.0 MPa. Effect of specific heat cause to increase flow measurement error as much as ratio of specific heat compare with reference gas. Pressure change cause to increase flowrate measurement deviation about $-0.2{\%}$ as the working pressure decreased 0.1 MPa.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2010년도 춘계학술대회 논문집
• /
• pp.783-784
• /
• 2010

• 한국산학기술학회논문지
• /
• 제4권2호
• /
• pp.63-70
• /
• 2003

본 논문에서는 반도체 제조장비의 핵심 부품 중에 하나인 질량유량제어기(MFC, Mass Flow Controller)클 설계하고 구현하였다 Microchip社의 마이크로콘트롤러(Microcontroller) PIC 16F876을 사용하여 개발된 MFC는 여러가지 문제점을 가진 아날로그(Analog) 방식의 MFC와 고가의 DSP(Digital Signal Processor) 및 고분해능의 AD변환기(Analog to Digital Convertor)를 사용하는 디지털 MFC의 장점을 혼합한 하이브리드형(Hybrid-Type)이다. 본 논문에서 개발된 MFC는 크게 센서부(Sensor Unit), 제어부(Control Unit), 구동기부(Actuator Unit)로 구성되었으며, 성능향상을 위한 자동보정(Automatic Calibration) 알고리즘과 표준테이블(Reference Table) 방식을 사용하였다.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2000년도 춘계학술대회논문집B
• /
• pp.154-161
• /
• 2000

As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

• Journal of Advanced Marine Engineering and Technology
• /
• 제30권3호
• /
• pp.382-388
• /
• 2006

This study experimented to understand the effect of transporting ice slurry through in pipe with valve. And at this experiment it used ethylene glycol-water solution and a concentration is 30wt%. The experimental apparatus was constructed of ice slurry generation tank, turbo flow meter, manometers for differential pressure measuring, PIV system for flow pattern measuring. illumination and along a horizontal circular tube with valve as test section. The experiments were carried out under various conditions, with velocity of fluid at the entry ranging from 0.5 to 1.5 m/s and concentration of IPF is 30%. Also valve open rate is 50%, 75%, 100%.

• 대한기계학회논문집B
• /
• 제26권9호
• /
• pp.1276-1283
• /
• 2002

Recently, HSDI (High Speed Direct Injection) diesel engine has been spotlighted as a next generation engine because it has a good potential for high thermal efficiency and fuel economy. This study was carried out to investigate the in-cylinder flow characteristics generated in a 4-valve small diesel cylinder head with a tangential and helical intake port. The flow characteristics such as coefficient of flow rate(Cf), swirl ratio (Rs), and mass flow rate (ms) were measured in the steady flow test rig using the impulse swirl meter and the analysis of in-cylinder flow field was conducted by experiment using the PIV and calculation using the commercial CFD code. As the results from steady flow test indicate, the mass flow rate of the cylinder head with a short distance between the two intake ports is increased over 13% than that of the other head. However, the non-dimensional swirl ratio is decreased approximately 15%. From in-cylinder flow characteristics obtained by PIV and CFD calculation, we found that the swirl center was eccentric from the cylinder center and the velocity distribution became uniform near the TDC. In addition, the results of the calculation are good agreement with the experimental results.

• 대한기계학회논문집
• /
• 제16권12호
• /
• pp.2407-2414
• /
• 1992

본 연구에서는 정온도 열선식 공기유량계의 전체적인 회로를 구성한 다음, 여 기에 간단한 온도보상시스템을 첨가함으로써 유동온도의 변화에 관계없이 일정한 출력 이 나오도록 하고, 이에 관련된 온도보상시스템의 메카니즘을 규명하고자 한다. 온 도보상시스템은 여러 가지가 알려져 있으나, Drubka(1977)가 열선브릿지에 단지 온도 센서(thermistor)를 삽입하고, 과열비(overheat ratio), 열선의 냉저항과 작동 중의 저항차, 열선의 브릿지상단에서의 출력 중 한 가지를 일정하게 유지시켜 온도보상을 수행하는 방법을 제안하였다. Takagi(1985)는 위의 방법 중 과열비를 일정하게 유지 시키는 방법을 택하고, 출력으로 브릿지상단의 전압이 아닌 열선에 흐르는 전류를 감 지함으로써 더욱 더 간단한 온도보상시스템을 제안하였다. 본 연구는 바로 이 방법 을 채용하여 온도보상을 수행한다.

• 소음진동
• /
• 제10권2호
• /
• pp.280-290
• /
• 2000

The paper deals with vibration suppression and dynamic stability of a vertical cantilevered pipe conveying an internal flowing fluid and having an attached mass. Real pipe systems may have some valves or mechanical attached parts, which can be regarded as attached lumped masses. The effect of attached mass on the dynamic stability of a cantilevered pipe conveying fluid is investigated for different locations and magnitudes of the attached mass. The flow rate was controlled through motor pump output and measured by a flow meter. Experimental resutls in the vicinity of flutter fluid velocity were compared with theoretical predictions. It has been found that the experimental results are in substantial agreement with the theoretical predictions. Finally, in order to suppress the vibration of the pipe subjected to a disturbance, and control technique using an internal flowing fluid is introduced.