• Journal of Power System Engineering
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• v.12 no.1
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• pp.72-79
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• 2008

This paper designs a looper-tension controller for mass-flow stabilization in hot strip finishing mills. By Newton's 2nd law and Hooke's law, nonlinear dynamic equations on the looper-tension system are firstly derived, and linearized by a linearization algorithm using a Taylor's series expansion. Moreover, a tension calculation model is obtained from the nonlinear dynamic equations which is called as a soft sensor of strip tension between two neighboring stands. Next, a looper-tension servo controller is designed by an ILQ(Inverse Linear Quadratic optimal control) algorithm, and it is combined with a minimal disturbance observer which to attenuate speed disturbances by AGC and operator interventions, etc.. Finally, it is shown from by a computer simulation that the proposed ILQ controller with a disturbance observer is very effective in stabilizing the strip mass-flow under some disturbances, moreover it has a good command following performance.

• Journal of the Korea Society of Computer and Information
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• v.15 no.4
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• pp.99-106
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• 2010

In this paper, we propose an industrial fluid monitoring system which performs the flow control function and monitors fluid pressure transmitted from MFC(Mass Flow Controller) unit. This system consists of MFC unit, channel device, and monitoring management software. MFC unit transmits the measured data of the fluid pressure to the channel device which would provide the input/output interface between management software, monitoring and MFC unit. The monitoring and management software control and analyze by monitoring real time measurements of fluid pressure from each channel of MFC unit. This software can process 20 channels and 0.1 monitoring cycle which gives 200 data measurement per second (i.e., 720,000 data/hour). At this time, the storage space increases in proportion to the rise of input data. This growth of data and storage space makes loss of data access efficiency. Therefore, it demands the implementation by sensing scheme of change scope and data, which can effectively manage the data.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.161-166
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• 2021

Errors in the semiconductor process are generated by a change in the state of the equipment, and errors usually arise when the state of the equipment changes or when parts that make up the equipment have flaws. In this investigation, we anticipated that aging of the mass flow controller in the plasma enhanced chemical vapor deposition SiO2 thin film deposition method caused a minute flow rate shift. In seven cases, fourier transformation infrared film quality analysis of the deposited thin film was used to characterize normal and pathological processes. The plasma condition was monitored using optical emission spectrometry data as the flow rate changed during the procedure. Preprocessing was used to apply the collected OES data to the artificial immune system algorithm, which was then used to process diagnosis. Through comparisons between datasets, the learning algorithm compared classification accuracy and improved the method. It has been confirmed that data characterized as a normal process and abnormal processes with differing flow rates may be discriminated by themselves using the artificial immune system data mining method.

• Journal of Bio-Environment Control
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• v.18 no.3
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• pp.200-207
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• 2009

This study was conducted to analyze the variations of air temperature, relative humidity and pressure in a low pressure chamber for plant growth. The low pressure chamber was composed of an acrylic cylinder, a stainless plate, a mass flow controller, an elastomer pressure controller, a read-out-box, a vacuum pump, and sensors of air temperature, relative humidity, and pressure. The pressure leakage in the low pressure chamber was greatly affected by the material and connection method of tubes. The leakage rate in the low pressure chamber with the welding of the stainless tubes and a plate decreased by $0.21kPa{\cdot}h^{-1}$, whereas the leakage in the low pressure chamber with teflon tube and rubber O-ring was given by $1.03kPa{\cdot}h^{-1}$. Pressure in the low pressure chamber was sensitively fluctuated by the air temperature inside the chamber. An elastomer pressure controller was installed to keep the pressure in the low pressure chamber at a setting value. However, inside relative humidity at dark period increased to saturation level.. Two levels (25 and 50kPa) of pressure and two levels (500 and 1,000sccm) of mass flow rate were provided to investigate the effect of low pressure and mass flow rate on relative humidity inside the chamber. It was concluded that low setting value of pressure and high mass flow rate of mixed gas were the effective methods to control the pressure and to suppress the excessive rise of relative humidity inside the chamber.

