• 반도체디스플레이기술학회지
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• 제15권2호
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• pp.32-37
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• 2016

Sidewall angle (SWA) of an absorber stack in extreme ultraviolet lithography mask is considered to be $90^{\circ}$ ideally, however, it is difficult to obtain $90^{\circ}$ SWA because absorber profile is changed by complicated etching process. As the imaging performance of the mask can be varied with this SWA of the absorber stack, more complicated optical proximity correction is required to compensate for the variation of imaging performance. In this study, phase shift mask (PSM) is suggested to reduce the variation of imaging performance due to SWA change by modifying mask material and structure. Variations of imaging performance and lithography process margin depending on SWA were evaluated through aerial image and developed resist simulations to confirm the advantages of PSM over the binary intensity mask (BIM). The results show that the variations of normalized image log slope and critical dimension bias depending on SWA are reduced with PSM compared to BIM. Process margin for exposure dose and focus was also improved with PSM.

• Archives of Plastic Surgery
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• 제36권4호
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• pp.469-474
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• 2009

Purpose: A lower facial contouring surgery has become a commonly performed procedure in Asia. Currently, mandibular angle sagittal ostectomy and botulinum toxin type A treatment are main procedures for aesthetic correction of a broad lower face. There are a few date to show the differences in the mandibular contouring changes between mandibular angle splitting ostectomy and botulinum toxin type A treatment. Facial golden mask is easy to apply, inexpensive, and relatively objective for evaluation of facial contour analysis. This study was designed specifically to compare the changes in lower face width after two different forms of lower facial contouring procedure using facial golden mask. Methods: Seventeen patients, aged 18 to 55 years (mean, 28.6 years), 15 women and 2 men, consented to the study and receive a contouring procedure of lower face. The patients were classified in to 2 groups. In group A, the sample consisted of 10 patients with a prominent squared mandibular angle and mandibular angle splitting ostectomy was performed. In group B, the sample consisted of 7 patients with masseteric hypertrophy and botulinum toxin type A treatment was performed. Photographs of the face were taken to record the facial change at preoperative and postoperative. The postoperative photographs were taken to considered maximal effect at 2 years after surgery in group A and 4.8 months after treatment in group B. The authors applied the facial golden mask to preoperative and postoperative photographs and horizontal ratio, which compares facial width with golden mask width, were calculated. We made an analysis of the result of horizontal ratio using SPSS. Results: Overall average horizontal ratio of pre- and postoperative photos of group A were 1.24 and 1.11, whereas overall average horizontal ratio of pre- and postoperative photos of group B were 1.19 and 1.12. The horizontal ratio decreased 10.24% in group A and 5.93% in group B. There was a statistically significant change in before and after treatment, but there was no significant change in comparing the group A and group B. Conclusions: The result from this study suggest that mandibular angle sagittal ostectomy and botulinum toxin type A treatment showed relatively satisfactory clinical effects on lower facial contouring treatment. There was no statistical significant difference within two lower facial contouring treatment. Facial golden mask is easy to apply, inexpensive, and relatively objective, so we think that facial golden mask is a good method for evaluation of lower facial contouring treatment.

• 반도체디스플레이기술학회지
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• 제9권4호
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• pp.13-18
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• 2010

Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.349-354
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• 2001

In this study, we investigated the effect of the impacting ang1e of particles, the scanning times and the stand-off distance on the surface roughness and the weight-loss rate of samples with no mask, and the wall profile and overetching of samples with different mask pattern in powder blasting of soda-lime glass. The varying parameters were the different impact angles between 50$^{\circ}$ and 90$^{\circ}$, scanning times of nozz1e up to 40 and the stand-off distances 70mm and 100mm. The widths of mask pattern were 0.2mm, 0.5mm and 1mm. The powder was alumina sharp particles, WA#600. The mass flow rate of powder during the erosion test was fixed constant at 175g/min and the blasting pressure of powder at 0.2MPa

• 한국안전학회지
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• 제35권3호
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• pp.105-115
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• 2020

This study compares the difference of fit factors (FF) and visual acuity according to masks and eyeglasses preferences for 54 participants. We the precautions and behaviors of discomfort when wearing masks of eyewear wearers. Contact lens discomfort and priority action of complaints was investigated Glasses fitting factors is Optical Center Height(OH), Vertex Distance(VD) and Pantoscopic Angle(PA). We measured those factors and expressed by the ratio of standard point and change point. Quantitative fit factor was measured by Portacount Pro+ 8038. Also, we selected to 6 exercises among 8 exercises OSHA QNFT (Quantitative Fit testing) protocol to measure the fit factors. The pass/ fail criterion of FF was set at 100. Visual acuity(VA) test chart is developed by Chunsuk Han was used, Descriptive statistics was performed. Descriptive statistics(SAS ver 9.2), it is used geometric means, Wilcoxon analysis(P=0.05) When wearing the mask preferentially, fit factor(FF) was high according to the step of glasses fitting parameter. on the other hand, when the glasses first choice, the visual acuity(VA) was high. there was no significant difference. In the case of fit factor (FF), mask first choice/ glasses first choice is OH (p=0.671/ p=0.332), VD (p=0.602/ p=0.571) and PA (p=0.549/ p=0.607). Visual acuity (VA), mask first choice/ glasses first choice is OH (p=0.753/ p=0.386), VD (p=0.815/ p=0.557) and PA (p=0.856/ p=0.562). The workers of workplace and office chose glasses but occupational health workers and students chose mask. In case of discomforts, it was suggested to remove the mask and tolerate discomforts. The main discomforts and usual action of lens were dryness, hyperemia, foreign body sensation, ophthalmodynia, decreased vision and glasses wearing. Therefore, it is necessary to develop a mask wearing method education program considering glasses fitting and develop a hybrid model that minimizes inconvenience when wearing glasses and a mask at the same time.