• 제어로봇시스템학회:학술대회논문집
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• 1987.10b
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• pp.647-651
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• 1987

Yeast biomass in a biological continuous stirred tank reactor was controlled with an APPLE II microcomputer using adaptive control theory of bilinear systems. The controller used is as simple as a PID controller, but required less information. Cell concentration was well controlled by adjusting the inlet flow rate following the algorithm.

• Journal of Technology Innovation
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• v.9 no.1
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• pp.149-165
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• 2001

This paper analyses characteristics of the numerical controller industry in market formation and the flow of information between users and producers and the characteristic of knowledge base of the industry and discuses the difficulties derived, from the characteristics, in accumulation of technological capability. In market formation between users and producers, the multi-layered market is not favorable to domestic producers in that lower end market is not large enough to provide cradle market to them which produce inferior quality and lower price than imported products. The credibility of the performance of a product is different to prove until a critical mass of products are sold. Therefore gaining market share is deterred by unproven credibility of the performance of the product. The flow of information between users and producers is limited. The flow of information on users environment through mass market to producers is essential for improving credibility of a product. The nature of knowledge base is tacit and the means of knowledge transmission is limited. Technological licensing and reverse engineering, which have been conventional means of knowledge transmission, are not useful in the numerical controller industry. These characteristics provide conditions of vicious circle in accumulation of technological capability of the numerical controller industry. This paper argues that these characteristics of the industry challenge existing approach to R&D management and framework of science and technology policy.

• Proceedings of the Technology Innovation Conference
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• 2000.06a
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• pp.47-64
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• 2000

This paper analyses characteristics of the numerical controller industry in market formation and the Flow of information between users and producers and the characteristic of knowledge base of the industry and discusses the difficulties derived, from the characteristics, in accumulation of technological capability In market formation betweenusers and producers, the multi-layered market is not favorable to domestic producers in that lower end market is not large enough to provide cardle market to them which produce inferior quality and lower price than importer products. The credibility of the permance of a product is difficult to prove until a critical mass of products are sold. Therefore gaining market share is deterred by unproven credibility of the performance of the product. The flow of information between users and producers is limited. The flow of information on users environment through mass market to producers is essential for improving credibility of a product. The nature of knowledge base is tacit and the means of knowledge transmission is limited. Technological licensing and reverse engineering, Which have been conventional industry. These characteristics provide conditions of vicious circle in accumulation of technological capability of the numerical controller industry. This paper argues that these characteristics of the industry challenges existing approach to R&D management and framework of science and technology policy.

• Journal of Power System Engineering
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• v.7 no.4
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• pp.61-66
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• 2003

In this paper, the relation between displacement of piezoelectric material and electric field was proposed. FEA was introduced to predict the displacement and reaction force of plate spring attached in the piezoelectric material. The relation between displacement of piezoelectric material forced by plate spring and applied electric field were further verified by experimental investigation. Also, the flow rate of gas in piezoelectric valve was examined by experiment. Finally, the relation between electric field and gas flow was derived. Based on these results, these relations can be used in the design of mass flow controller.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1694_1695
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• 2009

In this paper, the coal mass flow of the pulverizer used in the coal-fired power plants is modeled in view of the controller design rather than the educational simulator. The coal mass flow is modeled by reinvestigating the mass balance models physically. To identify the model parameters, the Matlab Simulation Tool is used with the data gained from a plant database. It can be seen that the simulated model outputs are well matched with the measured ones.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.5
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• pp.373-377
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• 2005

In this paper the gas leakage controller in processing chamber for semiconductor manufacturing is proposed. A pressure sensor is connected between the final valve and the numeric valve. A pressure sensor signal and a numeric valve signal are controlled by a proposed digital circuit module. Gas leakage condition, producing by 2nd plasticity in semiconductor process, display at LED. The proposed controller module is useful for monitoring the gas flow for preventing the critical process gas leakage.