• Applied Science and Convergence Technology
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• 제27권4호
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• pp.70-74
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• 2018

We fabricated an anode-type ion source driven by a charge repulsion mechanism and investigated its beam shape controlled by a Whenelt mask integrated at the front face of the source. The ion beam shape was observed to vary by changing the geometry of the Whenelt mask. As the angle of inclination of the Whenelt mask was varied from $40^{\circ}$ to $60^{\circ}$, the etched area at a thin film was reduced from 20 mm to 7.5 mm at the working distance of 286 mm, and the light transmittance through the etched surface was increased from 78% to 80%, respectively. In addition, for the step height difference, ${\Delta}$ between the inner mask and the outer mask of ${\Delta}=0$, -1 mm, and +1 mm, we observed the ion beam shape was formed to be collimated, diverged, and focused, respectively. The focal length of the focused beam was 269 mm. We approved experimentally a simple way of controlling the electric field of the ion beam by changing the geometry of the Whenelt mask such that the initial direction of the ion beam in the plasma region was manipulated effectively.

• Journal of Multimedia Information System
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• 제7권4호
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• pp.257-262
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• 2020

In this paper, a method of detecting the emergency situations such as body fall is proposed by using color images. We detect body areas and key parts of a body through a pre-learned Mask R-CNN in the images captured by a camera. Then we find the centerline of the body through the joint points of both shoulders and feet. Also, we calculate an angle to the center line and then calculate the amount of change in the angle per hour. If the angle change is more than a certain value, then it is decided as a suspected fall. Also, if the suspected fall state persists for more than a certain frame, then it is determined as a fall situation. Simulation results show that the proposed method can detect body fall situation accurately.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.140.2-140
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• 2001

In this paper, we develop the system which inspects the metal mask using area scan camera and belu type xy-table and introduce its inspection algorithm. Thes whole area of the metal mask is divides into several inspection block and the sixe of a inspection block is decided by FOV(Field of View). To compare with the camera image of each block, the reference image is made by gerber file. The ratation angle of the metal mask is calculated through the linear equation that is substituted two end points of horizontal boundary of a specific hole in a camera image for. To calculate the position error caused by belt type xy-table, hough-transform using the distances among the holes in two images os used. The center of the reference image is moved as much as the calculated position error to be coincide with the camera image ...

• 한국정밀공학회지
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• 제21권6호
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• pp.28-34
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• 2004

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass, silicon and ceramics, capable of producing micro structures larger than 100${\mu}{\textrm}{m}$. In this study, we introduced oblique powder blasting, and investigated the effect of the impacting angle of particles, the scanning times and the stand-off distance on the surface roughness and the weight-loss rate of samples with no mask, and the wall profile and overetching of samples with different mask pattern in powder blasting of soda-lime glass. The varying parameters were the different impact angles between 50$^{\circ}$ and 90$^{\circ}$, scanning times of nozzle up to 40 and the stand-off distances 70mm and 100mm. The widths of mask pattern were 0.2mm, 0.5mm and 1mm. The powder was alumina sharp particles, WA #600. The mass flow rate of powder during the erosion test was fixed constant at 175g/min and the blasting pressure of powder at 0.2Mpa.

• 대한치과교정학회지
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• 제26권5호
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• pp.547-556
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• 1996

본 연구는 성장기의 골격성 III급 부정교합 환자에서 face mask를 이용하여 상악골을 전방 견인하였을 때, 골격 및 치아관계와 연조직 측모의 변화를 관찰하고 face mask사용전후의 경조직과 연조직 변화의 유의성을 검정하여 상악골 열성장을 보이는 골격성 III급 부정교합 환자의 진단과 치료계획 수립에 도움을 주고자 하였다. 서울대학교병원 치과진료부 교정과에 내원하여 상악골 열성장에 의한 골격성 III급 부정교합으로 진단받고 face mask를 사용하여 양호한 치료결과를 보인 환자 15명을 대상으로 face mask사용전후 두부 방사선 계측사진을 촬영하고 face mask 사용전 계측치와 face mask사용후의 계측치를 분석하여 다음과 같은 결과를 얻었다. 1. SNA와 상악골의 실제 길이인 Co-A가 통계적으로 유의한 수준으로 증가하여(p<0.001), 상악골은 face mask에 의한 치료후 상당량 전방위치 되었다. 이는 face mask의 orthopedic effect에 의한 것이다. 2. 상, 하악골의 실제길이를 나타내는 Co-A, Co-Gn이 face mask 사용후 모두 유의성있게 증가하였다(p<0.01). 3. 하악골의 위치는 상당량 후하방 회전되었다. FMA(p<0.001), SN-GoGn(p<0.01), Y-axis(p<0.01) 등이 face mask 사용후 유의성있는 증가를 보였다. 4. 상악전치, 하악전치의 face mask사용후 치축의 경사도는 유의성있는 차이를 보이지 않았다. 5. 연조직에 대한 변화에서 상순의 위치가 전방으로 변화하여 정상적인 측모의 평균치에 가깝게 변한 것이 인정되었다(p<0.01).